公开(公告)号：US08922948B2

公开(公告)日：2014-12-30

申请号：US12118259

申请日：2008-05-09

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuo Ishizaki ,  Atsushi Iijima

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuo Ishizaki ,  Atsushi Iijima

IPC分类号： G11B5/17 ,  G11B5/31 ,  G11B5/127

CPC分类号： G11B5/3133 ,  G11B5/1278 ,  G11B5/3146

摘要： A thin-film magnetic head is constructed such that a main magnetic pole layer having a magnetic pole end face on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the main magnetic pole layer on the medium-opposing surface side, a gap layer formed between the main magnetic pole layer and write shield layer, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated on a substrate. This thin-film coil has a plurality of turn parts arranged at respective positions having different distances from the medium-opposing surface, while a non-expandable part made of an insulating material having a coefficient of thermal expansion smaller than that of a photosensitive resin is formed between the turn parts.

摘要翻译： 薄膜磁头被构造成使得在与介质相对的介质相对表面的侧面上具有磁极端面的主磁极层，与介质相对的主磁极层相对的写入屏蔽层 在主磁极层和写入屏蔽层之间形成的间隙层和缠绕在写入屏蔽层或主磁极层上的薄膜线圈层叠在基板上。 该薄膜线圈具有多个匝部，其布置在与中等相对表面不同距离的各个位置，而由热膨胀系数小于感光性树脂的绝缘材料制成的不可扩张部分是 形成在转弯部分之间。

公开(公告)号：US20090279207A1

公开(公告)日：2009-11-12

申请号：US12118259

申请日：2008-05-09

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuo Ishizaki ,  Atsushi Iijima

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuo Ishizaki ,  Atsushi Iijima

IPC分类号： G11B5/33

CPC分类号： G11B5/3133 ,  G11B5/1278 ,  G11B5/3146

摘要： A thin-film magnetic head is constructed such that a main magnetic pole layer having a magnetic pole end face on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the main magnetic pole layer on the medium-opposing surface side, a gap layer formed between the main magnetic pole layer and write shield layer, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated on a substrate. This thin-film coil has a plurality of turn parts arranged at respective positions having different distances from the medium-opposing surface, while a non-expandable part made of an insulating material having a coefficient of thermal expansion smaller than that of a photosensitive resin is formed between the turn parts.

摘要翻译： 薄膜磁头被构造成使得在与介质相对的介质相对表面的侧面上具有磁极端面的主磁极层，与介质相对的主磁极层相对的写入屏蔽层 在主磁极层和写入屏蔽层之间形成的间隙层和缠绕在写入屏蔽层或主磁极层上的薄膜线圈层叠在基板上。 该薄膜线圈具有多个匝部，其布置在与中等相对表面不同距离的各个位置，而由热膨胀系数小于感光性树脂的绝缘材料制成的不可扩张部分是 形成在转弯部分之间。

公开(公告)号：US08056214B2

公开(公告)日：2011-11-15

申请号：US12461644

申请日：2009-08-19

申请人： Yoshitaka Sasaki ,  Kazuo Ishizaki ,  Hironori Araki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Atsushi Iljima

发明人： Yoshitaka Sasaki ,  Kazuo Ishizaki ,  Hironori Araki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Atsushi Iljima

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetic head includes a pole layer, first and second side shields, and an encasing layer having a pole groove that accommodates the pole layer and first and second side shield grooves that accommodate the first and second side shields. In a manufacturing method for the magnetic head, the pole groove and first and second initial side shield grooves are formed in a nonmagnetic layer using an etching mask layer having first to third openings. In the manufacturing method, a wall face of the first initial side shield groove that is closer to the pole groove and a wall face of the second initial side shield groove that is closer to the pole groove are etched by dry etching to thereby complete the first and second side shield grooves.

摘要翻译： 磁头包括极层，第一和第二侧面屏蔽以及具有容纳磁极层的磁极槽和容纳第一和第二侧面屏蔽件的第一和第二侧面屏蔽槽的封装层。 在磁头的制造方法中，使用具有第一至第三开口的蚀刻掩模层，将磁极槽和第一和第二初始侧屏蔽槽形成为非磁性层。 在制造方法中，通过干蚀刻来蚀刻靠近极槽的第一初始侧屏蔽槽的壁面和靠近极槽的第二初始侧屏蔽槽的壁面，从而完成第一 和第二侧屏蔽槽。

公开(公告)号：US07943288B2

公开(公告)日：2011-05-17

申请号：US12232722

申请日：2008-09-23

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Kamigama ,  Tatsushi Shimizu ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Kamigama ,  Tatsushi Shimizu ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki

IPC分类号： G11B5/31

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49032

摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.

摘要翻译： 制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，该第一抗蚀剂层51具有对应于非常窄的槽部分的第一狭缝图案51a和对应于从非常窄的槽部分沿着主凹陷的外边缘整体延伸到绝缘体上的临时槽部分的第二狭缝图案51b 第10层; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。

公开(公告)号：US07910160B2

公开(公告)日：2011-03-22

申请号：US12219041

申请日：2008-07-15

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/127 ,  G11B5/33 ,  H01F27/02

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/313 ,  Y10T29/49032 ,  Y10T428/11

摘要： A thin-film magnetic head structure has a configuration adapted to manufacture a thin-film magnetic head configured such that a main magnetic pole layer including a magnetic pole end part on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole end part so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The main magnetic pole layer includes a base magnetic pole part comprising the magnetic pole end part and a base depression distanced farther from the medium-opposing surface than the magnetic pole end part, and an embedded magnetic pole part buried in the base depression and joined to the base magnetic pole part. The thin-film magnetic head structure includes a yoke magnetic pole part joined to the base magnetic pole part and embedded magnetic pole part at a position distanced farther from the medium-opposing surface than the recording gap layer, and an intervening insulative film disposed between the embedded magnetic pole part and yoke magnetic pole part at a position distanced farther from the medium-opposing surface than the recording gap layer.

摘要翻译： 薄膜磁头结构具有适于制造薄膜磁头的结构，该薄膜磁头被构造成使得包括在与记录介质相对的介质相对表面侧的磁极端部的主磁极层，写入屏蔽 层，以在介质相对表面侧上形成记录间隙层，并且缠绕在写入屏蔽层或主磁极层上的薄膜线圈层叠。 主磁极层包括基极磁极部分，该基极磁极部分包括磁极端部和距中间相对表面远离磁极端部的基座凹部，以及埋入基座凹部中的嵌入式磁极部， 基极磁极部分。 薄膜磁头结构包括：与记录间隙层相比离开与介质相对表面更远的位置处连接到基极磁极部分和嵌入式磁极部分的轭磁极部分，以及设置在介质相对表面之间的中间绝缘膜 嵌入式磁极部和轭磁极部位于比记录间隙层远离介质相对面的位置。

公开(公告)号：US20100301007A1

公开(公告)日：2010-12-02

申请号：US12457090

申请日：2009-06-01

申请人： Kazuo Ishizaki ,  Yoshitaka Sasaki ,  Hironori Araki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Cherng-Chyi Han

发明人： Kazuo Ishizaki ,  Yoshitaka Sasaki ,  Hironori Araki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Cherng-Chyi Han

IPC分类号： B44C1/22

CPC分类号： G11B5/3146 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetic head includes a pole layer, first and second side shields, and an encasing layer having first to third grooves that accommodate the pole layer and the first and second side shields. A manufacturing method for the magnetic head includes the step of forming the first to third grooves in a nonmagnetic layer by using an etching mask layer having first to third openings. This step includes the steps of forming the first groove by etching the nonmagnetic layer using the first opening, with the second and third openings covered with a first mask; and forming the second and third grooves by etching the nonmagnetic layer using the second and third openings, with the first opening covered with a second mask.

摘要翻译： 磁头包括极层，第一和第二侧屏蔽以及包含第一至第三沟槽的封装层，其容纳极层和第一和第二侧屏蔽。 磁头的制造方法包括通过使用具有第一至第三开口的蚀刻掩模层在非磁性层中形成第一至第三沟槽的步骤。 该步骤包括通过使用第一开口蚀刻非磁性层来形成第一凹槽的步骤，其中第二和第三开口被第一掩模覆盖; 以及通过使用所述第二和第三开口蚀刻所述非磁性层来形成所述第二和第三凹槽，其中所述第一开口被第二掩模覆盖。

公开(公告)号：US20090040655A1

公开(公告)日：2009-02-12

申请号：US12232723

申请日：2008-09-23

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Kamigama ,  Tatsushi Shimizu ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Kamigama ,  Tatsushi Shimizu ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49032

摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.

公开(公告)号：US08184398B2

公开(公告)日：2012-05-22

申请号：US12314565

申请日：2008-12-12

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Horinaka ,  Kazuo Ishizaki ,  Shigeki Tanemura

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Horinaka ,  Kazuo Ishizaki ,  Shigeki Tanemura

IPC分类号： G11B5/127 ,  C25F3/02

CPC分类号： G11B5/3106 ,  G11B5/17 ,  G11B5/3136 ,  Y10T428/1171

摘要： A magnetic head includes a coil, a pole layer, and a coil adjacent layer. The coil includes a winding portion having two side surfaces. The coil adjacent layer is adjacent to at least part of the whole of the two side surfaces of the winding portion. The coil adjacent layer is formed of a nonmagnetic material having a linear thermal expansion coefficient of 5×10−6/° C. or smaller at a temperature of 25° C. to 100° C. and having a thermal conductivity of 40 W/m·K or higher at a temperature of 25° C.

摘要翻译： 磁头包括线圈，极层和线圈相邻层。 线圈包括具有两个侧表面的绕组部分。 线圈相邻层与绕组部分的两个侧表面的整体的至少一部分相邻。 线圈相邻层由25℃〜100℃的线性热膨胀系数为5×10 -6 /℃以下的非磁性材料形成，导热率为40W / m·K以上的温度

公开(公告)号：US20070014048A1

公开(公告)日：2007-01-18

申请号：US11179728

申请日：2005-07-13

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Kamigama ,  Tatsushi Shimizu ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Kamigama ,  Tatsushi Shimizu ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49032

摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.

摘要翻译： 制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，其设置有对应于非常窄的槽部的第一狭缝图案51a和对应于沿着主凹部的外边缘从非常窄的槽部整体延伸的临时槽部的第二狭缝图案51b， 绝缘层10; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。

公开(公告)号：US08391109B2

公开(公告)日：2013-03-05

申请号：US13538996

申请日：2012-06-29

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/6088 ,  G11B2005/001 ,  G11B2005/0021 ,  Y10T29/49032

摘要： A manufacturing method for a heat-assisted magnetic recording head includes the step of forming an internal mirror that includes a reflecting film support body and a reflecting film. The reflecting film support body includes first and second inclined surfaces. The reflecting film includes first and second portions that are located on the first and second inclined surfaces, respectively. The step of forming the internal mirror includes the step of forming the reflecting film support body and the step of forming the reflecting film. The step of forming the reflecting film support body forms an initial support body, and performs two taper-etching processes on the initial support body so that the initial support body is provided with the first and second inclined surfaces.

摘要翻译： 一种热辅助磁记录头的制造方法，包括形成包括反射膜支撑体和反射膜的内反射镜的步骤。 反射膜支撑体包括第一和第二倾斜表面。 反射膜包括分别位于第一和第二倾斜表面上的第一和第二部分。 形成内反射镜的步骤包括形成反射膜支撑体的步骤和形成反射膜的步骤。 形成反射膜支撑体的步骤形成初始支撑体，并且在初始支撑体上执行两个锥形蚀刻处理，使得初始支撑体设置有第一和第二倾斜表面。