Pattern exposure method using electron beam
    5.
    发明授权
    Pattern exposure method using electron beam 失效
    使用电子束的图案曝光方法

    公开(公告)号:US06243487B1

    公开(公告)日:2001-06-05

    申请号:US09050355

    申请日:1998-03-31

    申请人: Ken Nakajima

    发明人: Ken Nakajima

    IPC分类号: G03F720

    摘要: Disclosed is a pattern exposure method for conducting an overlay exposure to a base pattern previously formed by using electron beam, which has the steps of: 1) dividing a group of patterns formed on the base pattern into arbitrary regions; 2) calculating an area density of the base pattern in each of the arbitrary regions; 3) generating a pattern according to the area density; 4) conducting sub-exposure using the pattern; and 5) conducting main exposure to expose a desired pattern.

    摘要翻译: 公开了一种用于对通过使用电子束预先形成的基底图案进行覆盖曝光的图案曝光方法,其具有以下步骤:1)将形成在基底图案上的一组图案划分成任意区域; 2)计算每个任意区域中的基本图案的面积密度; 3)根据面积密度生成图案; 4)使用图案进行次曝光; 和5)进行主要曝光以暴露期望的图案。

    Non-treatment type planographic printing plate materials
    7.
    发明授权
    Non-treatment type planographic printing plate materials 失效
    非处理型平版印刷版材料

    公开(公告)号:US4197124A

    公开(公告)日:1980-04-08

    申请号:US875708

    申请日:1978-02-06

    IPC分类号: G03C1/705 G03C1/76 G03F7/02

    CPC分类号: G03C1/705 Y10S430/133

    摘要: A planographic printing plate material comprising a support and a light sensitive layer provided on the support, the light-sensitive layer being composed of (A) an inorganic material; (B) at least one metal and/or metal compound [(A)/(B) are capable of reacting with each other upon application of electromagnetic radiation] and (C) an organic compound capable of affecting the reaction between the inorganic material (A) and the metal and/or metal compound (B), wherein the inorganic material (A), the metal or metal compound (B), and the organic compound (C) are in contact with each other. When the light-sensitive layer is exposed to electromagnetic radiation, a difference in the hydrophilic or oleophilic nature of the exposed areas and the unexposed areas results, whereby a planographic printing plate is obtained which can be mounted on a printing machine and printed without any other treatments.

    摘要翻译: 平版印刷版材料,其包含支撑体和设置在所述载体上的感光层,所述感光层由(A)无机材料构成; (B)至少一种金属和/或金属化合物[(A)/(B))在施加电磁辐射时能够彼此反应]和(C)能够影响无机材料 A)和金属和/或金属化合物(B),其中无机材料(A),金属或金属化合物(B)和有机化合物(C)彼此接触。 当感光层暴露于电磁辐射时,导致曝光区域和未曝光区域的亲水或亲油性质的差异,由此得到平版印刷版,其可以安装在印刷机上并且没有任何其它印刷 治疗。

    Microelectronic circuit production
    8.
    发明授权
    Microelectronic circuit production 失效
    微电路生产

    公开(公告)号:US3720515A

    公开(公告)日:1973-03-13

    申请号:US3720515D

    申请日:1971-10-20

    申请人: TRW INC

    发明人: STANLEY C

    摘要: Microelectronic circuits are produced by evaporating a photosensitive compound such as a silver halide onto a chip which is then exposed to radiation such as light, or an electron beam whose motion may be controlled by a computer or similar device. The chip is then developed leaving behind the metallic conductive circuit, and the undeveloped portion is removed preferably by heating.

    摘要翻译: 微电子电路通过将诸如卤化银的光敏化合物蒸发到然后暴露于诸如光的辐射的芯片上,或者可以通过计算机或类似装置控制其运动的电子束来产生微电子电路。 然后将芯片开发留下金属导电电路,优选通过加热去除未显影部分。