Abstract:
An insulator may be operable to electrically insulate a cathode from an anode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The insulator may be made of an aluminosilicate or a SiN/SiC material. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.
Abstract:
Low-pressure mercury vapor discharge lamp comprising a discharge vessel (10) having a first and a second end portion (12a, 12b), the discharge vessel (10) containing mercury and a rare gas, wherein the end portions (12a, 12b) each support an electrode (20a,20b) arranged in the discharge vessel (10) for initiating and maintaining a discharge in the discharge vessel (10), wherein an electrode shield (22a,22b) substantially encompasses at least one of the electrodes (20a,20b), and wherein said electrode shield (22a,22b) comprises an inner wall (23a) and an outer wall (24a), said walls (23a,24a) being spaced apart.
Abstract:
The invention relates to a method for operating a UV radiation source of the low-pressure gas discharge type. Said method comprises the following steps:nullimpingement of at least one heating coil with a heating voltage until the temperature of said coil has been increased;nullimpingement of the heating coil with a starting voltage in order to induce a gas discharge;nullmaintenance of the gas discharge by the application of a maintaining voltage and the disconnection of the heating voltage after the gas discharge has been started; in addition the following steps are preferably executed at any point in the method:nullinterrogation of an identification means that is connected to the UV radiation source andnullif the response to the interrogation is negative, prevention or interruption of the operation,nullif the response to the interrogation is positive, authorization of the operation. The invention also relates to a UV radiation source comprising a base body (20) and at least one connection zone which bears a number of electric connections (24, 25; 26, 27), whereby an identification means (28) that can be interrogated electrically is connected to the base body (20); and to a UV disinfection facility for fluids, in particular for water or waste water, said facility comprising at least one UV radiation source and an electric control and supply circuit that is located at a distance from the radiation source, whereby the control and supply circuit comprises an interrogation means which is suitable for verifying the presence of an identification means which is optionally assigned to the UV radiation source(s).
Abstract:
An apparatus for providing a visual lightning effect includes a first chamber and a second chamber, where a passageway connects the first chamber and the second chamber. An inert gas is provided within the first chamber, the second chamber, and the passageway. A first contact is located external to the first chamber; and a second contact is located external to the second chamber, wherein an electrode provides a charge to the second contact, wherein the charge causes an electrical discharge between the second contact and the first contact via channels provided by fill material located within the second chamber that traverses the passageway to the first chamber, thereby resulting in the brilliant visual lightning effect.
Abstract:
Ribs for an image display medium, which ribs can be retained between a pair of substrates. These image display medium ribs are formed by liquid injection molding (LIM molding), utilizing a heat-curable epoxy resin. In addition, the image display medium ribs are formed so as to have a cell-form arrangement.