ELECTRODE INSULATOR MATERIALS FOR USE IN EXTREME ULTRAVIOLET ELECTRIC DISCHARGE SOURCES
    1.
    发明申请
    ELECTRODE INSULATOR MATERIALS FOR USE IN EXTREME ULTRAVIOLET ELECTRIC DISCHARGE SOURCES 有权
    电极绝缘材料用于极端超紫外线放电源

    公开(公告)号:US20040140439A1

    公开(公告)日:2004-07-22

    申请号:US10349740

    申请日:2003-01-21

    CPC classification number: B82Y10/00 G03F7/70033 H05G2/003

    Abstract: An insulator may be operable to electrically insulate a cathode from an anode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The insulator may be made of an aluminosilicate or a SiN/SiC material. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.

    Abstract translation: 绝缘体可操作以使阴极与EUV光刻工具的极紫外(EUV)源中的阳极电绝缘。 绝缘体可以由铝硅酸盐或SiN / SiC材料制成。 极紫外光源可操作以产生发射极紫外辐射的等离子体。

    Low-pressure mercury vapor discharge lamp
    2.
    发明申请
    Low-pressure mercury vapor discharge lamp 失效
    低压汞蒸气放电灯

    公开(公告)号:US20040130257A1

    公开(公告)日:2004-07-08

    申请号:US10476808

    申请日:2003-11-04

    CPC classification number: H01J61/04 H01J61/045 H01J61/72

    Abstract: Low-pressure mercury vapor discharge lamp comprising a discharge vessel (10) having a first and a second end portion (12a, 12b), the discharge vessel (10) containing mercury and a rare gas, wherein the end portions (12a, 12b) each support an electrode (20a,20b) arranged in the discharge vessel (10) for initiating and maintaining a discharge in the discharge vessel (10), wherein an electrode shield (22a,22b) substantially encompasses at least one of the electrodes (20a,20b), and wherein said electrode shield (22a,22b) comprises an inner wall (23a) and an outer wall (24a), said walls (23a,24a) being spaced apart.

    Abstract translation: 低压汞蒸汽放电灯包括具有第一和第二端部(12a,12b)的放电容器(10),放电容器(10)含有汞和稀有气体,其中端部(12a,12b) 每个支撑布置在放电容器(10)中用于引发和保持放电容器(10)中的放电的电极(20a,20b),其中电极屏蔽件(22a,22b)基本上包围电极(20a,20b)中的至少一个 ,20b),并且其中所述电极屏蔽件(22a,22b)包括内壁(23a)和外壁(24a),所述壁(23a,24a)间隔开。

    Method and device for operating a uv-radiation source
    3.
    发明申请
    Method and device for operating a uv-radiation source 有权
    用于操作紫外辐射源的方法和装置

    公开(公告)号:US20040113102A1

    公开(公告)日:2004-06-17

    申请号:US10240617

    申请日:2002-12-23

    Inventor: Horst Wedekamp

    CPC classification number: H05B41/36 A61L2/10 C02F1/325 C02F2201/326 H01J61/02

    Abstract: The invention relates to a method for operating a UV radiation source of the low-pressure gas discharge type. Said method comprises the following steps:nullimpingement of at least one heating coil with a heating voltage until the temperature of said coil has been increased;nullimpingement of the heating coil with a starting voltage in order to induce a gas discharge;nullmaintenance of the gas discharge by the application of a maintaining voltage and the disconnection of the heating voltage after the gas discharge has been started; in addition the following steps are preferably executed at any point in the method:nullinterrogation of an identification means that is connected to the UV radiation source andnullif the response to the interrogation is negative, prevention or interruption of the operation,nullif the response to the interrogation is positive, authorization of the operation. The invention also relates to a UV radiation source comprising a base body (20) and at least one connection zone which bears a number of electric connections (24, 25; 26, 27), whereby an identification means (28) that can be interrogated electrically is connected to the base body (20); and to a UV disinfection facility for fluids, in particular for water or waste water, said facility comprising at least one UV radiation source and an electric control and supply circuit that is located at a distance from the radiation source, whereby the control and supply circuit comprises an interrogation means which is suitable for verifying the presence of an identification means which is optionally assigned to the UV radiation source(s).

    Abstract translation: 本发明涉及一种操作低压气体放电型紫外线辐射源的方法。 所述方法包括以下步骤: - 利用加热电压对至少一个加热线圈进行调节,直到所述线圈的温度升高为止; - 加热线圈以起动电压进行调节,以引起气体放电; - 维持 通过施加维持电压的气体放电和气体放电之后的加热电压的断开已经开始; 此外,优选在该方法中的任何点执行以下步骤: - 连接到UV辐射源的识别装置的指示,以及如果对询问的响应是否定的,防止或中断操作,如果 对询问的回应是积极的,授权的操作。 本发明还涉及一种UV辐射源,其包括基体(20)和至少一个连接区,该连接区具有多个电连接(24,25,26,27),由此可以询问识别装置(28) 电连接到基体(20); 以及用于流体,特别是用于水或废水的UV消毒设备,所述设备包括至少一个UV辐射源和位于离辐射源一定距离的电气控制和供应电路,由此控制和供应电路 包括询问装置,其适合于验证可选地分配给UV辐射源的识别装置的存在。

    Apparatus for providing a kinetic lightning effect
    4.
    发明申请
    Apparatus for providing a kinetic lightning effect 失效
    用于提供动能闪电效果的装置

    公开(公告)号:US20040217709A1

    公开(公告)日:2004-11-04

    申请号:US10428389

    申请日:2003-05-02

    Inventor: Wayne Strattman

    CPC classification number: H01J61/32 F21S10/00 F21W2121/00 H01J65/00

    Abstract: An apparatus for providing a visual lightning effect includes a first chamber and a second chamber, where a passageway connects the first chamber and the second chamber. An inert gas is provided within the first chamber, the second chamber, and the passageway. A first contact is located external to the first chamber; and a second contact is located external to the second chamber, wherein an electrode provides a charge to the second contact, wherein the charge causes an electrical discharge between the second contact and the first contact via channels provided by fill material located within the second chamber that traverses the passageway to the first chamber, thereby resulting in the brilliant visual lightning effect.

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