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公开(公告)号：US20230065039A1
公开(公告)日：2023-03-02
申请号：US17896463
申请日：2022-08-26
发明人： Erik Essers , Björn Gamm
IPC分类号： H01J37/145 , H01J37/28 , H01J37/147 , H01J37/244
摘要： A particle beam column generates a particle beam of charged particles, for example electrons or ions, and direct it onto a sample. The particle beam column comprises a multi-aperture stop and a deflection system for selectively steering the particle beam through one of a plurality of apertures provided in the multi-aperture stop. The apertures have different sizes in order to limit the current strength of the particle beam to different values. The particle beam column furthermore comprises a lens for changing the divergence angle of the particle beam upstream of a first stop. The lens can comprise a magnetic lens, which comprises a magnetic core with a plurality of parts, which are electrically insulated from one another and can have substantially different electrical potentials during operation. Some of the parts of the magnetic core can have the same electrical potential as the first stop during operation.
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公开(公告)号：US11594396B2
公开(公告)日：2023-02-28
申请号：US16834778
申请日：2020-03-30
发明人： Weiming Ren , Xuedong Liu , Xuerang Hu , Zhong-Wei Chen
IPC分类号： H01J37/20 , H01J37/317 , H01J37/145 , H01J37/147 , H01J37/244
摘要： A multi-beam inspection apparatus supporting a plurality of operation modes is disclosed. The charged particle beam apparatus for inspecting a sample supporting a plurality of operation modes comprises a charged particle beam source configured to emit a charged particle beam along a primary optical axis, a movable aperture plate, movable between a first position and a second position, and a controller having circuitry and configured to change the configuration of the apparatus to switch between a first mode and a second mode. In the first mode, the movable aperture plate is positioned in the first position and is configured to allow a first charged particle beamlet derived from the charged particle beam to pass through. In the second mode, the movable aperture plate is positioned in the second position and is configured to allow the first charged particle beamlet and a second charged particle beamlet to pass through.
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3.发明申请公开(公告)号：US20220230836A1
公开(公告)日：2022-07-21
申请号：US17152480
申请日：2021-01-19
发明人： Benjamin John Cook
IPC分类号： H01J37/145 , H01J37/147 , H01J37/317
摘要： It is provided a charged particle beam manipulation device for a plurality of charged particle beamlets, the charged particle beam manipulation device including a lens having a main optical axis, the lens including at least a first array of multipoles, each multipole of the first array of multipoles configured to compensate for a lens deflection force on a respective charged particle beamlet of the plurality of charged particle beamlets, the lens deflection force being a deflection force produced by the lens on the respective charged particle beamlet towards the main optical axis of the lens.
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公开(公告)号：US20210319977A1
公开(公告)日：2021-10-14
申请号：US17226017
申请日：2021-04-08
发明人： Xuedong LIU , Weimin ZHOU , Xiaoxue CHEN , Xiaoyu JI , Heng LI , Shahedul HOQUE , Zongyao LI , Shuhao LIU , Weiming REN
IPC分类号： H01J37/28 , H01J37/145 , H01J37/244 , H01J37/147
摘要： Systems and methods of imaging a sample using a charged-particle beam apparatus are disclosed. The charged-particle beam apparatus may include a compound objective lens comprising a magnetic lens and an electrostatic lens, the magnetic lens comprising a cavity, and an electron detector located immediately upstream from a polepiece of the magnetic lens and inside the cavity of the magnetic lens. In some embodiments, deflectors may be located between the electron detector and the opening of the polepiece adjacent to the sample to achieve a large field of view. Electron distributions among the detectors can be manipulated without changing the landing energy by changing the potential of the control electrode(s) in the electrostatic objective lens. The electron source can be operated with several discrete potentials to cover different landing energies, while the potential difference between electron source and the extractor is fixed.
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公开(公告)号：US20210296081A1
公开(公告)日：2021-09-23
申请号：US17056285
申请日：2018-05-22
发明人： Yuta IMAI , Masahiro SASAJIMA , Yoshihiro TAKAHOKO
IPC分类号： H01J37/145 , H01J37/244 , H01J37/20 , H01J37/28 , H01J37/26
摘要： In a charged particle beam device including a deceleration optical system, a change in a deceleration electric field and an axis shift due to a structure between an objective lens and a sample are prevented to reduce adverse effects on an irradiation system and detection system. The charged particle beam device includes an electron source, an objective lens configured to focus a probe electron beam from the electron source on the sample, an acceleration electrode configured to accelerate the probe electron beam, a first detector provided in the acceleration electrode, a deceleration electrode configured to form a deceleration electric field for the probe electron beam with the acceleration electrode, the probe electron beam being configured to pass through an opening of the deceleration electrode, and a second detector inserted between the deceleration electrode and the sample. The second detector includes an opening portion larger than the opening of the deceleration electrode, and a sensing surface is provided around the opening portion.
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公开(公告)号：US20210241992A1
公开(公告)日：2021-08-05
申请号：US17160679
申请日：2021-01-28
发明人： Andreas Schertel , Andreas Schmaunz , Endre Majorovits , Bernd Stenke , Stephan Hiller , Matthias Karl
IPC分类号： H01J37/16 , H01J37/20 , H01J37/145 , H01J37/147 , H01J37/244 , H01J37/28
摘要： An object receiving container may receive an object which is examinable, analyzable and/or processable at cryo-temperatures. An object holding system may comprise an object receiving container. A beam apparatus or an apparatus for processing an object may comprise an object receiving container or an object holding system. An object may be examined, analyzed and/or processed using an object receiving container or an object holding system. The object receiving container may comprise a first container unit, a cavity for receiving the object, a second container unit, which is able to be brought into a first position and/or into a second position relative to the first container unit, and at least one fastening device which is arranged at the first container unit or at the second container unit for arranging the object receiving container at a holding device.
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公开(公告)号：US11062874B2
公开(公告)日：2021-07-13
申请号：US16474027
申请日：2017-12-22
发明人： Weiming Ren , Xuedong Liu , Xuerang Hu , Zhong-wei Chen
IPC分类号： H01J37/145
摘要： The present disclosure proposes an anti-rotation lens and using it as an anti-rotation condenser lens in a multi-beam apparatus with a pre-beamlet-forming mechanism. The anti-rotation condenser lens keeps rotation angles of beamlets unchanged when changing currents thereof, and thereby enabling the pre-beamlet-forming mechanism to cut off electrons not in use as much as possible. In this way, the multi-beam apparatus can observe a sample with high resolution and high throughput, and is competent as a yield management tool to inspect and/or review defects on wafers/masks in semiconductor manufacturing industry.
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公开(公告)号：US10991544B2
公开(公告)日：2021-04-27
申请号：US16425094
申请日：2019-05-29
IPC分类号： H01J37/285 , H01J37/317 , H01J37/145
摘要： A charged particle beam device for inspecting a specimen is described. The charged particle beam device includes a beam source for emitting a charged particle beam, an electrode for influencing the charged particle beam, and a damping unit provided on the electrode for damping vibrations of the electrode. Further, an objective lens module with an electrode is described, wherein a damping unit is provided on the electrode. Further, an electrode device is described, wherein a mass damper is mounted on a disk-shaped electrode body of the electrode device.
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公开(公告)号：US20210110994A1
公开(公告)日：2021-04-15
申请号：US15779763
申请日：2018-05-02
IPC分类号： H01J37/28 , H01J37/145 , H01J37/244
摘要： A scanning electron microscope objective lens system is disclosed, which includes: a magnetic lens, a deflection device, a deflection control electrode, specimen to be observed, and a detection device; in which, The opening of the pole piece of the magnetic lens faces to the specimen; the deflection device is located in the magnetic lens, which includes at least one sub-deflector; the deflection control electrode is located between the detection device and the specimen, and the deflection control electrode is used to change the direction of the primary electron beam and the signal electrons generating from the specimen; the detection device comprises the first sub-detector for detecting the back-scattered electrons and the second sub-detector for detecting the second electrons. A specimen detection method is also disclosed.
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公开(公告)号：US20210027977A1
公开(公告)日：2021-01-28
申请号：US17040121
申请日：2018-03-29
IPC分类号： H01J37/147 , H01J37/244 , H01J37/145
摘要： When using a charged particle beam aperture having a ring shape in a charged particle beam device, the charged particle beam with the highest current density immediately above the optical axis, among the charged particle beams is blocked, so that it is difficult to dispose the charged particle beam aperture at the optimal mounting position. Therefore, in addition to the ring-shaped charged particle beam aperture, a hole-shaped charged particle beam aperture is provided, and it is possible to switch between the case where the ring-shaped charged particle beam aperture is disposed on the optical axis of the charged particle beam and the case where the hole-shaped charged particle beam aperture is disposed on the optical axis of the charged particle beam.
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