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91.发明申请Magnetic head and method of manufacturing same, and method of forming patterned layer 有权磁头及其制造方法，以及形成图案层的方法公开(公告)号：US20070279802A1
公开(公告)日：2007-12-06
申请号：US11443048
申请日：2006-05-31
申请人： Yoshitaka Sasaki , Kazuo Ishizaki , Hiroyuki Itoh
发明人： Yoshitaka Sasaki , Kazuo Ishizaki , Hiroyuki Itoh
IPC分类号： G11B5/147
CPC分类号： G01R33/093 , B82Y25/00 , G11B5/1278 , G11B5/3116 , G11B5/3163 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method of forming a magnetic head comprises the steps of: selectively exposing through the use of a photomask a photoresist layer unpatterned; forming a pattern for forming a pole layer by developing the photoresist layer after the exposure; and forming the pole layer through the use of the pattern. The photomask includes first to third regions. The first region has such a perimeter that a projection image thereof is shaped along a perimeter of an ideal shape of the top surface of the pole layer. The second region touches the perimeter of the first region, and is located outside the first region. The third region is located inside the first region without touching the perimeter of the first region. The third region suppresses deviation of the pole layer from its desired shape which may be caused by the effect of light reflected while the photoresist layer is exposed.
摘要翻译： 一种形成磁头的方法包括以下步骤：通过使用光掩模选择性曝光未图案化的光致抗蚀剂层; 通过在曝光后显影光致抗蚀剂层，形成用于形成极层的图案; 并通过使用图案形成极层。 光掩模包括第一至第三区域。 第一区域具有这样的周边，使得其投影图像沿着极层顶表面的理想形状的周边成形。 第二区域接触第一区域的周边，并且位于第一区域的外部。 第三区域位于第一区域内，而不接触第一区域的周边。 第三区域抑制极性层与其期望形状的偏差，这可能是由光致抗蚀剂层暴露时反射的光的影响引起的。
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92.发明申请公开(公告)号：US20070211377A1
公开(公告)日：2007-09-13
申请号：US11372259
申请日：2006-03-10
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Dong-Hong Li , Joseph Smyth , Lijie Guan , Yaw-Shing Tang
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Dong-Hong Li , Joseph Smyth , Lijie Guan , Yaw-Shing Tang
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3163
摘要： A pole layer has an end face located in a medium facing surface, allows a magnetic flux corresponding to a magnetic field generated by a coil to pass therethrough, and generates a write magnetic field for writing data on a recording medium by means of a perpendicular magnetic recording system. A shield incorporates: a first layer having an end face located in a region of the medium facing surface forward of the end face of the pole layer along the direction of travel of the recording medium; a second layer disposed in a region sandwiching the pole layer with the first layer; a first coupling portion coupling the first layer to the second layer without touching the pole layer; and a second coupling portion coupling the pole layer to the second layer and located farther from the medium facing surface than the first coupling portion.
摘要翻译： 极层具有位于介质相对表面中的端面，允许对应于由线圈产生的磁场的磁通量通过，并产生用于通过垂直磁场将数据写入记录介质的写入磁场 录音系统 屏蔽包括：第一层，其具有沿着记录介质的行进方向位于所述极层的端面的前面的介质面向表面的区域中的端面; 第二层，设置在将所述极层与所述第一层夹在中间的区域中; 将第一层耦合到第二层而不接触极层的第一耦合部分; 以及第二耦合部分，其将所述极层耦合到所述第二层并且位于比所述第一耦合部更远离所述介质面对表面。
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公开(公告)号：US07249408B2
公开(公告)日：2007-07-31
申请号：US10807280
申请日：2004-03-24
CPC分类号： G11B5/1877 , G11B5/31 , Y10T29/49032 , Y10T29/49039 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： The method of manufacturing a thin-film magnetic head in accordance with the present invention comprises the steps of forming a first magnetic pole layer; removing both sides in a track width direction of the first magnetic pole layer so as to leave a predetermined residual area in the first magnetic pole layer; forming an insulating layer about the residual area of the first magnetic pole layer; forming a gap layer made of a nonmagnetic material; forming a second magnetic pole layer magnetically connected to the first magnetic pole; and patterning the second magnetic pole layer by etching while using a mask.
摘要翻译： 根据本发明的制造薄膜磁头的方法包括以下步骤：形成第一磁极层; 去除第一磁极层的轨道宽度方向上的两侧，以便在第一磁极层中留下预定的残留区域; 围绕第一磁极层的剩余区域形成绝缘层; 形成由非磁性材料制成的间隙层; 形成磁性地连接到所述第一磁极的第二磁极层; 并且在使用掩模时通过蚀刻对第二磁极层进行图案化。
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94.发明申请公开(公告)号：US20070014048A1
公开(公告)日：2007-01-18
申请号：US11179728
申请日：2005-07-13
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.
摘要翻译： 制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，其设置有对应于非常窄的槽部的第一狭缝图案51a和对应于沿着主凹部的外边缘从非常窄的槽部整体延伸的临时槽部的第二狭缝图案51b， 绝缘层10; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。
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公开(公告)号：US07141357B2
公开(公告)日：2006-11-28
申请号：US10786048
申请日：2004-02-26
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49032
摘要： A track width defining layer includes: a track width defining portion having an end located in the air bearing surface and the other end located opposite to the air bearing surface; and a wide portion coupled to the other end of the track width defining portion. The track width defining layer is formed by frame plating. A frame is formed by exposing and developing a resist layer. The step of exposing the resist layer includes: a first exposure step for forming a first latent image in the resist layer; and a second exposure step for forming a second latent image in the resist layer. The first latent image is made up of a first portion corresponding to the track width defining portion and a second portion adjoining the first portion and extending along the contour of the wide portion. The second latent image is intended for use in combination with the first latent image so as to form a latent image corresponding to the track width defining layer, and does not include a portion corresponding to the track width defining portion.
摘要翻译： 轨道宽度限定层包括：轨道宽度限定部分，其具有位于空气轴承表面中的端部，而另一端位于与空气支承表面相对的位置; 并且宽部分联接到轨道宽度限定部分的另一端。 轨道宽度限定层通过框架电镀形成。 通过曝光和显影抗蚀剂层形成框架。 曝光抗蚀剂层的步骤包括：用于在抗蚀剂层中形成第一潜像的第一曝光步骤; 以及在抗蚀剂层中形成第二潜像的第二曝光步骤。 第一潜像由对应于轨道宽度限定部分的第一部分和与第一部分邻接并沿着宽部分的轮廓延伸的第二部分组成。 第二潜像旨在与第一潜像组合使用以形成对应于轨道宽度限定层的潜像，并且不包括对应于轨道宽度限定部分的部分。
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96.发明申请公开(公告)号：US20060256483A1
公开(公告)日：2006-11-16
申请号：US11129377
申请日：2005-05-16
IPC分类号： G11B5/33
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/313 , G11B5/3169
摘要： A pole layer has: a first portion having an end face located in a medium facing surface; and a second portion that is located farther from the medium facing surface than the first portion and has a thickness greater than that of the first portion. A surface of the first portion farther from a substrate is located closer to the substrate than a surface of the second portion farther from the substrate. The second portion has a front end face that couples the surface of the first portion farther from the substrate to the surface of the second portion farther from the substrate. A shield layer has a portion located between the front end face and the medium facing surface in a region closer to the substrate than the surface of the second portion farther from the substrate.
摘要翻译： 极层具有：第一部分，其具有位于介质面向表面中的端面; 以及比所述第一部分位于比所述介质相对表面更远的第二部分，并且具有大于所述第一部分的厚度的厚度。 距离基板更远的第一部分的表面比距离基板更远的第二部分的表面更靠近基板。 第二部分具有前端面，该前端面将第一部分的表面从基板延伸到距离基板更远的第二部分的表面。 屏蔽层在距离基板的第二部分的表面更靠近基板的区域中具有位于前端面和介质对向表面之间的部分。
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公开(公告)号：US07131186B2
公开(公告)日：2006-11-07
申请号：US10862371
申请日：2004-06-08
CPC分类号： G11B5/3967 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/3166 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： On a surface of a bottom pole, a write gap film and first magnetic material film having a high saturation magnetic flux density are formed, and the first magnetic material film is etched to remain a portion extending from an air bearing surface to a throat height zero reference position and a first non-magnetic film is formed in a removed portion. The first non-magnetic material film is polished to obtain a flat surface which is coplanar with a surface of the first magnetic material film. A second magnetic material film having a high saturation magnetic flux density is formed on the flat surface. The second magnetic material film, first magnetic material film, write gap film and bottom pole are partially removed by RIE using a mask formed on the flat surface.
摘要翻译： 在底极的表面上，形成具有高饱和磁通密度的写间隙膜和第一磁性材料膜，并且蚀刻第一磁性材料膜以保持从空气轴承表面延伸到喉部高度零的部分 参考位置和第一非磁性膜形成在去除部分中。 第一非磁性材料膜被抛光以获得与第一磁性材料膜的表面共面的平坦表面。 在平坦表面上形成具有高饱和磁通密度的第二磁性材料膜。 使用形成在平坦表面上的掩模，通过RIE部分地除去第二磁性材料膜，第一磁性材料膜，写入间隙膜和底部极。
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公开(公告)号：US20060238917A1
公开(公告)日：2006-10-26
申请号：US11110743
申请日：2005-04-21
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A thin-film magnetic head for perpendicular magnetic recording according to the present invention comprises a coil to generate a magnetic field, and a main pole layer to perform the perpendicular recording using the magnetic field generated by said coil. The lower surface as to the layer-forming direction of said main pole layer has irregularities at the medium-facing surface side end.
摘要翻译： 根据本发明的用于垂直磁记录的薄膜磁头包括产生磁场的线圈和使用由所述线圈产生的磁场执行垂直记录的主极层。 所述主极层的层形成方向的下表面在面向中间的表面侧具有凹凸。
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公开(公告)号：US20060238916A1
公开(公告)日：2006-10-26
申请号：US11109671
申请日：2005-04-20
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/3163
摘要： The present invention is directed to a thin-film magnetic head having no ATE problem, a very narrow track width, an excellent O/W characteristic and a high switching speed. A lower pole film of a write element is provided on one face of a lower yoke film inside a trench portion provided in an inorganic insulating film. A gap film and an upper pole film are provided inside the trench portion on the lower pole portion. The trench portion has preferably an attached film made of an inorganic material on the inner wall faces facing the side faces of said lower pole film, said gap film and said upper pole film.
摘要翻译： 本发明涉及一种不具有ATE问题，非常窄的磁道宽度，优异的O / W特性和高切换速度的薄膜磁头。 写入元件的下极膜设置在设置在无机绝缘膜中的沟槽部分内的下磁轭膜的一个面上。 间隙膜和上极膜设置在下极部分上的沟槽部分的内部。 沟槽部分优选地在与所述下极膜，所述间隙膜和所述上极膜的侧面相对的内壁面上由无机材料制成的附着膜。
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100.发明授权Thin-film magnetic head, method of manufacturing the same, head gimbal assembly, and hard disk drive 有权薄膜磁头，制造方法，磁头万向架组件和硬盘驱动器公开(公告)号：US07119989B2
公开(公告)日：2006-10-10
申请号：US10781827
申请日：2004-02-20
CPC分类号： G11B5/4826 , G11B5/33
摘要： A thin-film magnetic head comprises first and second magnetic pole groups, magnetically connected to each other, having respective magnetic pole parts opposing each other on a side of a medium-opposing surface; a recording gap layer formed between the magnetic pole parts; and a thin-film coil insulated from the first and second magnetic pole groups and wound helically about at least one of them or flatly spirally wound about a junction connecting the first and second magnetic pole groups to each other; which are laminated on a substrate. The thin-film coil comprises a first conductor group having a plurality of inner conductor parts disposed between the first and second magnetic pole groups, and a second conductor group having a plurality of outer conductor parts disposed outside the second magnetic pole group or junction. The first conductor group has an insulating contact structure in which the inner conductor parts are in contact with each other by way of an insulating film. An inner relaxing part comprising a material softer than at least one of the first, second conductor groups and the first, second magnetic pole groups and being in contact with the first conductor group by way of an insulating film is provided.
摘要翻译： 薄膜磁头包括彼此磁连接的第一和第二磁极组，它们在介质相对表面的一侧具有彼此相对的各自的磁极部分; 形成在所述磁极部之间的记录间隙层; 以及薄膜线圈，其与所述第一和第二磁极组绝缘并围绕其中的至少一个螺旋形地缠绕，或者围绕将所述第一和第二磁极组彼此连接的结的平面螺旋形缠绕; 其层压在基板上。 薄膜线圈包括具有设置在第一和第二磁极组之间的多个内部导体部分的第一导体组和具有设置在第二磁极组或接合部之外的多个外部导体部分的第二导体组。 第一导体组具有绝缘接触结构，其中内导体部分通过绝缘膜彼此接触。 提供了一种内部放松部分，其包括比第一，第二导体组和第一，第二磁极组中的至少一个更柔软的材料，并且通过绝缘膜与第一导体组接触。
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