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1.发明授权Magnetic head for perpendicular magnetic recording having a pole layer including a plurality of stacked magnetic films 有权用于垂直磁记录的磁头，其具有包括多个堆叠的磁性膜的极层公开(公告)号：US08687320B2
公开(公告)日：2014-04-01
申请号：US13440554
申请日：2012-04-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A magnetic head includes a pole layer accommodated in a groove. The pole layer has a track width defining portion and a wide portion. The pole layer includes a plurality of magnetic films stacked. At least one of the plurality of magnetic films includes a first portion included in the track width defining portion, a second portion included in the wide portion, and a third portion coupling the first and second portions to each other. In a cross section passing through the center of the pole layer taken in the track width direction, the second portion is smaller than the first portion in thickness and the top surface of the third portion is inclined with respect to a direction perpendicular to a medium facing surface.
摘要翻译： 磁头包括容纳在凹槽中的极层。 极层具有轨道宽度限定部分和宽部分。 极层包括堆叠的多个磁性膜。 多个磁性膜中的至少一个包括包括在轨道宽度限定部分中的第一部分，包括在宽部分中的第二部分和将第一部分和第二部分彼此联接的第三部分。 在通过沿着磁道宽度方向取得的磁极层的中心的横截面中，第二部分的厚度小于第一部分，并且第三部分的顶表面相对于垂直于面向介质的介质的方向倾斜 表面。
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2.发明申请公开(公告)号：US20090294402A1
公开(公告)日：2009-12-03
申请号：US12153987
申请日：2008-05-28
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an encasing layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes: the step of etching a nonmagnetic layer that will become the encasing layer later, such that an initial groove including the first portion is formed in the nonmagnetic layer; the step of forming an initial groove mask covering the first portion; and a second etching step for etching the nonmagnetic layer so as to complete the groove. When the second etching step starts, a portion of the top surface of the bottom forming layer located in a region in which the second portion is to be formed is covered with the nonmagnetic layer or the initial groove mask.
摘要翻译： 磁头包括：包括轨道宽度限定部分和宽部分的极层; 以及设置在底部形成层上并具有容纳极层的槽的封装层。 凹槽包括用于容纳轨道宽度限定部分的至少一部分的第一部分和用于容纳至少部分宽部分的第二部分。 磁头的制造方法包括以下步骤：在非磁性层中形成包含第一部分的初始槽，从而蚀刻将成为封装层的非磁性层; 形成覆盖所述第一部分的初始槽掩模的步骤; 以及用于蚀刻非磁性层以完成凹槽的第二蚀刻步骤。 当第二蚀刻步骤开始时，位于要形成第二部分的区域中的底部形成层的顶表面的一部分被非磁性层或初始凹槽掩模覆盖。
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3.发明申请Method of manufacturing magnetic head having a patterned pole layer and method of forming a patterned layer 有权具有图案化极层的磁头的制造方法和形成图案层的方法公开(公告)号：US20090269708A1
公开(公告)日：2009-10-29
申请号：US12458178
申请日：2009-07-02
申请人： Yoshitaka Sasaki , Kazuo Ishizaki , Hiroyuki Itoh
发明人： Yoshitaka Sasaki , Kazuo Ishizaki , Hiroyuki Itoh
IPC分类号： G03F7/20
CPC分类号： G01R33/093 , B82Y25/00 , G11B5/1278 , G11B5/3116 , G11B5/3163 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method of forming a magnetic head comprises the steps of: selectively exposing through the use of a photomask a photoresist layer unpatterned; forming a pattern for forming a pole layer by developing the photoresist layer after the exposure; and forming the pole layer through the use of the pattern. The photomask includes first to third regions. The first region has such a perimeter that a projection image thereof is shaped along a perimeter of an ideal shape of the top surface of the pole layer. The second region touches the perimeter of the first region, and is located outside the first region. The third region is located inside the first region without touching the perimeter of the first region. The third region suppresses deviation of the pole layer from its desired shape which may be caused by the effect of light reflected while the photoresist layer is exposed.
摘要翻译： 一种形成磁头的方法包括以下步骤：通过使用光掩模选择性曝光未图案化的光致抗蚀剂层; 通过在曝光后显影光致抗蚀剂层，形成用于形成极层的图案; 并通过使用图案形成极层。 光掩模包括第一至第三区域。 第一区域具有这样的周边，使得其投影图像沿着极层顶表面的理想形状的周边成形。 第二区域接触第一区域的周边，并且位于第一区域的外部。 第三区域位于第一区域内，而不接触第一区域的周边。 第三区域抑制极性层与其期望形状的偏差，这可能是由光致抗蚀剂层暴露时反射的光的影响引起的。
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4.发明授权公开(公告)号：US07369361B2
公开(公告)日：2008-05-06
申请号：US11050892
申请日：2005-02-07
CPC分类号： G11B5/3173 , G11B5/3166 , G11B5/3169 , G11B5/39 , G11B5/3903 , Y10T29/49032 , Y10T29/49037 , Y10T29/49043 , Y10T29/49048
摘要： A method of manufacturing magnetic heads comprises the step of: fabricating a magnetic head substructure by forming components of a plurality of magnetic heads on a single substrate, wherein a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. In the substructure first resistor elements and second resistor elements are formed. Each of the first resistor elements has a resistance that varies depending on the location of an end of an MR element located in a medium facing surface along the direction orthogonal to the medium facing surface. Each of the second resistor elements has a resistance that varies depending on the location of an end face of a track width defining portion located in the medium facing surface along the direction orthogonal to the medium facing surface. The medium facing surfaces are formed while monitoring the resistance values of the first and second resistor elements.
摘要翻译： 一种制造磁头的方法包括以下步骤：通过在单个基板上形成多个磁头的部件来制造磁头子结构，其中随后将成为相应磁头的多行预磁头部分对准 在子结构中; 以及通过切割子结构将前头部彼此分开来制造磁头。 在子结构中，形成第一电阻元件和第二电阻元件。 每个第一电阻器元件具有根据位于面向介质的表面中的MR元件沿着与介质面对表面正交的方向的端部的位置而变化的电阻。 每个第二电阻器元件具有根据位于介质相对表面中的轨道宽度限定部分的端面沿着与面向介质的表面正交的方向的位置而变化的电阻。 在监测第一和第二电阻元件的电阻值的同时形成面向介质的表面。
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5.发明授权公开(公告)号：US07336442B2
公开(公告)日：2008-02-26
申请号：US11207891
申请日：2005-08-22
IPC分类号： G11B5/147
CPC分类号： G11B5/3166 , G11B5/3163 , G11B5/3169 , G11B5/3173
摘要： A method of manufacturing magnetic heads comprises the steps of: fabricating a magnetic head substructure by forming components of a plurality of magnetic heads on a single substrate so that a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. Indicator sections are formed in the substructure. The indicator sections include first indicators and second indicators. Widths of the first and second indicators are equal in an imaginary surface indicating a target location of the medium facing surfaces. One of the widths of the first and second indicators decreases while the other increases with shifts in position along the direction orthogonal to the medium facing surfaces.
摘要翻译： 一种制造磁头的方法包括以下步骤：通过在单个基板上形成多个磁头的部件来制造磁头子结构，使得将成为相应磁头的多排前磁头部分排列在一起 在子结构中; 以及通过切割子结构将前头部彼此分开来制造磁头。 指示器部分形成在子结构中。 指标部分包括第一指标和第二指标。 第一和第二指示器的宽度在虚拟表面中相等，表示介质面对表面的目标位置。 第一和第二指示器的宽度之一减小，而另一个指示器沿着与面向介质的表面正交的方向上的位置偏移而增加。
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6.发明申请公开(公告)号：US20060077590A1
公开(公告)日：2006-04-13
申请号：US10998584
申请日：2004-11-30
IPC分类号： G11B5/147
CPC分类号： G11B5/314 , G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/4906
摘要： A pole-layer-encasing layer made of a nonmagnetic material is disposed on an underlying layer made of a nonmagnetic conductive material. The encasing layer has a groove that penetrates. A pole layer is disposed in the groove. The pole layer is formed by plating through feeding a current to the underlying layer. A polishing stopper layer made of a nonmagnetic conductive material is disposed on the top surface of the encasing layer. The polishing stopper layer indicates the level at which polishing for controlling the thickness of the pole layer is stopped. The polishing stopper layer has an opening that penetrates, and the edge of the opening is located directly above the edge of the groove located in the top surface of the encasing layer.
摘要翻译： 由非磁性材料制成的极层封装层设置在由非磁性导电材料制成的下层上。 包装层具有穿透的凹槽。 极层设置在槽中。 极层通过将电流馈送到下层而通过电镀形成。 由非磁性导电材料制成的抛光阻挡层设置在封装层的顶表面上。 抛光停止层表示用于控制极层的厚度的抛光停止的水平。 抛光停止层具有穿透的开口，并且开口的边缘位于位于包装层的顶表面中的槽的边缘的正上方。
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公开(公告)号：US20050128639A1
公开(公告)日：2005-06-16
申请号：US10682732
申请日：2003-10-10
申请人： Yoshitaka Sasaki , Takehiro Kamigawa , Hiroyuki Itoh , Kazuo Ishizaki , Shigeki Tanemura , Hironori Araki
发明人： Yoshitaka Sasaki , Takehiro Kamigawa , Hiroyuki Itoh , Kazuo Ishizaki , Shigeki Tanemura , Hironori Araki
CPC分类号： G11B5/3903
摘要： The invention is directed to improvement of a write element of a thin film magnetic head. In said write element, a first coil and a second coil are provided on a first insulating film formed on one surface of a first magnetic film and surround in a spiral form a back gap portion. A second yoke portion in the upper position comprises a wide portion, a narrow portion and a sloping flare portion. The wide portion has a flat surface and is connected to the first magnetic film by a back gap portion at the rear of the medium-facing surface. The narrow portion forms the second pole portion and the surface of the narrow portion being at a lower position than the surface of the wide portion. The sloping flare portion extends from the narrow portion to the wide portion, gradually increasing in width and its surface sloping upward away from the surface of the narrow portion to the surface of the wide portion.
摘要翻译： 本发明旨在改进薄膜磁头的写入元件。 在所述写入元件中，第一线圈和第二线圈设置在形成在第一磁性膜的一个表面上的第一绝缘膜上，并以螺旋形式包围在后部间隙部分中。 在上部位置的第二轭部包括宽部分，窄部分和倾斜的张开部分。 宽部分具有平坦的表面，并且通过位于介质表面的后部的后间隙部分连接到第一磁性膜。 窄部分形成第二极部分，并且窄部分的表面处于比宽部分的表面更低的位置。 倾斜的喇叭口部分从窄部分延伸到宽部分，宽度逐渐增加，并且其表面向上倾斜远离窄部分的表面到宽部分的表面。
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公开(公告)号：US07663839B2
公开(公告)日：2010-02-16
申请号：US11129377
申请日：2005-05-16
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/313 , G11B5/3169
摘要： A pole layer has: a first portion having an end face located in a medium facing surface; and a second portion that is located farther from the medium facing surface than the first portion and has a thickness greater than that of the first portion. A surface of the first portion farther from a substrate is located closer to the substrate than a surface of the second portion farther from the substrate. The second portion has a front end face that couples the surface of the first portion farther from the substrate to the surface of the second portion farther from the substrate. A shield layer has a portion located between the front end face and the medium facing surface in a region closer to the substrate than the surface of the second portion farther from the substrate.
摘要翻译： 极层具有：第一部分，其具有位于介质面向表面中的端面; 以及比所述第一部分位于比所述介质相对表面更远的第二部分，并且具有大于所述第一部分的厚度的厚度。 距离基板更远的第一部分的表面比距离基板更远的第二部分的表面更靠近基板。 第二部分具有前端面，该前端面将第一部分的表面从基板延伸到距离基板更远的第二部分的表面。 屏蔽层在距离基板的第二部分的表面更靠近基板的区域中具有位于前端面和介质对向表面之间的部分。
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9.发明申请公开(公告)号：US20070041126A1
公开(公告)日：2007-02-22
申请号：US11207891
申请日：2005-08-22
IPC分类号： G11B5/147
CPC分类号： G11B5/3166 , G11B5/3163 , G11B5/3169 , G11B5/3173
摘要： A method of manufacturing magnetic heads comprises the steps of: fabricating a magnetic head substructure by forming components of a plurality of magnetic heads on a single substrate so that a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. Indicator sections are formed in the substructure. The indicator sections include first indicators and second indicators. Widths of the first and second indicators are equal in an imaginary surface indicating a target location of the medium facing surfaces. One of the widths of the first and second indicators decreases while the other increases with shifts in position along the direction orthogonal to the medium facing surfaces.
摘要翻译： 一种制造磁头的方法包括以下步骤：通过在单个基板上形成多个磁头的部件来制造磁头子结构，使得将成为相应磁头的多排前磁头部分排列在一起 在子结构中; 以及通过切割子结构将前头部彼此分开来制造磁头。 指示器部分形成在子结构中。 指标部分包括第一指标和第二指标。 第一和第二指示器的宽度在虚拟表面中相等，表示介质面对表面的目标位置。 第一和第二指示器的宽度之一减小，而另一个指示器沿着与面向介质的表面正交的方向上的位置偏移而增加。
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10.发明授权Thin film magnetic head and manufacturing method for creating high surface recording density and including a second yoke portion having two layers of which one is etched to form a narrow portion and a sloped flare portion 有权薄膜磁头和用于产生高表面记录密度的制造方法，并且包括具有两层蚀刻以形成窄部分的第二磁轭部分和倾斜的光晕部分公开(公告)号：US07151647B2
公开(公告)日：2006-12-19
申请号：US10682732
申请日：2003-10-10
申请人： Yoshitaka Sasaki , Takehiro Kamigama , Hiroyuki Itoh , Kazuo Ishizaki , Shigeki Tanemura , Hironori Araki
发明人： Yoshitaka Sasaki , Takehiro Kamigama , Hiroyuki Itoh , Kazuo Ishizaki , Shigeki Tanemura , Hironori Araki
IPC分类号： G11B5/187
CPC分类号： G11B5/3903
摘要： The invention is directed to improvement of a write element of a thin film magnetic head. In the write element, a first coil and a second coil are provided on a first insulating film formed on one surface of a first magnetic film and surround in a spiral form a back gap portion. A second yoke portion in the upper position comprises a wide portion, a narrow portion and a sloping flare portion. The wide portion has a flat surface and is connected to the first magnetic film by a back gap portion at the rear of the medium-facing surface. The narrow portion forms the second pole portion and the surface of the narrow portion being at a lower position than the surface of the wide portion. The sloping flare portion extends from the narrow portion to the wide portion, gradually increasing in width and its surface sloping upward away from the surface of the narrow portion to the surface of the wide portion.
摘要翻译： 本发明旨在改进薄膜磁头的写入元件。 在写入元件中，第一线圈和第二线圈设置在形成在第一磁性膜的一个表面上的第一绝缘膜上，并以螺旋形状包围后部间隙部分。 在上部位置的第二轭部包括宽部分，窄部分和倾斜的张开部分。 宽部分具有平坦的表面，并且通过位于介质表面的后部的后间隙部分连接到第一磁性膜。 窄部分形成第二极部分，并且窄部分的表面处于比宽部分的表面更低的位置。 倾斜的喇叭口部分从窄部分延伸到宽部分，宽度逐渐增加，并且其表面向上倾斜远离窄部分的表面到宽部分的表面。
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