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公开(公告)号：US20050134815A1
公开(公告)日：2005-06-23
申请号：US10743271
申请日：2003-12-23
CPC分类号： G03F7/70341 , G03F7/7085
摘要： A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
摘要翻译： 公开了一种用于浸没式光刻投影装置的液体供应系统，其中在投影系统，阻挡构件和基板之间限定空间。 阻挡构件不被密封，使得在使用期间，允许浸没液体流出空间以及阻挡构件和基底之间。
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公开(公告)号：US06550941B1
公开(公告)日：2003-04-22
申请号：US09717507
申请日：2000-11-21
IPC分类号： F21V500
CPC分类号： F21V5/02 , F21Y2115/10
摘要： A luminaire suitable for accommodating a light source which light source is situated substantially in a first plane. The luminaire has an optical element which is situated substantially in a second plane. The optical element is provided with facets of mutually differing inclination angles at one or both sides. The facets are shaped as substantially parallel prisms. Consecutive facets form a surface which is alternately convex and concave in shape.
摘要翻译： 一种适于容纳光源的照明器，该光源基本上位于第一平面中。 照明器具有基本上位于第二平面中的光学元件。 光学元件设置有在一侧或两侧具有相互不同的倾斜角的小平面。 小面成形为基本平行的棱镜。 连续小面形成交替凸形和凹形的表面。
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公开(公告)号：US08767171B2
公开(公告)日：2014-07-01
申请号：US12727456
申请日：2010-03-19
IPC分类号： G03B27/42
CPC分类号： G03F7/70866 , G03F7/70341
摘要： A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
摘要翻译： 公开了一种用于浸没式光刻投影装置的液体供应系统，其中在投影系统，阻挡构件和基板之间限定空间。 阻挡构件不被密封，使得在使用期间，允许浸没液体流出空间以及阻挡构件和基底之间。
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94.发明授权Cyclonic liquid degassing separator and method for degassing a fluid mixture 有权旋风液体脱气分离器和用于对流体混合物进行脱气的方法公开(公告)号：US08105422B2
公开(公告)日：2012-01-31
申请号：US12306539
申请日：2007-06-27
申请人： Marco Betting , Bart Prast , Helmar Van Santen , Cornelius Johannes Schellekens , Paulus Henricus Joannes Verbeek , Peter Mervyn Wilkinson
发明人： Marco Betting , Bart Prast , Helmar Van Santen , Cornelius Johannes Schellekens , Paulus Henricus Joannes Verbeek , Peter Mervyn Wilkinson
IPC分类号： B01D19/00
摘要： The invention is a method and cyclonic separator for degassing a fluid mixture comprising a carrier liquid and gaseous or vaporizable components. In this method, the fluid mixture is accelerated in a throat section of a vortex tube such that the static pressure of the fluid mixture is decreased and vaporizable components evaporate into a gaseous phase and the fluid mixture flows as a substantially homogeneously dispersed gas-liquid mixture through the throat section; the accelerated fluid mixture is induced to swirl within a tubular mid section of the vortex tube such that the fluid mixture is separated by centrifugal forces into a degassed liquid fraction and a gas enriched fraction; the degassed liquid fraction is induced to flow into an annular liquid outlet conduit; and the gas enriched fraction is induced to flow into a central gas outlet conduit.
摘要翻译： 本发明是用于对包含载体液体和气态或可汽化组分的流体混合物进行脱气的方法和旋风分离器。 在这种方法中，流体混合物在涡流管的喉部被加速，使得流体混合物的静压降低，并且可蒸发的组分蒸发成气相，并且流体混合物作为基本上均匀分散的气液混合物 通过喉部; 加速的流体混合物在涡流管的管状中间部分内引起涡流，使得流体混合物通过离心力分离成脱气的液体馏分和富含气体的馏分; 诱发脱气的液体部分流入环形液体出口导管; 并且气体富集部分被诱导流入中心气体出口导管。
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95.发明申请PROCESS AND APPARATUS FOR SEPARATING A GASEOUS PRODUCT FROM A FEED STREAM COMPRISING CONTAMINANTS 审中-公开从包含污染物的进料流分离气态产品的方法和装置公开(公告)号：US20120006055A1
公开(公告)日：2012-01-12
申请号：US13143463
申请日：2010-01-06
CPC分类号： F25J3/061 , B01D45/12 , B01D53/002 , B01D2256/16 , B01D2256/20 , B01D2257/304 , B01D2257/504 , C10L3/10 , C10L3/102 , F25J3/0625 , F25J3/0635 , F25J3/067 , F25J3/0675 , F25J2205/20 , F25J2210/70 , F25J2215/04 , F25J2220/64 , F25J2220/66 , F25J2240/02 , F25J2240/40 , F25J2240/60 , F25J2245/02 , F25J2270/12 , F25J2270/60 , F25J2270/66 , F25J2290/42 , Y02C10/12 , Y02E60/324
摘要： A process and apparatus for separating at least part of a gaseous product from a feed stream which comprises contaminants. The process comprises: 1) providing the feed stream; 2) cooling the feed stream to a temperature at which a slurry stream is formed which comprises solid contaminant, liquid phase contaminant and the gaseous product; 3) introducing the slurry stream as obtained in step 2) via a plurality of tangentially directed inlet means into an upper part of a separation device, thereby creating a swirl of the slurry stream which allows at least part of the gaseous product to flow upwardly and solid contaminant and liquid phase contaminant to flow downwardly; 4) removing at least part of the gaseous product from the upper part of the device; and 5) removing a stream comprising liquid phase contaminant from a lower part of the device.
摘要翻译： 用于从包含污染物的进料流中分离至少部分气态产物的方法和装置。 该方法包括：1）提供进料流; 2）将进料流冷却到形成浆料流的温度，其中包括固体污染物，液相污染物和气态产物; 3）将通过多个切向定向的入口装置的步骤2）中获得的浆料流引入分离装置的上部，由此产生浆料流的漩涡，其允许至少部分气态产物向上流动， 固体污染物和液相污染物向下流动; 4）从装置的上部去除至少部分气体产物; 和5）从装置的下部去除包含液相污染物的物流。
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96.发明申请PROCESS AND APPARATUS FOR REMOVING GASEOUS CONTAMINANTS FROM GAS STREAM COMPRISING GASEOUS CONTAMINANTS 有权从包含气体污染物的气体流中除去气体污染物的工艺和装置公开(公告)号：US20110167869A1
公开(公告)日：2011-07-14
申请号：US13061435
申请日：2009-10-16
CPC分类号： H01F5/04 , B01D53/002 , B01D2256/24 , C10L3/10 , C10L3/102 , C10L3/104 , F25J3/061 , F25J3/0635 , F25J3/067 , F25J2205/02 , F25J2205/20 , F25J2210/60 , F25J2215/04 , F25J2215/60 , F25J2215/80 , F25J2220/64 , F25J2220/66 , F25J2240/02 , F25J2240/40 , F25J2240/60 , F25J2245/02 , F25J2270/12 , F25J2270/60 , F25J2270/66 , F25J2290/42 , H01F27/2895 , H01R13/6633 , H01R13/6658 , H01R24/64
摘要： A transformer has a toroidal core with an opening therein and a plurality of wires to define a central winding section, a plurality of outer twisted wire sections and a plurality of wire proximity sections positioned between each outer twisted wire section and the central winding section. The central winding section includes a plurality of wires wrapped around the toroidal core and coupling a conductor of a primary side of a transformer and a conductor of a secondary side of a transformer. Each outer twisted wire section includes at least a pair of wires twisted together in a predetermined twisted pattern that are electrically connected to but spaced from the central winding section. The wire proximity section is configured to maintain physical proximity between the conductor of the primary side of the transformer and the conductor of the secondary side of the transformer.
摘要翻译： 变压器具有在其中具有开口的环形铁芯和多条电线，以限定中心绕组部分，多个外部绞合线部分和位于每个外部绞合线部分和中心绕组部分之间的多个线接近部分。 中心绕组部分包括缠绕在环形芯上的多条线，并且耦合变压器的初级侧的导体和变压器次级侧的导体。 每个外部绞线部分包括至少一对以预定的扭曲图案扭绞在一起的一对导线，所述扭绞图形电连接到中心绕组部分但是与中心绕组部分隔开。 导线接近部分被配置为保持变压器的初级侧的导体与变压器次级侧的导体之间的物理接近。
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公开(公告)号：US07710541B2
公开(公告)日：2010-05-04
申请号：US11882292
申请日：2007-07-31
CPC分类号： G03F7/70341 , G03F7/7085
摘要： A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
摘要翻译： 公开了一种用于浸没式光刻投影装置的液体供应系统，其中在投影系统，阻挡构件和基板之间限定空间。 阻挡构件不被密封，使得在使用期间，允许浸没液体流出空间以及阻挡构件和基底之间。
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98.发明授权公开(公告)号：US07642297B2
公开(公告)日：2010-01-05
申请号：US10568837
申请日：2004-08-05
申请人： Emile Johannes Karel Verstegen , Johan George Kloosterboer , Hendrik Roelof Stapert , Jacobus Hermanus Maria Neijzen , Helmar Van Santen
发明人： Emile Johannes Karel Verstegen , Johan George Kloosterboer , Hendrik Roelof Stapert , Jacobus Hermanus Maria Neijzen , Helmar Van Santen
CPC分类号： C09J135/02
摘要： A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymeriazble groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.
摘要翻译： 公开了一种非浸出粘合剂系统及其在用于浸入式写入光盘的液浸物镜中的用途。 粘合剂体系包含至少一种选自丙烯酸酯和甲基丙烯酸酯单体的单体，烯丙基单体，降冰片烯单体，含有化学上不同的聚合物基团的杂化单体和多官能硫醇单体，条件是所述硫醇与 所述非硫醇单体中的至少一种; 和聚合引发剂。 至少一种所述单体（不是硫醇）具有至少两个官能的可聚合基团以获得交联的聚合物网络。 聚合引发剂优选是能够以热辐射和UV辐射活化的引发剂。 粘合剂体系还可以含有反应性稀释剂。 此外，公开了本发明的粘合剂系统在安装液浸物镜中的用途。
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公开(公告)号：US20080198473A1
公开(公告)日：2008-08-21
申请号：US11917171
申请日：2006-06-12
IPC分类号： G02B3/14
CPC分类号： G02B3/14
摘要： The invention relates to variable focus lenses based on magneto wetting and related devices, wherein two fluids, one of which is magnetically susceptible, are in contact over a meniscus. The shape of the meniscus is controlled by means of an applied magnetic field gradient. The contact angle between the chamber wall and the meniscus is a conserved. Implementation of special shaping to the internal or external walls of the chamber, while conserving the contact angle, results in better lens shape in the variable focus lens and lower levels of lens distortion.
摘要翻译： 本发明涉及基于磁润湿和相关装置的可变焦距透镜，其中两个流体（其中之一是磁敏感的）在弯液面上接触。 弯液面的形状通过施加的磁场梯度来控制。 室壁和弯液面之间的接触角是保守的。 在腔室的内壁或外壁实现特殊成形，同时节省接触角，导致可变焦距透镜更好的透镜形状和更低的透镜变形水平。
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公开(公告)号：US07394521B2
公开(公告)日：2008-07-01
申请号：US10743271
申请日：2003-12-23
CPC分类号： G03F7/70341 , G03F7/7085
摘要： A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
摘要翻译： 公开了一种用于浸没式光刻投影装置的液体供应系统，其中在投影系统，阻挡构件和基板之间限定空间。 阻挡构件不被密封，使得在使用期间，允许浸没液体流出空间以及阻挡构件和基底之间。
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