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公开(公告)号：US20090128888A1
公开(公告)日：2009-05-21
申请号：US12291931
申请日：2008-11-13
IPC分类号： G02B26/02
CPC分类号： G09G3/346 , G09G3/02 , G09G3/2037 , G09G3/2077 , G09G2300/0876 , G09G2300/088 , G09G2310/0262 , G09G2310/0267 , H01L2224/48091 , H01L2924/00014
摘要： The present invention provides a mirror array device, comprising: a plurality of mirror elements each comprising a hinge and a deflectable mirror supported by the hinge; a memory cell for controlling the mirror element; a bit line for transmitting a data signal to the memory cell; a word line for controlling a connection between the bit line and the memory cell; a plate line for controlling the memory cell. Each of the mirror elements further comprises a first address electrode controlled by the word line to connect to the memory cell. Each of the mirror elements further comprises a second address electrode electrically connected to the plate line.
摘要翻译： 本发明提供了一种镜阵列装置，包括：多个镜元件，每个镜元件包括由铰链支撑的铰链和可偏转镜; 用于控制镜元件的存储单元; 用于将数据信号发送到存储单元的位线; 用于控制位线和存储单元之间的连接的字线; 用于控制存储单元的板线。 每个反射镜元件还包括由字线控制以连接到存储器单元的第一寻址电极。 每个镜元件还包括电连接到板线的第二寻址电极。
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公开(公告)号：US08064123B2
公开(公告)日：2011-11-22
申请号：US12590053
申请日：2009-10-30
CPC分类号： G02B26/0833 , H04N5/7458 , H04N9/312
摘要： The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.
摘要翻译： 本发明提供了一种利用形成并支撑在用作空间光调制器的衬底上的微机电系统（MEMS）器件实现的图像显示系统，其中MEMS器件还包括设置在衬底上的驱动电路; 用作可移动电极的微镜，其支撑在从基板延伸的可偏转铰链上; 固定电极，其设置在所述基板上并连接到所述驱动电路以从其接收信号，其中所述固定电极包括第一电极，第二电极和绝缘层，其中所述绝缘层设置在所述第一电极和第二电极之间。
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公开(公告)号：US20090207325A1
公开(公告)日：2009-08-20
申请号：US12381581
申请日：2009-03-12
申请人： Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
发明人： Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
IPC分类号： H04N5/74
CPC分类号： G02B26/0841 , G09G3/2014 , G09G3/2022 , G09G3/2029 , G09G3/3413 , G09G3/346 , G09G2300/0439 , G09G2300/0842 , G09G2300/0857 , G09G2310/0221 , G09G2310/0235
摘要： The present invention provides a spatial light modulator, comprising: a pixel array comprising a plurality of pixel elements; a plurality of word lines each connected to a row of pixel elements; a plurality of plate lines; and a plurality of bit lines each connected to a column of pixel elements, wherein each of the pixel elements further comprises a memory and an electrode connected to the memory, wherein the memory is connected to the word line and the word line is further connected to the plate line.
摘要翻译： 本发明提供了一种空间光调制器，包括：包括多个像素元件的像素阵列; 多个字线，各自连接到一行像素元件; 多条板条; 以及多个位线，每个位线连接到一列像素元件，其中每个像素元件还包括存储器和连接到存储器的电极，其中存储器连接到字线，并且字线进一步连接到 板线。
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公开(公告)号：US20090201568A1
公开(公告)日：2009-08-13
申请号：US12378656
申请日：2009-02-18
IPC分类号： G02F1/31
CPC分类号： G02B26/0833
摘要： The present invention provides a spatial light modulator, comprising a mirror modulating a light emitted from a light source, wherein the mirror is further controlled to operate with at least three stationary states whereby an image is projected with a gray scale expression through a combination of modulation of the light operated in the three stationary states.
摘要翻译： 本发明提供了一种空间光调制器，其包括调制从光源发出的光的反射镜，其中所述反射镜被进一步控制为以至少三个静止状态操作，由此通过调制的组合以灰度表达式投射图像 的光在三个固定状态下运行。
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公开(公告)号：US20090161198A1
公开(公告)日：2009-06-25
申请号：US12378655
申请日：2009-02-18
IPC分类号： G02F1/31
CPC分类号： G02B26/0833
摘要： The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.
摘要翻译： 本发明提供了一种镜装置，包括：放置在基板上的电极; 连接到电极的存储电路; 弹性铰链，设置在所述电极附近并且从所述基板延伸，用于支撑所述电极上方的反射镜，其中所述弹性铰链具有负的温度系数电阻。
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公开(公告)号：US07969395B2
公开(公告)日：2011-06-28
申请号：US12384021
申请日：2009-03-30
申请人： Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
发明人： Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
CPC分类号： G02B26/0841 , G09G3/2014 , G09G3/2022 , G09G3/346 , G09G2300/0426 , G09G2300/0439 , G09G2300/0842 , G09G2300/0857
摘要： The present invention discloses a spatial light modulator includes a plurality of pixel elements disposed on a substrate. Each of the pixel elements comprises a deflectable micromirror. Specifically, instead of SRAM, the spatial light modulator is implemented with a DRAM in each of the pixel elements. The DRAM in each of the pixel elements has a smaller number of transistors than SRAM. The spatial light modulator can be manufactured with smaller pixel size and circuit configuration with improved withstand voltage. Further improvements can also be achieved for manufactured the spatial light modulator with smaller capacitor with better layout configuration for wire connections and control signal transmissions.
摘要翻译： 本发明公开了一种空间光调制器，其包括设置在基板上的多个像素元件。 每个像素元件包括可偏转微镜。 具体地，代替SRAM，在每个像素元件中用DRAM实现空间光调制器。 每个像素元件中的DRAM具有比SRAM少的晶体管数量。 空间光调制器可以制造成具有更小的像素尺寸和具有改进的耐受电压的电路配置。 还可以实现进一步的改进，以制造具有较小电容器的空间光调制器，具有更好的布线配置用于导线连接和控制信号传输。
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公开(公告)号：US20100214646A1
公开(公告)日：2010-08-26
申请号：US12586268
申请日：2009-09-18
申请人： Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
发明人： Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , H04N9/3105 , H04N9/3111 , H04N9/312
摘要： The present invention provides an image projection system comprising a spatial light modulator (SLM) comprises a plurality of pixel elements, wherein each of the pixel elements further comprises a deflectable mirror, and at least a first electrode and a second electrode for controlling the deflectable mirror to deflect to different tilt angles to reflect and modulate an illumination light for displaying an image; and a controller for applying a voltage to the second electrode wherein the voltage applied in an initial operation period is different from the voltage applied in an image display period.
摘要翻译： 本发明提供了一种图像投影系统，其包括包括多个像素元件的空间光调制器（SLM），其中每个像素元件还包括可偏转镜，以及用于控制可偏转镜的至少第一电极和第二电极 以偏转到不同的倾斜角度以反射和调制用于显示图像的照明光; 以及用于向第二电极施加电压的控制器，其中在初始操作周期中施加的电压与在图像显示周期中施加的电压不同。
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公开(公告)号：US20090207324A1
公开(公告)日：2009-08-20
申请号：US12381446
申请日：2009-03-11
申请人： Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
发明人： Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
CPC分类号： G02B26/0841 , G09G3/2033 , G09G3/346 , G09G2300/0426 , G09G2300/0439 , G09G2300/0842 , G09G2300/0857 , G09G2310/0221 , G09G2360/16 , H04N9/3123
摘要： The present invention provides a spatial light modulator comprises a plurality of deflectable mirror controllable to deflect from a horizontal state to first and second deflecting directions; an electrode connected to a memory and disposed in the first deflecting direction underneath each of the deflectable mirrors; and an electrode connected to a plate line and disposed in the second deflecting direction underneath each of the deflectable mirrors.
摘要翻译： 本发明提供了一种空间光调制器，包括多个可偏转反射镜，其可控制从水平状态偏转到第一和第二偏转方向; 连接到存储器并且设置在每个可偏转反射镜下方的第一偏转方向上的电极; 以及连接到板线并且设置在每个可偏转镜下方的第二偏转方向上的电极。
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公开(公告)号：US20080285112A1
公开(公告)日：2008-11-20
申请号：US12220770
申请日：2008-07-28
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
摘要翻译： 镜装置包括：电极，被覆有由含有半导体材料的材料制成的保护膜并放置在基板上; 放在电极上方的镜子; 以及放置在反射镜和电极之间的导电铰链，其中开口部分形成在保护膜的一部分中，并且铰链在其开口部分中穿透保护膜。
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公开(公告)号：US20080074729A1
公开(公告)日：2008-03-27
申请号：US11894248
申请日：2007-08-18
IPC分类号： G02F1/19
CPC分类号： G02B26/0833
摘要： A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.
摘要翻译： 镜装置包括：设置在基板上的多个电极; 连接到至少一个所述电极的铰链; 连接到铰链并对应于至少一个电极的反射镜，其中阻挡层包括在铰链和反射镜之间，和/或在铰链和电极之间。 还注意到用于制造这种配置的反射镜装置的镜装置制造方法。 进一步注意到包括这种配置的反射镜装置的投影装置。
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