Cyclonic liquid degassing separator and method for degassing a fluid mixture
    91.
    发明授权
    Cyclonic liquid degassing separator and method for degassing a fluid mixture 有权
    旋风液体脱气分离器和用于对流体混合物进行脱气的方法

    公开(公告)号:US08105422B2

    公开(公告)日:2012-01-31

    申请号:US12306539

    申请日:2007-06-27

    IPC分类号: B01D19/00

    摘要: The invention is a method and cyclonic separator for degassing a fluid mixture comprising a carrier liquid and gaseous or vaporizable components. In this method, the fluid mixture is accelerated in a throat section of a vortex tube such that the static pressure of the fluid mixture is decreased and vaporizable components evaporate into a gaseous phase and the fluid mixture flows as a substantially homogeneously dispersed gas-liquid mixture through the throat section; the accelerated fluid mixture is induced to swirl within a tubular mid section of the vortex tube such that the fluid mixture is separated by centrifugal forces into a degassed liquid fraction and a gas enriched fraction; the degassed liquid fraction is induced to flow into an annular liquid outlet conduit; and the gas enriched fraction is induced to flow into a central gas outlet conduit.

    摘要翻译: 本发明是用于对包含载体液体和气态或可汽化组分的流体混合物进行脱气的方法和旋风分离器。 在这种方法中,流体混合物在涡流管的喉部被加速,使得流体混合物的静压降低,并且可蒸发的组分蒸发成气相,并且流体混合物作为基本上均匀分散的气液混合物 通过喉部; 加速的流体混合物在涡流管的管状中间部分内引起涡流,使得流体混合物通过离心力分离成脱气的液体馏分和富含气体的馏分; 诱发脱气的液体部分流入环形液体出口导管; 并且气体富集部分被诱导流入中心气体出口导管。

    Lithographic apparatus and device manufacturing method
    94.
    发明授权
    Lithographic apparatus and device manufacturing method 失效
    平版印刷设备和器件制造方法

    公开(公告)号:US07710541B2

    公开(公告)日:2010-05-04

    申请号:US11882292

    申请日:2007-07-31

    IPC分类号: G03B27/42 G03B27/52

    CPC分类号: G03F7/70341 G03F7/7085

    摘要: A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.

    摘要翻译: 公开了一种用于浸没式光刻投影装置的液体供应系统,其中在投影系统,阻挡构件和基板之间限定空间。 阻挡构件不被密封,使得在使用期间,允许浸没液体流出空间以及阻挡构件和基底之间。

    Non-leaching adhesive system and its use in a liquid immersion objective
    95.
    发明授权
    Non-leaching adhesive system and its use in a liquid immersion objective 有权
    非浸出粘合剂系统及其在液体浸入物中的应用

    公开(公告)号:US07642297B2

    公开(公告)日:2010-01-05

    申请号:US10568837

    申请日:2004-08-05

    IPC分类号: C08F2/46 C09J4/02

    CPC分类号: C09J135/02

    摘要: A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymeriazble groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.

    摘要翻译: 公开了一种非浸出粘合剂系统及其在用于浸入式写入光盘的液浸物镜中的用途。 粘合剂体系包含至少一种选自丙烯酸酯和甲基丙烯酸酯单体的单体,烯丙基单体,降冰片烯单体,含有化学上不同的聚合物基团的杂化单体和多官能硫醇单体,条件是所述硫醇与 所述非硫醇单体中的至少一种; 和聚合引发剂。 至少一种所述单体(不是硫醇)具有至少两个官能的可聚合基团以获得交联的聚合物网络。 聚合引发剂优选是能够以热辐射和UV辐射活化的引发剂。 粘合剂体系还可以含有反应性稀释剂。 此外,公开了本发明的粘合剂系统在安装液浸物镜中的用途。

    Variable Focus Lens
    96.
    发明申请
    Variable Focus Lens 审中-公开
    可变焦距镜头

    公开(公告)号:US20080198473A1

    公开(公告)日:2008-08-21

    申请号:US11917171

    申请日:2006-06-12

    IPC分类号: G02B3/14

    CPC分类号: G02B3/14

    摘要: The invention relates to variable focus lenses based on magneto wetting and related devices, wherein two fluids, one of which is magnetically susceptible, are in contact over a meniscus. The shape of the meniscus is controlled by means of an applied magnetic field gradient. The contact angle between the chamber wall and the meniscus is a conserved. Implementation of special shaping to the internal or external walls of the chamber, while conserving the contact angle, results in better lens shape in the variable focus lens and lower levels of lens distortion.

    摘要翻译: 本发明涉及基于磁润湿和相关装置的可变焦距透镜,其中两个流体(其中之一是磁敏感的)在弯液面上接触。 弯液面的形状通过施加的磁场梯度来控制。 室壁和弯液面之间的接触角是保守的。 在腔室的内壁或外壁实现特殊成形,同时节省接触角,导致可变焦距透镜更好的透镜形状和更低的透镜变形水平。

    Lithographic apparatus and device manufacturing method
    97.
    发明授权
    Lithographic apparatus and device manufacturing method 有权
    光刻设备和器件制造方法

    公开(公告)号:US07394521B2

    公开(公告)日:2008-07-01

    申请号:US10743271

    申请日:2003-12-23

    IPC分类号: G03B27/42 G03B27/52

    CPC分类号: G03F7/70341 G03F7/7085

    摘要: A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.

    摘要翻译: 公开了一种用于浸没式光刻投影装置的液体供应系统,其中在投影系统,阻挡构件和基板之间限定空间。 阻挡构件不被密封,使得在使用期间,允许浸没液体流出空间以及阻挡构件和基底之间。

    Liquid removal in a method and device for irradiating spots on a layer
    99.
    发明授权
    Liquid removal in a method and device for irradiating spots on a layer 有权
    用于在层上照射斑点的方法和装置中的液体去除

    公开(公告)号:US07358507B2

    公开(公告)日:2008-04-15

    申请号:US10538115

    申请日:2003-11-14

    申请人: Helmar Van Santen

    发明人: Helmar Van Santen

    IPC分类号: G21G5/00

    摘要: For irradiating a layer (3) a radiation beam (7) is directed and focused to a spot (11) on the layer (3), relative movement of the layer (3) relative to the optical element (59) is caused so that, successively, different portions of the layer (3) are irradiated and an interspace (53) between a surface of the optical element (59) nearest to the layer (3) is maintained. Furthermore, at least a portion of the interspace (53) through which the radiation irradiates the spot (11) on the layer (3) is maintained filled with a liquid (91). By directing a gas flow (71-73) to a surface zone (74) of the layer (3), liquid (91) is reliably prevented from passing that surface zone (74), without causing damage to the layer (3). The liquid (91) is drawn away from the layer (3) in the vicinity of the surface zone (74).

    摘要翻译: 为了照射层(3),辐射束(7)被引导并聚焦到层(3)上的斑点(11),引起层(3)相对于光学元件(59)的相对运动,使得 照射层(3)的不同部分,并且维持最靠近层(3)的光学元件(59)的表面之间的间隙(53)。 此外,辐射照射层(3)上的斑点(11)的间隙(53)的至少一部分保持充满液体(91)。 通过将气流(71-73)引导到层(3)的表面区域(74),可靠地防止液体(91)通过该表面区域(74),而不会损坏层(3)。 液体(91)在表面区域(74)附近从层(3)被拉出。

    Method and device for irradiating spots on a layer
    100.
    发明申请
    Method and device for irradiating spots on a layer 有权
    用于在层上照射斑点的方法和装置

    公开(公告)号:US20060209414A1

    公开(公告)日:2006-09-21

    申请号:US10539351

    申请日:2003-11-20

    IPC分类号: G02B1/10

    摘要: For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the optical element is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the optical element nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit and flowing out of an outflow opening through a total projected cross-sectional passage area in a plane parallel to the layer. The outflow opening or a plurality of the outflow openings are positioned such that, seen in a direction perpendicular to the layer, the total cross-sectional area has a centre in the portion of the interspace through which the radiation irradiates the spot.

    摘要翻译: 为了照射层,辐射束被引导并聚焦到层上的斑点,引起层相对于光学元件的相对运动,使得相继地照射该层的不同部分,并且在该层的表面之间的间隙 保持最靠近层的光学元件。 此外,辐射照射到层上的斑点的间隙的至少一部分保持充满液体,液体经由供应管道供给,并通过总投影横截面通过面积流出流出开口 在与平面平行的平面上。 流出开口或多个流出开口定位成使得从垂直于该层的方向看,总横截面积在该空间部分中的中心,辐射辐射穿过该点。