摘要:
The invention is a method and cyclonic separator for degassing a fluid mixture comprising a carrier liquid and gaseous or vaporizable components. In this method, the fluid mixture is accelerated in a throat section of a vortex tube such that the static pressure of the fluid mixture is decreased and vaporizable components evaporate into a gaseous phase and the fluid mixture flows as a substantially homogeneously dispersed gas-liquid mixture through the throat section; the accelerated fluid mixture is induced to swirl within a tubular mid section of the vortex tube such that the fluid mixture is separated by centrifugal forces into a degassed liquid fraction and a gas enriched fraction; the degassed liquid fraction is induced to flow into an annular liquid outlet conduit; and the gas enriched fraction is induced to flow into a central gas outlet conduit.
摘要:
A process and apparatus for separating at least part of a gaseous product from a feed stream which comprises contaminants. The process comprises: 1) providing the feed stream; 2) cooling the feed stream to a temperature at which a slurry stream is formed which comprises solid contaminant, liquid phase contaminant and the gaseous product; 3) introducing the slurry stream as obtained in step 2) via a plurality of tangentially directed inlet means into an upper part of a separation device, thereby creating a swirl of the slurry stream which allows at least part of the gaseous product to flow upwardly and solid contaminant and liquid phase contaminant to flow downwardly; 4) removing at least part of the gaseous product from the upper part of the device; and 5) removing a stream comprising liquid phase contaminant from a lower part of the device.
摘要:
A transformer has a toroidal core with an opening therein and a plurality of wires to define a central winding section, a plurality of outer twisted wire sections and a plurality of wire proximity sections positioned between each outer twisted wire section and the central winding section. The central winding section includes a plurality of wires wrapped around the toroidal core and coupling a conductor of a primary side of a transformer and a conductor of a secondary side of a transformer. Each outer twisted wire section includes at least a pair of wires twisted together in a predetermined twisted pattern that are electrically connected to but spaced from the central winding section. The wire proximity section is configured to maintain physical proximity between the conductor of the primary side of the transformer and the conductor of the secondary side of the transformer.
摘要:
A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
摘要:
A non-leaching adhesive system and its use in a liquid immersion objective for immersion-writing of masters for optical discs are disclosed. The adhesive system comprises at least one monomer, selected from among the group of acrylate and methacrylate monomers, allylic monomers, norbornene monomers, hybrid monomers thereof, containing chemically different polymeriazble groups, and multifunctional thiol monomers, provided that said thiol is used in combination with at least one of said non-thiol monomers; and a polymerization initiator. At least one of said monomers, not being a thiol, is provided with at least two functional polymerizable groups to obtain a crosslinked polymer network. The polymerization initiator is preferably an initiator that can be activated both thermally and with UV radiation. The adhesive system may further contain a reactive diluent. Further the use of the present adhesive system in mounting a liquid immersion objective is disclosed.
摘要:
The invention relates to variable focus lenses based on magneto wetting and related devices, wherein two fluids, one of which is magnetically susceptible, are in contact over a meniscus. The shape of the meniscus is controlled by means of an applied magnetic field gradient. The contact angle between the chamber wall and the meniscus is a conserved. Implementation of special shaping to the internal or external walls of the chamber, while conserving the contact angle, results in better lens shape in the variable focus lens and lower levels of lens distortion.
摘要:
A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
摘要:
In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. Gas is used between the structure and the surface of the substrate to contain liquid in the space.
摘要:
For irradiating a layer (3) a radiation beam (7) is directed and focused to a spot (11) on the layer (3), relative movement of the layer (3) relative to the optical element (59) is caused so that, successively, different portions of the layer (3) are irradiated and an interspace (53) between a surface of the optical element (59) nearest to the layer (3) is maintained. Furthermore, at least a portion of the interspace (53) through which the radiation irradiates the spot (11) on the layer (3) is maintained filled with a liquid (91). By directing a gas flow (71-73) to a surface zone (74) of the layer (3), liquid (91) is reliably prevented from passing that surface zone (74), without causing damage to the layer (3). The liquid (91) is drawn away from the layer (3) in the vicinity of the surface zone (74).
摘要:
For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the optical element is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the optical element nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit and flowing out of an outflow opening through a total projected cross-sectional passage area in a plane parallel to the layer. The outflow opening or a plurality of the outflow openings are positioned such that, seen in a direction perpendicular to the layer, the total cross-sectional area has a centre in the portion of the interspace through which the radiation irradiates the spot.