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公开(公告)号：US09958769B1
公开(公告)日：2018-05-01
申请号：US15387066
申请日：2016-12-21
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Shigeki Tanemura , Yukinori Ikegawa
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Shigeki Tanemura , Yukinori Ikegawa
CPC分类号： G03F1/38 , G03F7/094 , G11B5/3169 , G11B2005/0021
摘要： A plasmon generator including a wide portion and a narrow portion is manufactured by etching an initial plasmon generator using an etching mask. The etching mask includes a first mask layer for defining the shape of one of the narrow portion and the wide portion, and a second mask layer for defining the shape of the other of the narrow portion and the wide portion. The etching mask is formed by forming a first hard mask, a second initial mask layer and a second hard mask in this order on a first initial mask layer, and etching the first and second initial mask layers by using the first and second hard masks.
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92.发明授权公开(公告)号：US09659588B2
公开(公告)日：2017-05-23
申请号：US14825020
申请日：2015-08-12
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Seiichiro Tomita , Hideo Mamiya
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Seiichiro Tomita , Hideo Mamiya
CPC分类号： G11B5/4866 , G11B5/012 , G11B5/11 , G11B5/127 , G11B5/1278 , G11B5/187 , G11B5/313 , G11B5/3133 , G11B5/314 , G11B5/3163 , G11B5/60 , G11B5/6088 , G11B2005/0021
摘要： A main pole has a front end face including a first end face portion and a second end face portion. A plasmon generator has a near-field light generating surface. A surrounding layer has a first surrounding layer end face and a second surrounding layer end face located on opposite sides of the first end face portion in the track width direction. A gap film has a first gap film end face and a second gap film end face located on opposite sides of the near-field light generating surface in the track width direction. Each of the first and second gap film end faces includes a portion located between the first and second surrounding layer end faces, but does not include any portion interposed between the first surrounding layer end face and the first end face portion or between the second surrounding layer end face and the first end face portion.
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93.发明授权公开(公告)号：US08406089B2
公开(公告)日：2013-03-26
申请号：US12585150
申请日：2009-09-04
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/105 , G11B5/6088 , G11B2005/001 , G11B2005/0021 , H01S5/0224 , H01S5/02272 , H01S5/0228 , H01S5/02292
摘要： A heat-assisted magnetic recording head includes a slider, an edge-emitting laser diode fixed to the slider, and an external mirror provided outside the slider. The slider includes a magnetic pole, a waveguide, and a near-field light generating element. The laser diode includes: an emitting end face that lies at an end in a direction parallel to the plane of an active layer and includes a laser-light emission part; and a mounting surface that lies at an end in a direction perpendicular to the plane of the active layer and faces the slider. The external mirror includes: a first reference surface that is parallel to the emitting end face and faces the emitting end face; a second reference surface that is parallel to the mounting surface and faces toward the same direction as the mounting surface does; and a reflecting surface that connects the first and second reference surfaces to each other and reflects the laser light emitted from the emission part toward the waveguide.
摘要翻译： 热辅助磁记录头包括滑块，固定到滑块的边缘发射激光二极管和设置在滑块外部的外反射镜。 滑块包括磁极，波导和近场光产生元件。 激光二极管包括：发射端面，其位于与有源层的平面平行的方向上的端部，并且包括激光发射部分; 以及安装表面，其位于垂直于有源层的平面的方向上的端部并且面向滑块。 外部反射镜包括：平行于发射端面并面对发射端面的第一参考表面; 第二参考表面，其平行于安装表面并面向与安装表面相同的方向; 以及将第一和第二参考表面彼此连接并将从发射部分发射的激光反射到波导的反射表面。
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94.发明授权公开(公告)号：US08395971B2
公开(公告)日：2013-03-12
申请号：US12458546
申请日：2009-07-15
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/4866 , G11B2005/001 , G11B2005/0021
摘要： A heat-assisted magnetic recording head includes a slider, an edge-emitting laser diode fixed to the slider, and an external mirror provided outside the slider. The slider includes a magnetic pole, a waveguide, a near-field light generating element, and a substrate. The substrate has a top surface facing toward the magnetic pole, the near-field light generating element and the waveguide. The slider has a top surface that lies above the top surface of the substrate, at an end of the slider farther from the top surface of the substrate. The laser diode includes: an active layer; an emitting end face that lies at an end in a direction parallel to the plane of the active layer and includes an emission part for emitting laser light; and a bottom surface that lies at an end in a direction perpendicular to the plane of the active layer. The laser diode is arranged so that the bottom surface faces the top surface of the slider. The external mirror reflects the laser light emitted from the emission part toward the waveguide.
摘要翻译： 热辅助磁记录头包括滑块，固定到滑块的边缘发射激光二极管和设置在滑块外部的外反射镜。 滑块包括磁极，波导，近场光产生元件和基板。 基板具有面向磁极的顶表面，近场光产生元件和波导。 滑块具有位于基板顶表面上方的顶表面，在滑块的距基板顶表面更远的一端。 激光二极管包括：有源层; 位于与有源层的平面平行的方向上的端部的发射端面，并且包括用于发射激光的发射部分; 以及位于与有源层的平面垂直的方向上的端部的底表面。 激光二极管被布置成使得底表面面向滑块的顶表面。 外部反射镜将从发射部分发射的激光朝向波导反射。
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95.发明授权公开(公告)号：US08366948B2
公开(公告)日：2013-02-05
申请号：US12714998
申请日：2010-03-01
CPC分类号： G11B5/314 , B24B37/048 , G11B5/3163 , G11B2005/0021
摘要： A near-field light generating element has an outer surface including first and second inclined surfaces and an edge part that connects the first and second inclined surfaces to each other. In a method of manufacturing the near-field light generating element, a polishing stopper layer is initially formed on a metal layer, and the polishing stopper layer and the metal layer are etched so that the metal layer is provided with the first inclined surface. Next, a coating layer is formed to cover the metal layer and the polishing stopper layer. The coating layer is made of a non-metallic inorganic material that has an etching rate lower than that of the metal layer in a second etching step to be performed later. Next, the coating layer is polished until the polishing stopper layer is exposed. Next, the second etching step is performed to etch the polishing stopper layer and the metal layer using the coating layer as the etching mask. This provides the metal layer with the second inclined surface and the edge part, and thereby makes the metal layer into the near-field light generating element.
摘要翻译： 近场光产生元件具有包括第一和第二倾斜表面的外表面和将第一和第二倾斜表面彼此连接的边缘部分。 在制造近场光产生元件的方法中，最初在金属层上形成抛光阻挡层，并且蚀刻抛光阻挡层和金属层，使得金属层设置有第一倾斜表面。 接下来，形成涂覆层以覆盖金属层和抛光阻挡层。 在稍后执行的第二蚀刻步骤中，涂层由非金属无机材料制成，其蚀刻速率低于金属层的蚀刻速率。 接下来，抛光涂层直到抛光停止层露出。 接下来，进行第二蚀刻步骤，使用涂层作为蚀刻掩模来蚀刻抛光停止层和金属层。 由此，使金属层具有第二倾斜面和边缘部，由此使金属层成为近场光产生元件。
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96.发明授权公开(公告)号：US08139447B2
公开(公告)日：2012-03-20
申请号：US12385447
申请日：2009-04-08
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/3116 , G11B5/6088 , G11B7/122 , G11B7/1387 , G11B2005/0005 , G11B2005/0021
摘要： A heat-assisted magnetic recording head includes a magnetic pole, a waveguide, a near-field light generating element, and a substrate on which they are stacked. The near-field light generating element and the waveguide are disposed farther from the top surface of the substrate than is the magnetic pole. The near-field light generating element has an outer surface including: a first end face located in the medium facing surface; a second end face farther from the medium facing surface; and a coupling portion coupling the first and second end faces to each other. The first end face includes a near-field light generating part. The waveguide has an outer surface including an opposed portion opposed to a part of the coupling portion. The head further includes a mirror that reflects light emitted from a light source disposed above the waveguide, so as to let the light travel through the waveguide toward the medium facing surface.
摘要翻译： 热辅助磁记录头包括磁极，波导，近场光产生元件和它们堆叠在其上的衬底。 近场光产生元件和波导被设置为比磁极远离衬底的顶表面。 所述近场光产生元件具有外表面，所述外表面包括：位于所述介质面对表面中的第一端面; 第二端面距离介质面向表面更远; 以及将第一和第二端面彼此连接的联接部分。 第一端面包括近场光产生部。 波导具有包括与耦合部分的一部分相对的相对部分的外表面。 头部还包括反射从布置在波导上方的光源发出的光的反射镜，以使光通过波导朝向面向介质的表面行进。
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97.发明申请Thermally assisted magnetic head, method of manufacturing the same, head gimbal assembly, and hard disk drive 有权热辅助磁头，制造方法，磁头万向节组件和硬盘驱动器公开(公告)号：US20110242703A1
公开(公告)日：2011-10-06
申请号：US12662138
申请日：2010-03-31
CPC分类号： G11B5/6005 , G02B6/122 , G11B5/3116 , G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： A thermally assisted magnetic head includes a main magnetic pole layer, a near-field light generating layer having a generating end part generating near-field light arranged within a medium-opposing surface, and an optical waveguide guiding light to the near-field light generating layer. The thermally assisted magnetic head includes a base layer which a base groove part having a width gradually getting smaller along a depth direction and extending in an intersecting direction intersecting with the medium-opposing surface is formed. The near-field light generating layer has an in-groove generating layer formed inside of the base groove part. The in-groove generating layer is formed along an inner wall surface of the base groove part and has a thin-film like structure.
摘要翻译： 一种热辅助磁头包括主磁极层，具有产生在介质相对表面内布置的近场光的产生端部分的近场光产生层和将光引导到近场光产生 层。 热辅助磁头包括基底层，基底槽部分的宽度随着深度方向逐渐变小并且在与介质相对表面相交的相交方向上延伸。 近场光产生层具有形成在基槽部内的内槽生成层。 槽内产生层沿着基部槽部的内壁面形成，具有薄膜状结构。
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98.发明申请公开(公告)号：US20110228418A1
公开(公告)日：2011-09-22
申请号：US12727666
申请日：2010-03-19
IPC分类号： G11B5/02
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A near-field light generating element has an outer surface including a bottom surface that lies at an end closer to a top surface of a substrate, a waveguide facing surface that lies at an end farther from the top surface of the substrate and faces a waveguide, a front end face located in a medium facing surface, and a side surface that connects the bottom surface, the waveguide facing surface and the front end face to each other. The front end face includes a first side that lies at an end of the bottom surface, a tip that lies at an end farther from the top surface of the substrate and forms a near-field light generating part, a second side that connects an end of the first side to the tip, and a third side that connects the other end of the first side to the tip. The waveguide facing surface includes a width changing portion that has a width in a direction parallel to the bottom surface and the front end face, the width decreasing with decreasing distance to the front end face.
摘要翻译： 近场光产生元件具有外表面，该外表面包括位于更靠近基板顶表面的一端的底表面，位于远离基板顶表面的一端的波导对面的表面 ，位于介质相对表面中的前端面以及将所述底表面，所述波导对向表面和所述前端面彼此连接的侧表面。 所述前端面包括位于所述底面的端部的第一侧，位于距离所述基板的上表面更远的一端并形成近场光产生部的端部，所述第二侧将端部 并且将第一侧的另一端连接到尖端的第三侧。 面向波导的表面包括宽度改变部分，该宽度改变部分在平行于底面和前端面的方向上具有宽度，宽度随着与前端面的距离的减小而减小。
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公开(公告)号：US07911883B2
公开(公告)日：2011-03-22
申请号：US12457984
申请日：2009-06-26
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/3116 , G11B5/3163 , G11B5/6088 , G11B7/1387 , G11B2005/0002 , G11B2005/0021
摘要： A near-field light generating element accommodated in a groove of an encasing layer has an outer surface that includes a first end face including a near-field light generating part, a second end face opposite to the first end face, and a coupling portion that couples the first and second end faces. The coupling portion includes a top surface, and first and second side surfaces that decrease in distance from each other with increasing distance from the top surface. The first end face includes a first side located at an end of the first side surface, and a second side located at an end of the second side surface. Each of the first and second sides includes an upper part and a lower part continuous with each other. An angle formed between the respective lower parts of the first and second sides is smaller than that formed between the respective upper parts of the first and second sides.
摘要翻译： 容纳在包装层的槽中的近场光产生元件具有外表面，该外表面包括包括近场光产生部分的第一端面，与第一端面相对的第二端面和耦合部分， 耦合第一和第二个端面。 联接部分包括顶表面，以及随着与顶表面的距离增加而彼此间隔距离减小的第一和第二侧表面。 第一端面包括位于第一侧表面的端部的第一侧和位于第二侧表面的端部的第二侧。 第一和第二侧中的每一个包括彼此连续的上部和下部。 在第一和第二侧的相应下部之间形成的角度小于在第一和第二侧的相应上部之间形成的角度。
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公开(公告)号：US10545287B1
公开(公告)日：2020-01-28
申请号：US16206058
申请日：2018-11-30
摘要： A manufacturing method for a waveguide includes forming a core including a first and a second layer. The first layer has a top surface including a first region opposed to a bottom surface of the second layer, and a second region not opposed to the bottom surface of the second layer. Forming the core includes a step of forming an initial first layer, an etching stopper layer on the second region of the top surface of the initial first layer, an initial second layer on the initial first layer and the etching stopper layer, and a step of etching the initial second layer until the etching stopper layer is exposed, to make the initial second layer into the second layer. A difference between the refractive index of the etching stopper layer and the core is smaller than or equal to 10% of the refractive index of the core.
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