公开(公告)号：US20100209040A1

公开(公告)日：2010-08-19

申请号：US12678534

申请日：2008-09-19

Applicant: Kenji Kawano ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Satoshi Matsumoto

Inventor： Kenji Kawano ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Satoshi Matsumoto

IPC: G02F1/035 ,  G02B6/12

CPC classification number: G02F1/2255 ,  G02F2201/07 ,  G02F2201/12 ,  G02F2203/21

Abstract: In an optical modulator comprising substrate 1 having electro-optical effect, two optical waveguides 3a, 3b formed in the substrate, buffer layer 2 formed on the substrate, traveling-wave electrode 4 having center conductor 4a and ground conductors 4b, 4c above the buffer layer, and ridge sections formed with recessed sections 9a to 9c by carving at least a part of the substrate where an electrical field strength of high-frequency electrical signal propagating the traveling-wave electrode is strong, in which the ridge sections include center conductor ridge section 8a having the center conductor formed above and ground conductor ridge section 8b having the ground conductor formed above, and the center conductor ridge section has one of the two optical waveguides formed therein, the recessed sections are practically symmetrical to the center line between the two optical waveguides and the traveling-wave electrode is practically symmetrical to the center line of the center conductor.

Abstract translation: 在具有电光效应的基板1的光调制器中，形成在基板上的两个光波导3a，3b，形成在基板上的缓冲层2，具有中心导体4a的行波电极4和缓冲器上方的接地导体4b，4c 通过雕刻传播行波电极的高频电信号的电场强度强的基板的至少一部分而形成有凹部9a〜9c的层，脊部，其中脊部包括中心导体脊 具有上面形成的中心导体的部分8a和具有形成在上面的接地导体的接地导体脊部分8b，并且中心导体脊部分在其中形成的两个光波导中的一个形成，凹部实际上对称于两者之间的中心线 光波导和行波电极实际上与中心导体的中心线对称。

公开(公告)号：US07664344B2

公开(公告)日：2010-02-16

申请号：US11521124

申请日：2006-09-14

Applicant: Masahiro Sato

Inventor： Masahiro Sato

IPC: G02F1/035

CPC classification number: G02F1/035 ,  G02F1/225 ,  G02F2001/212 ,  G02F2201/07 ,  G02F2203/21

Abstract: An electro-optic modulator includes a substrate made of a material which has an electro-optic effect and a pyroelectric effect. In the substrate, an optical waveguide is formed to have at least a pair of optical paths. On the substrate and on the optical waveguide, a transparent buffer layer is formed to cover the optical waveguide. On the buffer layer, first and second electrodes are formed so that the first and the second electrodes are arranged to cause refractive index changes in the pair of optical paths in response to electrical fields surrounding the electro-optic modulator. The buffer layer is a mutual diffusion layer. The mutual diffusion layer is made from laminated films having at least one transparent insulator film and at least one transparent conductor film but has no clear boundary between the transparent insulator film and the transparent conductor film.

Abstract translation: 电光调制器包括由具有电光效应和热电效应的材料制成的基板。 在基板中，光波导形成为具有至少一对光路。 在基板和光波导上，形成透明缓冲层以覆盖光波导。 在缓冲层上，第一和第二电极被形成为使得第一和第二电极被布置成响应于围绕电光调制器的电场而导致该对光路中的折射率变化。 缓冲层是相互扩散层。 互扩散层由具有至少一个透明绝缘膜和至少一个透明导体膜的层压膜制成，但在透明绝缘膜和透明导体膜之间没有明确的边界。

公开(公告)号：US07280712B2

公开(公告)日：2007-10-09

申请号：US11197601

申请日：2005-08-04

Applicant: Ansheng Liu

Inventor： Ansheng Liu

IPC: G02F1/035

CPC classification number: G02F1/025 ,  G02F2201/07

Abstract: An apparatus and method for high speed phase modulation of optical beam. For one embodiment, an apparatus includes an optical waveguide having adjoining first and second regions disposed in semiconductor material. The first and second regions have opposite doping types. A first buffer is disposed along the optical waveguide. A first higher doped region of semiconductor material is also included outside an optical path of the optical waveguide. An inner portion of the first higher doped region is adjoining and coupled to the first region of the optical waveguide. An outer portion of the first higher doped region is adjoining the first buffer. The first higher doped region has a higher doping concentration than a doping concentration within the optical path of the optical waveguide. A first contact having an inner portion adjoining and coupled to the first higher doped region is also included. The first contact has an outer portion adjoining the first buffer.

Abstract translation: 一种用于光束高速相位调制的装置和方法。 对于一个实施例，一种装置包括具有设置在半导体材料中的邻接的第一和第二区域的光波导。 第一和第二区域具有相反的掺杂类型。 沿着光波导布置第一缓冲器。 半导体材料的第一高掺杂区域也包括在光波导的光路外。 第一较高掺杂区域的内部部分邻接并耦合到光波导的第一区域。 第一较高掺杂区域的外部部分与第一缓冲器相邻。 第一高掺杂区具有比光波导的光路内的掺杂浓度更高的掺杂浓度。 还包括具有邻接并耦合到第一较高掺杂区域的内部部分的第一触点。 第一触点具有邻接第一缓冲器的外部部分。

公开(公告)号：US20070154161A1

公开(公告)日：2007-07-05

申请号：US11685629

申请日：2007-03-13

Applicant: Louis Bintz ,  Raluca Dinu ,  Danliang Jin

Inventor： Louis Bintz ,  Raluca Dinu ,  Danliang Jin

IPC: G02B6/00

CPC classification number: G02F1/3558 ,  G02B6/132 ,  G02B6/138 ,  G02B2006/121 ,  G02F1/065 ,  G02F1/365 ,  G02F2201/07 ,  G02F2202/07 ,  G02F2202/38

Abstract: A method including poling an optical waveguide device including an optical waveguide core, an electrode, and an organically modified sol-gel layer.

Abstract translation: 一种包括极化包括光波导芯，电极和有机改性溶胶 - 凝胶层的光波导器件的方法。

公开(公告)号：US20070031080A1

公开(公告)日：2007-02-08

申请号：US11197601

申请日：2005-08-04

Applicant: Ansheng Liu

Inventor： Ansheng Liu

IPC: G02F1/035

CPC classification number: G02F1/025 ,  G02F2201/07

Abstract: An apparatus and method for high speed phase modulation of optical beam. For one embodiment, an apparatus includes an optical waveguide having adjoining first and second regions disposed in semiconductor material. The first and second regions have opposite doping types. A first buffer is disposed along the optical waveguide. A first higher doped region of semiconductor material is also included outside an optical path of the optical waveguide. An inner portion of the first higher doped region is adjoining and coupled to the first region of the optical waveguide. An outer portion of the first higher doped region is adjoining the first buffer. The first higher doped region has a higher doping concentration than a doping concentration within the optical path of the optical waveguide. A first contact having an inner portion adjoining and coupled to the first higher doped region is also included. The first contact has an outer portion adjoining the first buffer.

Abstract translation: 一种用于光束高速相位调制的装置和方法。 对于一个实施例，一种装置包括具有设置在半导体材料中的邻接的第一和第二区域的光波导。 第一和第二区域具有相反的掺杂类型。 沿着光波导布置第一缓冲器。 半导体材料的第一高掺杂区域也包括在光波导的光路外。 第一较高掺杂区域的内部部分邻接并耦合到光波导的第一区域。 第一较高掺杂区域的外部部分与第一缓冲器相邻。 第一高掺杂区具有比光波导的光路内的掺杂浓度更高的掺杂浓度。 还包括具有邻接并耦合到第一较高掺杂区域的内部部分的第一触点。 第一触点具有邻接第一缓冲器的外部部分。

公开(公告)号：US07133580B2

公开(公告)日：2006-11-07

申请号：US10699696

申请日：2003-11-04

Applicant: Akio Maeda ,  Takashi Shiotani

Inventor： Akio Maeda ,  Takashi Shiotani

IPC: G02F1/295 ,  G02B6/12 ,  G02B6/26

CPC classification number: G02F1/035 ,  G02B2006/12097 ,  G02B2006/1218 ,  G02F1/05 ,  G02F2201/07 ,  G02F2201/50

Abstract: A manufacturing method for an optical waveguide device. The manufacturing method includes the steps of forming an optical waveguide in a substrate having an electro-optic effect, forming an SiO2 film on the substrate, forming Si films on the SiO2 film, the lower surface of the substrate, and at least a part of the side surface of the substrate to thereby make a conduction between the Si film formed on the SiO2 film and the Si film formed on the lower surface of the substrate. The manufacturing method further includes the steps of applying a photoresist to the Si film formed on the SiO2 film, patterning the photoresist so that a portion of the photoresist corresponding to the optical waveguide is left, forming a groove on the substrate along the optical waveguide by reactive ion etching, and removing the photoresist and the Si films.

Abstract translation: 一种光波导装置的制造方法。 该制造方法包括以下步骤：在具有电光效应的衬底中形成光波导，在衬底上形成SiO 2膜，在SiO 2上形成Si膜 >膜，衬底的下表面和衬底的侧表面的至少一部分，从而使形成在SiO 2膜上的Si膜与形成在SiO 2膜上的Si膜之间的导电 衬底的下表面。 制造方法还包括以下步骤：向形成在SiO 2膜上的Si膜施加光致抗蚀剂，对光致抗蚀剂进行构图，使得与光波导对应的部分光致抗蚀剂留下，形成凹槽 通过反应离子蚀刻沿着光波导在基板上，以及去除光致抗蚀剂和Si膜。

公开(公告)号：US20060233494A1

公开(公告)日：2006-10-19

申请号：US11131634

申请日：2005-05-18

Applicant: Hirotoshi Nagata

Inventor： Hirotoshi Nagata

IPC: G02B6/26

CPC classification number: G02F1/225 ,  G02F2201/07 ,  G02F2203/21

Abstract: The present invention discloses an electro-optic waveguide device such as a modulator. The device has an electro-optic substrate having optical waveguides within the substrate at or near an upper surface. A buffer layer is formed on the top surface of the electro-optic substrate. A novel block layer is formed on the buffer layer surface, which can suppress or lessen an unwanted occurrence of chemical reactions at or near the surface of the buffer layer. A charge bleed off layer is formed on the block layer, which has a certain amount of electrical conductivity to bleed off any electrical charges generated on or in the electro-optic waveguide device. Electrodes are on the charge bleed off layer, which can provide electrical signals to the optical waveguides through the buffer layer, the block layer, and the charge bleed off layer.

Abstract translation: 本发明公开了一种诸如调制器的电光波导器件。 该器件具有在上表面处或附近的衬底内具有光波导的电光衬底。 在电光基板的顶表面上形成缓冲层。 在缓冲层表面上形成新的阻挡层，可以抑制或减少缓冲层表面处或附近不希望有的化学反应的发生。 在阻挡层上形成电荷泄漏层，该阻挡层具有一定量的电导率以渗出在电光波导器件上或其中产生的任何电荷。 电极位于电荷泄漏层上，其可以通过缓冲层，阻挡层和电荷泄漏层向光波导提供电信号。

公开(公告)号：US07123784B2

公开(公告)日：2006-10-17

申请号：US10827926

申请日：2004-04-19

Applicant: Masahiro Sato

Inventor： Masahiro Sato

IPC: G02F1/035

CPC classification number: G02F1/035 ,  G02F1/225 ,  G02F2001/212 ,  G02F2201/07 ,  G02F2203/21

Abstract: An electro-optic modulator (300) comprises a substrate (310) made of a material which has an electro-optic effect and a pyroelectric effect. In the substrate (310), an optical waveguide (320) is formed to have at least a pair of optical paths. On the substrate (310) and on the optical waveguide (320), a transparent buffer layer (330) is formed to cover the optical waveguide (320). On the buffer layer (330), first and second electrodes (341, 342) are formed so that the first and the second electrodes (341, 342) are arranged to cause refractive index changes in the pair of optical paths in response to electrical fields surrounding the electro-optic modulator (300). The buffer layer (330) is a mutual diffusion layer. The mutual diffusion layer is made from laminated films comprised of at least one transparent insulator film and at least one transparent conductor film but has no clear boundary between the transparent insulator film and the transparent conductor film.

Abstract translation: 电光调制器（300）包括由具有电光效应和热电效应的材料制成的衬底（310）。 在基板（310）中，光波导（320）形成为具有至少一对光路。 在基板（310）和光波导（320）上形成透明缓冲层（330）以覆盖光波导（320）。 在缓冲层（330）上，形成第一和第二电极（341,342），使得第一和第二电极（341,342）被布置成响应于电场而引起该对光路中的折射率变化 围绕电光调制器（300）。 缓冲层（330）是相互扩散层。 互扩散层由至少一个透明绝缘膜和至少一个透明导体膜构成的层叠膜制成，但在透明绝缘膜和透明导体膜之间没有明确的边界。

公开(公告)号：US07099524B2

公开(公告)日：2006-08-29

申请号：US10990383

申请日：2004-11-18

Applicant: Masaki Sugiyama

Inventor： Masaki Sugiyama

IPC: G02F1/035

CPC classification number: G02F1/2255 ,  G02F2201/07 ,  G02F2201/12

Abstract: The present invention relates to an optical modulator capable of preventing a disconnection of an electrode and improving a discontinuity of a characteristic impedance while realizing a polarization inverting area and a ridge waveguide in a single optical modulator. In the optical modulator, a first electrode is composed of an inverting area electrode portion formed on an upper portion of one of first and second waveguides in the polarization inverting area, a non-inverting area electrode portion formed on an upper portion of the other one of the first and second waveguides in the other area, and a connection portion for making a connection between the inverting area electrode portion and the non-inverting area electrode portion at the boundary between the polarization inverting area and the other area. A supporting mechanism for supporting the connection portion of the first electrode is provided in a groove.

Abstract translation: 本发明涉及一种在单个光调制器中实现极化反转区域和脊波导的同时能够防止电极断开并改善特性阻抗的不连续性的光调制器。 在光调制器中，第一电极由形成在偏振反转区域中的第一和第二波导中的一个的上部上的反转区域电极部分组成，另一个上部形成的非反相区域电极部分 的另一区域中的第一和第二波导的连接部分，以及用于在极化反转区域和另一区域之间的边界处在反相区域电极部分和非反相区域电极部分之间形成连接的连接部分。 用于支撑第一电极的连接部分的支撑机构设置在凹槽中。

公开(公告)号：US20040228565A1

公开(公告)日：2004-11-18

申请号：US10827926

申请日：2004-04-19

Applicant: NEC TOKIN corporation

Inventor： Masahiro Sato

IPC: G02F001/035

CPC classification number: G02F1/035 ,  G02F1/225 ,  G02F2001/212 ,  G02F2201/07 ,  G02F2203/21

Abstract: An electro-optic modulator (300) comprises a substrate (310) made of a material which has an electro-optic effect and a pyroelectric effect. In the substrate (310), an optical waveguide (320) is formed to have at least a pair of optical paths. On the substrate (310) and on the optical waveguide (320), a transparent buffer layer (330) is formed to cover the optical waveguide (320). On the buffer layer (330), first and second electrodes (341, 342) are formed so that the first and the second electrodes (341, 342) are arranged to cause refractive index changes in the pair of optical paths in response to electrical fields surrounding the electro-optic modulator (300). The buffer layer (330) is a mutual diffusion layer. The mutual diffusion layer is made from laminated films comprised of at least one transparent insulator film and at least one transparent conductor film but has no clear boundary between the transparent insulator film and the transparent conductor film.

Abstract translation: 电光调制器（300）包括由具有电光效应和热电效应的材料制成的衬底（310）。 在基板（310）中，光波导（320）形成为具有至少一对光路。 在基板（310）和光波导（320）上形成透明缓冲层（330）以覆盖光波导（320）。 在缓冲层（330）上，形成第一和第二电极（341,342），使得第一和第二电极（341,342）被布置成响应于电场而引起该对光路中的折射率变化 围绕电光调制器（300）。 缓冲层（330）是相互扩散层。 互扩散层由至少一个透明绝缘膜和至少一个透明导体膜构成的层叠膜制成，但在透明绝缘膜和透明导体膜之间没有明确的边界。