公开(公告)号：US5670217A

公开(公告)日：1997-09-23

申请号：US762320

申请日：1996-12-09

Applicant: Julian G. Blake ,  Robert Becker ,  David Chipman ,  Mary Jones ,  Lyudmila Menn ,  Frank Sinclair ,  Dale K. Stone

Inventor： Julian G. Blake ,  Robert Becker ,  David Chipman ,  Mary Jones ,  Lyudmila Menn ,  Frank Sinclair ,  Dale K. Stone

IPC: C23C14/48 ,  H01J37/16 ,  H01J37/18 ,  H01J37/30 ,  H01J37/317 ,  H01L21/265 ,  B05D5/12

CPC classification number: H01J37/3002 ,  H01J37/3171 ,  H01J2237/022

Abstract: A method of capturing and removing contaminant particles moving within an evacuated interior region of an ion beam implanter is disclosed. The steps of the method include: providing a particle collector having a surface to which contaminant particles readily adhere; securing the particle collector to the implanter such that particle adhering surface is in fluid communication to the contaminant particles moving within the interior region; and removing the particle collector from the implanter after a predetermined period of time. An ion implanter in combination with a particle collector for trapping and removing contaminant particles moving in an evacuated interior region of the implanter traversed by an ion beam is also disclosed, the particle collector including a surface to which the contaminant particles readily adhere and securement means for releasably securing the particle collector to the implanter such that the particle adhering surface is in fluid communication with the evacuated interior region of the implanter.

Abstract translation: 公开了一种捕获和去除在离子束注入机的抽空的内部区域内移动的污染物颗粒的方法。 该方法的步骤包括：提供具有污染物颗粒容易粘附的表面的颗粒收集器; 将颗粒收集器固定到注入机，使得颗粒粘附表面与在内部区域内移动的污染物颗粒流体连通; 并且在预定时间段之后从所述注入机移除所述颗粒收集器。 还公开了一种与用于捕获和去除在离子束穿过的注入器的抽空的内部区域中移动的污染物颗粒的离子注入机，该颗粒收集器包括污染物颗粒易于粘附的表面和用于 将颗粒收集器可释放地固定到注入机，使得颗粒粘附表面与注入机的抽空的内部区域流体连通。