公开(公告)号：US06512364B1

公开(公告)日：2003-01-28

申请号：US09716773

申请日：2000-11-20

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: G01P1512

CPC classification number: G01P15/125 ,  G01L1/148 ,  G01L1/18 ,  G01L5/162 ,  G01L25/00 ,  G01P15/123 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/084 ,  Y10T29/49103

Abstract: A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This. circuit uses analog multipliers (101-109) and analog adders/subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350′).

Abstract translation: 传感器包括半导体颗粒（10），其包括适于承受力的作用部分（11），固定在传感器主体上的固定部分（13）和在其之间形成柔性的柔性部分（13），工作 用于向工作部分传递消除的力的主体（20）和用于将半导体芯片中产生的机械变形变换为电信号的检测器装置（60-63），从而检测施加在工作体上的力作为电信号 。 信号处理电路被应用于传感器。 这个。 电路使用模拟乘法器（101-109）和模拟加法器/减法器（111-113），并具有消除在不同方向产生的干扰的功能。 在传感器内，确定位于彼此相对的位置并通过力的作用产生位移之间的两个部分（E3，E4-E8）。 通过在两个部分之间施加库仑力，进行传感器的测试。 此外，在工作体（20）的周围设置基座（21,22）。 工作体和基座以其间具有预定的间隙或间隔而定位。 导致工作体的位移被限制地落在对应于间隔的预定范围内。 通过切割相同的公共衬底（350,350'）来提供工作体和基座。

公开(公告)号：US06367326B1

公开(公告)日：2002-04-09

申请号：US09547799

申请日：2000-04-12

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: G01P904

CPC classification number: G01C19/5712 ,  G01P3/16

Abstract: A pivotal shaft (130) is provided along the Z-axis on a semiconductor substrate (100), whose upper surface extends along the XY-plane, to fit a rotor (200) consisting of dielectric material. The rotor is supported by the pivotal shaft so that it can be inclined and can be rotated. The peripheral portion of the rotor constitutes weight bodies (211, 212), and stators (111, 115) consisting of conductive material are disposed at the periphery thereof. When a.c. voltages of predetermined period are delivered to the stators, the rotor is rotated while floating in accordance with the principle of the induction motor. When angular velocity &ohgr;x about the X-axis is applied to the substrate 100, Corioli's force Fcz in the Z-axis positive direction is applied to the weight body (211) passing through the X-axis with velocity component in the Y-axis positive direction so that it becomes away from-the substrate. Corioli's force −Fcz in the Z-axis negative direction is applied to the weight body (212) passing through the X-axis with velocity component in the Y-axis negative direction so that it becomes close the substrate. Capacitance elements C1, C2 are formed by fixed electrodes (141AB, 142AB) on the substrate and movement electrodes (231, 232) on the rotor. Difference between electrostatic capacitance values of both the capacitance elements is obtained to detect magnitude of applied Corioli's force. The magnitude of the detected Corioli's force is outputted as a value of angular velocity &ohgr;x about the X-axis. Even under the environment where acceleration is applied, the acceleration component is canceled by obtaining difference.

Abstract translation: 沿着Z轴设置在Z轴上的枢转轴（130），半导体基板（100）的上表面沿XY平面延伸，以配合由电介质材料构成的转子（200）。 转子由枢转轴支撑，使其可以倾斜并且可以旋转。 转子的周边部分构成重物体（211,212），由导电材料构成的定子（111,115）设置在其周边。 当a.c. 预定时间段的电压被传送到定子，转子根据感应电机的原理浮动而旋转。 当将关于X轴的角速度ω加到衬底100上时，沿Z轴正方向的Corioli力Fcz被施加到通过X轴的重量体（211）上，Y轴的速度分量为正 方向使其远离基底。 将通过X轴的重量体（212）沿Y轴负方向施加到Z轴负方向的科里奥利力-Fcz，使其靠近基板。 电容元件C1，C2由基板上的固定电极（141AB，142AB）和转子上的移动电极（231,232）形成。 获得两个电容元件的静电电容值之间的差异来检测施加的科里奥利力的大小。 检测到的科里奥利力的大小作为围绕X轴的角速度ωgax的值输出。 即使在施加加速度的环境下，通过获得差异来抵消加速度分量。

公开(公告)号：US06269697B1

公开(公告)日：2001-08-07

申请号：US09504368

申请日：2000-02-15

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: G01P900

CPC classification number: G01C19/56 ,  G01P15/0922 ,  G01P15/18 ,  G01P2015/084

Abstract: Upper electrodes (A1 to A5) are disposed on an upper surface of a disk-shaped piezoelectric element (10). On a lower surface of the piezoelectric element (10), an annular groove to surround origin O is formed at position corresponding to the upper electrodes (A1 to A5). At the portion where the annular groove is formed, the piezoelectric element (10) includes a flexible portion formed so as to have thin thickness. When the peripheral portion of the piezoelectric element (10) is fixed to the casing, the central portion positioned within the annular groove functions as a weight caused to hang down from the flexible portion. On the lower surface of the piezoelectric element (10), a lower electrode (B) is formed. When force is applied to the weight by acceleration, the flexible portion is bent. As a result, predetermined charges are produced in the upper electrodes (A1 to A5) with the lower electrode (B) being as a reference potential. Accordingly, applied acceleration can be detected. When a predetermined a.c. signal is delivered between the lower electrode (B) and the upper electrodes (A1 to A5), the weight is oscillated in a predetermined direction. Accordingly, angular velocity can be detected on the basis of Coriolis force applied to the weight. Thus, simple sensor capable of detecting both acceleration and angular velocity in three. dimensional directions can be realized.

Abstract translation: 上部电极（A1〜A5）设置在盘状压电元件（10）的上表面。 在压电元件（10）的下表面上，形成在与上部电极（A1〜A5）对应的位置处包围原点O的环状的槽。 在形成环形槽的部分，压电元件（10）包括形成为具有薄的厚度的柔性部分。 当压电元件（10）的外围部分固定在壳体上时，位于环形凹槽内的中心部分起到从柔性部分垂下的重量的作用。 在压电元件（10）的下表面上形成下电极（B）。 当通过加速度对重物施加力时，柔性部分弯曲。 结果，以下部电极（B）为基准电位，在上部电极（A1〜A5）中产生规定的电荷。 因此，可以检测施加的加速度。 当预定的a.c. 信号在下电极（B）和上电极（A1〜A5）之间传递，重量在预定方向上振荡。 因此，可以基于施加到重物的科里奥利力来检测角速度。 因此，能够检测三个加速度和角速度的简单传感器。 可以实现尺寸方向。

公开(公告)号：US06185814B1

公开(公告)日：2001-02-13

申请号：US09019978

申请日：1998-02-06

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: H01C1728

CPC classification number: G01P15/125 ,  G01L1/148 ,  G01L1/18 ,  G01L5/162 ,  G01L25/00 ,  G01P15/123 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/084 ,  Y10T29/49103

Abstract: A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders/subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350′)

Abstract translation: 传感器包括半导体颗粒（10），其包括适于承受力的作用部分（11），固定在传感器主体上的固定部分（13）和在其之间形成柔性的柔性部分（13），工作 用于向工作部分传递消除的力的主体（20）和用于将半导体芯片中产生的机械变形变换为电信号的检测器装置（60-63），从而检测施加在工作体上的力作为电信号 。 信号处理电路被应用于传感器。 该电路使用模拟乘法器（101-109）和模拟加法器/减法器（111-113），并具有消除在不同方向产生的干扰的功能。 在传感器内，确定位于彼此相对的位置并通过力的作用产生位移之间的两个部分（E3，E4-E8）。 通过在两个部分之间施加库仑力，进行传感器的测试。 此外，在工作体（20）的周围设置基座（21,22）。 工作体和基座以其间具有预定的间隙或间隔而定位。 导致工作体的位移被限制地落在对应于间隔的预定范围内。 通过切割相同的公共衬底（350,350'）来提供工作体和基座，

公开(公告)号：US6159761A

公开(公告)日：2000-12-12

申请号：US54573

申请日：1998-04-03

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: B81C1/00 ,  G01P15/08 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  H01L29/84 ,  H01L21/00 ,  G01P15/09

CPC classification number: G01P15/0802 ,  G01P15/123 ,  G01P15/125 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A first substrate of the three layer structure composed of a lower layer portion consisting of silicon, a middle layer portion consisting of SiO.sub.2 and an upper layer portion consisting of silicon is prepared. Impurity is doped into the lower layer portion so that it has conductivity. The lower surface of the lower layer portion is etched to form a diaphragm portion and a pedestal portion, and then a second substrate consisting of glass is joined to the portion therebelow. By the electrodes on the second substrate and the diaphragm portion, capacitance elements are formed. Grooves are dug by a dicing blade from the upper surface of the upper layer portion thereafter to downwardly dig the bottom portions of the grooves by etching until the upper surface of the lower layer portion is exposed. When the respective unit areas are cut off, there is obtained a structure in which a weight body is positioned at the central portion of the diaphragm portion and a pedestal is formed at the periphery thereof. Piezo resistance elements may be used in place of the capacitance elements.

Abstract translation: 制备三层结构的第一衬底，其由由硅组成的下层部分，由SiO 2组成的中间层部分和由硅组成的上层部分组成。 杂质被掺杂到下层部分中，使得其具有导电性。 蚀刻下层部分的下表面以形成隔膜部分和基座部分，然后将由玻璃组成的第二基底接合到其下部分。 通过第二基板上的电极和隔膜部分，形成电容元件。 通过切割刀从上层部分的上表面挖出槽，然后通过蚀刻向下挖掘槽的底部，直到下层部分的上表面露出。 当各个单元区域被切断时，获得了其中配重体位于隔膜部分的中心部分并且在其周边处形成基座的结构。 可以使用压电元件代替电容元件。

公开(公告)号：US6003371A

公开(公告)日：1999-12-21

申请号：US822538

申请日：1997-03-19

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: G01C19/56 ,  G01P3/44 ,  G01P15/18 ,  G01P9/00

CPC classification number: G01P3/44 ,  G01C19/56 ,  G01P15/18 ,  G01P2015/084

Abstract: An angular velocity sensor for detecting angular velocity components about three axes with high response is provided. A weight body carries out a circular movement along a circular orbit within the XY-plane with the origin being as a center. The weight body is supported so that it can be moved with a predetermined degree of freedom within a sensor casing. A Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the X-axis at the point Px and an angular velocity .omega.x about the X-axis is obtained based on the detected force. Further, a Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the Y-axis at the point Py and an angular velocity .omega.y about the Y-axis is obtained based on the detected force. In addition, a force exerted in the X-axis direction to the weight body at the point Px is detected and an angular velocity .omega.z about the Z-axis is obtained based on the detected force by eliminating a centrifugal force.

Abstract translation: 提供了用于检测具有高响应的三个轴的角速度分量的角速度传感器。 重量体以原点为中心的XY平面内的圆形轨道进行圆周运动。 重量体被支撑，使得其可以在传感器壳体内以预定的自由度移动。 当重量体在点Px处通过X轴并且基于检测到的力获得围绕X轴的角速度ωx时，检测到在Z轴方向上施加在重量体上的科里奥利力Fco。 此外，当重量体在点Py处通过Y轴并且基于检测到的Y轴获得围绕Y轴的角速度ωy时，检测到在Z轴方向上向重量体施加的科里奥利力Fco 力。 此外，检测在点Px处向X轴方向施加到配重体的力，并且通过消除离心力，基于检测到的力获得围绕Z轴的角速度ωz。

公开(公告)号：US5962787A

公开(公告)日：1999-10-05

申请号：US733471

申请日：1996-10-18

Applicant: Kazuhiro Okada ,  Jundo Nakatugawa

Inventor： Kazuhiro Okada ,  Jundo Nakatugawa

IPC: G01H1/00 ,  G01H11/06 ,  G01P15/125 ,  G01P15/18 ,  G01P3/42

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/084

Abstract: A fixed substrate and a displacement substrate are disposed in parallel. The fixed substrate is secured to the inside of a cylindrical casing, and the displacement substrate is elastically supported at the periphery thereof by supporting means. A columnar weight body is secured to the lower surface of the displacement substrate, and a cylindrical inside electrode is formed on the periphery of the weight body. A cylindrical outside electrode is fixed by fixing means at the periphery of the inside electrode. A first capacitance element is constituted by a displacement electrode formed on the upper surface of the displacement substrate and a fixed electrode formed on the lower surface of the fixed substrate. By a change in the capacitance thereof, an acceleration based on longitudinal vibration is detected. In addition, a second capacitance element is constituted by the inside electrode and the outside electrode. By a change in the capacitance thereof, an acceleration based on transverse vibration is detected.

Abstract translation: 固定基板和位移基板平行设置。 固定基板固定在圆筒形壳体的内部，位移基板通过支撑装置在其周围弹性地支撑。 柱状体重体固定在位移基板的下表面上，圆筒状的内部电极形成在配重体的周围。 圆筒形的外部电极通过固定装置固定在内部电极的周边。 第一电容元件由形成在位移衬底的上表面上的位移电极和形成在固定衬底的下表面上的固定电极构成。 通过其电容的变化，检测基于纵向振动的加速度。 此外，第二电容元件由内部电极和外部电极构成。 通过其电容的变化，检测基于横向振动的加速度。

公开(公告)号：US5856620A

公开(公告)日：1999-01-05

申请号：US776172

申请日：1997-01-22

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: B81B3/00 ,  G01H11/06 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/084

Abstract: A magnitude of an acceleration along a direction included within a predetermined plane is detected as an electric signal. A fixed substrate (10) and a displacement substrate (20) are disposed in parallel. The fixed substrate (10) is secured within a cylindrical casing, and the displacement substrate (20) is elastically supported at the periphery thereof within the cylindrical casing by supporting means (30). An annular displacement electrode (E21) and a central displacement electrode (E22) are provided on the upper surface of the displacement substrate (20), and a weight body (40) is secured on the lower surface of the displacement substrate (20). An annular fixed electrode and is a central fixed electrode opposite to the annular displacement electrode (E21) and the central displacement electrode (E22) are provided on the lower surface of the fixed substrate (10), and an annular capacitance element (C1) and a central capacitance element (C2) are constituted. By vibration of the earthquake, etc., the weight body (40) is oscillated. As a result, the displacement substrate (20) is caused to undergo an displacement with respect to the fixed substrate (10). Based on a change of the electrostatic capacitance value of the annular capacitance element (C1), a magnitude of the transverse vibration can be detected. Based on a change of the electrostatic capacitance value of the central capacitance element (C2), a magnitude of longitudinal vibration can be detected.

Abstract translation: PCT No.PCT / JP96 / 01439 Sec。 371日期1997年1月22日 102（e）日期1997年1月22日PCT提交1996年5月29日PCT公布。 出版物WO96 / 38732 PCT 日期1996年12月5日沿着包含在预定平面内的方向的加速度的大小被检测为电信号。 固定基板（10）和位移基板（20）平行设置。 固定基板（10）固定在筒状壳体内，位移基板（20）通过支撑机构（30）在圆筒状壳体的周围弹性支撑。 在位移衬底（20）的上表面上设置环形位移电极（E21）和中心位移电极（E22），并且在位移衬底（20）的下表面上固定配重体（40）。 在固定基板（10）的下表面上设置环状固定电极，与环状位移电极（E21）和中心位移电极（E22）相对的中心固定电极，环状电容元件（C1）和 构成中心电容元件（C2）。 由于地震等振动，重物体（40）振动。 结果，位移基板（20）相对于固定基板（10）发生位移。 基于环形电容元件（C1）的静电电容值的变化，可以检测横向振动的大小。 基于中心电容元件（C2）的静电电容值的变化，可以检测纵向振动的大小。

公开(公告)号：US5811693A

公开(公告)日：1998-09-22

申请号：US819357

申请日：1997-03-18

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: B81B3/00 ,  G01L1/14 ,  G01L5/16 ,  G01P15/08 ,  G01P15/09 ,  G01P15/105 ,  G01P15/125 ,  G01P15/18 ,  G01F1/34 ,  G01F15/07

CPC classification number: G01P15/18 ,  G01L1/144 ,  G01L5/165 ,  G01L5/167 ,  G01P15/0802 ,  G01P15/0922 ,  G01P15/105 ,  G01P15/125 ,  G01P2015/084 ,  Y10S73/04 ,  Y10T29/43 ,  Y10T29/49005 ,  Y10T29/49007

Abstract: An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

公开(公告)号：US5531002A

公开(公告)日：1996-07-02

申请号：US394310

申请日：1995-02-24

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: B81B3/00 ,  G01L1/14 ,  G01L5/16 ,  G01P15/08 ,  G01P15/09 ,  G01P15/105 ,  G01P15/125 ,  G01P15/18 ,  H01G7/00 ,  G01L1/18 ,  G01L9/12

CPC classification number: G01P15/18 ,  G01L1/144 ,  G01L5/165 ,  G01L5/167 ,  G01P15/0802 ,  G01P15/0922 ,  G01P15/105 ,  G01P15/125 ,  G01P2015/084 ,  Y10S73/04 ,  Y10T29/43 ,  Y10T29/49005 ,  Y10T29/49007

Abstract: An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

Abstract translation: 在第一基板的上表面上形成电极层，进行部分除去基板的处理，以使基板具有挠性。 连接到第一基板的下表面，连接第二基板。 然后，通过切割第二基板，形成工作体和基座。 另一方面，在第三基板上形成槽。 在槽的底面上形成电极层。 第三基板连接到第一基板，使得两个电极以彼此之间的预定间隔彼此面对。 最后，第一，第二和第三基板分别切断各个单元区域以分别形成独立的传感器。 当对工作体施加加速度时，第一基板弯曲。 结果，两个电极之间的距离变化。 因此，通过两个电极之间的静电电容的变化来检测施加的加速度。