公开(公告)号：US20130025363A1

公开(公告)日：2013-01-31

申请号：US13638259

申请日：2011-04-01

申请人： Ryo Sato ,  Keiji Hanzawa

发明人： Ryo Sato ,  Keiji Hanzawa

IPC分类号： G01F1/69

CPC分类号： G01F1/692 ,  G01F1/696 ,  G01F25/0007

摘要： To reduce a signal variation of a bridge circuit connected with a temperature sensing resistor that is caused by a strain even when the strain is generated at a diaphragm portion of a substrate installed with a heater resistor and the temperature sensing resistor. In a thermal type flow rate resistor including a substrate, a diaphragm 13 formed at the substrate, and a heat generating resistor 2 and temperature detecting resistors 7 through 10 formed on the diaphragm for detecting a flow rate of a measured fluid by heating the heat generating resistor, strain detecting resistors 11 and 12 are formed on an upstream side and on a downstream side of a flow of the measured fluid relative to the heat generating resistor on the diaphragm, an amount of a strain generated on the diaphragm is detected by the strain detecting resistors, and a flow rate signal detected by the heat generating resistor and the temperature detecting resistors is compensated for the strain based on the detected amount of the strain.

摘要翻译： 即使当在安装有加热电阻器的基板的隔膜部分和温度感测电阻器上产生应变时，也可以减小由应变引起的与感温电阻器相连的桥接电路的信号变化。 在包括基板的热式流量电阻器，形成在基板上的隔膜13和形成在隔膜上的发热电阻器2和温度检测电阻器7至10，用于通过加热产生的热量来检测被测流体的流量 电阻器，应变检测电阻器11和12形成在测量流体相对于隔膜上的发热电阻器的流动的上游侧和下游侧，通过应变检测在隔膜上产生的应变量 检测电阻器和由发热电阻器和温度检测电阻器检测的流量信号基于检测到的应变量来补偿应变。

公开(公告)号：US08104355B2

公开(公告)日：2012-01-31

申请号：US12707438

申请日：2010-02-17

申请人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

发明人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

IPC分类号： G01L9/02

CPC分类号： G01N27/18 ,  G01F1/6842 ,  G01F1/6845 ,  G01F1/692 ,  G01P5/10

摘要： A measurement element includes a semiconductor substrate with electrical insulating film formed thereon. A resistor formed on the electrical insulating film constitutes a heater; and a cavity is formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in the thickness direction. The measurement element has a film formed covering the region of the opening or slit.

摘要翻译： 测量元件包括其上形成有电绝缘膜的半导体衬底。 形成在电绝缘膜上的电阻构成加热器; 并且通过去除对应于形成有电阻体的主体部分的区域的半导体衬底的一部分来形成空腔。 电阻体的主体部分形成的区域通过空腔形成为薄壁部分，并且在薄壁部分的一部分中形成开口和狭缝，​​以便穿透薄壁部分 厚度方向。 测量元件具有覆盖开口或狭缝的区域的膜。

公开(公告)号：US20110140211A1

公开(公告)日：2011-06-16

申请号：US12964935

申请日：2010-12-10

申请人： Tsutomu KONO ,  Yuuki Okamoto ,  Takeshi Morino ,  Keiji Hanzawa

发明人： Tsutomu KONO ,  Yuuki Okamoto ,  Takeshi Morino ,  Keiji Hanzawa

IPC分类号： H01L29/84 ,  H01L21/50

CPC分类号： G01F15/16 ,  G01F1/684 ,  G01F1/6842 ,  G01F1/692 ,  H01L23/495 ,  H01L29/84 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49171 ,  H01L2224/73265 ,  H01L2924/00014 ,  H01L2924/00

摘要： The invention provides a flow sensor structure for sealing the surface of an electric control circuit and a part of a semiconductor device via a manufacturing method capable of preventing occurrence of flash or chip crack when clamping the semiconductor device via a mold. The invention provides a flow sensor structure comprising a semiconductor device having an air flow sensing unit and a diaphragm formed thereto, and a board or a lead frame having an electric control circuit for controlling the semiconductor device disposed thereto, wherein a surface of the electric control circuit and a part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The invention further provides flow sensor structure in which surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed, or a manufacturing method for absorbing the dimensional variation of the semiconductor device by the deformation of springs or deformation of an elastic film in the thickness direction.

摘要翻译： 本发明提供了一种流量传感器结构，用于经由模具夹紧半导体器件时能够防止发生闪光或芯片裂纹的制造方法来密封电气控制电路和半导体器件的一部分的表面。 本发明提供了一种流量传感器结构，其包括具有气流检测单元和形成于其上的隔膜的半导体器件，以及具有用于控制设置在其上的半导体器件的电气控制电路的电路板或引线框架，其中， 电路和半导体器件的表面的一部分被树脂覆盖，同时使空气流感测单元部分暴露。 本发明还提供了一种流量传感器结构，其中围绕半导体器件的树脂模具，板或预模具部件的表面不连续地与半导体器件的三个壁接触，该壁与空气流量检测单元 或者通过弹簧的变形或弹性膜在厚度方向的变形来吸收半导体器件的尺寸变化的制造方法。

公开(公告)号：US20100077851A1

公开(公告)日：2010-04-01

申请号：US12512512

申请日：2009-07-30

申请人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

发明人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

IPC分类号： G01F1/692

CPC分类号： G01F1/6845

摘要： In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.

摘要翻译： 在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中，隔膜部分上的电阻器线与隔膜部分的周边部分交叉。 在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方，保护膜比其他部分薄，防尘性降低。 在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处，从电绝缘膜突出的膜部件并排配置， 电阻丝或电阻温度检测器线。

公开(公告)号：US07677097B2

公开(公告)日：2010-03-16

申请号：US12128323

申请日：2008-05-28

申请人： Noboru Tokuyasu ,  Hiroaki Hoshika ,  Kaori Kashio ,  Keiji Hanzawa

发明人： Noboru Tokuyasu ,  Hiroaki Hoshika ,  Kaori Kashio ,  Keiji Hanzawa

IPC分类号： G01F1/68

CPC分类号： G01F1/699 ,  G01F1/688

摘要： In a gas flowmeter in which a rod and a sensor element are formed as a single body, for preventing heat of the sensor element from flowing into a sensor probe through a substrate (rod) so as to suppress considerable power consumption, and for obtaining a necessary response speed with respect to a flow rate of gas to be measured or a change in temperature, the gas column (rod) is made of an insulating material on a center axis of the sensing probe and is formed with a conductor pattern on its surface, and the sensing probe connects the sensor element disposed in a pipe through which the gas to be measured flows and a harness terminal through the conductor on the surface of the rod, so as to measure a gas flow rate by using the sensing prove.

摘要翻译： 在其中杆和传感器元件形成为单体的气体流量计中，为了防止传感器元件通过基板（棒）流入传感器探针中的热量，以便抑制相当大的功率消耗，并且为了获得 相对于待测气体的流量或温度变化的必要响应速度，气柱（棒）由感测探针的中心轴上的绝缘材料制成，并且在其表面上形成有导体图案 并且感测探头将设置在待测气体的管道中的传感器元件和通过杆表面上的导体的线束端子连接，以便通过使用感测证明来测量气体流量。

公开(公告)号：US20090126477A1

公开(公告)日：2009-05-21

申请号：US12261700

申请日：2008-10-30

申请人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

发明人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

IPC分类号： G01F1/69

CPC分类号： G01F1/6845 ,  G01F5/00 ,  G01F15/12

摘要： An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.

摘要翻译： 一种气流测量仪器，包括：辅助通道8，布置在流体流过的主通道内部;平板状构件5，在一个面5a上设置有用于测量气流的加热电阻器的图案，平板状构件为 设置在辅助通道内部，使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置，形成的加热电阻器图案侧流体通道8a部分， 流体在表面5a和辅助通道的通道形成表面8d之间流动，并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘，该引导部分13设置在平板状部件的上游侧端部。

公开(公告)号：US20070089504A1

公开(公告)日：2007-04-26

申请号：US11483549

申请日：2006-07-11

申请人： Keiji Hanzawa ,  Satoshi Shimada ,  Akio Yasukawa ,  Naoki Saito ,  Keiichi Nakada ,  Izumi Watanabe

发明人： Keiji Hanzawa ,  Satoshi Shimada ,  Akio Yasukawa ,  Naoki Saito ,  Keiichi Nakada ,  Izumi Watanabe

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/692 ,  H01L2924/0002 ,  H01L2924/00

摘要： A gas flow measuring apparatus includes a detecting element including a heating resistor and a thermo-sensitive resistor disposed on a diaphragm and external terminals connected to the heating resistor and the thermo-sensitive resistor, and a flow rate detecting unit which controls heating temperature of the heating resistor and which detects a flow rate of gas according to a change in a resistance value of the heating resistor or the thermo-sensitive resistor. The detecting element includes a resistor area in which the heating resistor and the thermo-sensitive resistor are formed and a fixed section area in which the external terminals are formed. A stress mitigating unit is formed between the resistor area and the fixed section area.

摘要翻译： 一种气体流量测量装置，包括检测元件，该检测元件包括加热电阻器和设置在隔膜上的热敏电阻器和连接到加热电阻器和热敏电阻器的外部端子，以及流量检测单元，其控制 加热电阻器，其根据加热电阻器或热敏电阻器的电阻值的变化来检测气体的流量。 检测元件包括其中形成有加热电阻器和热敏电阻器的电阻器区域和形成有外部端子的固定部分区域。 在电阻器区域和固定部分区域之间形成减压单元。