公开(公告)号：US07768635B2

公开(公告)日：2010-08-03

申请号：US12328357

申请日：2008-12-04

Applicant: Hiroyuki Nakano ,  Akira Hamamatsu ,  Sachio Uto ,  Yoshimasa Oshima ,  Hidetoshi Nishiyama ,  Yuta Urano ,  Shunji Maeda

Inventor： Hiroyuki Nakano ,  Akira Hamamatsu ,  Sachio Uto ,  Yoshimasa Oshima ,  Hidetoshi Nishiyama ,  Yuta Urano ,  Shunji Maeda

IPC: G01N21/00

CPC classification number: G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/9513 ,  G01N2021/95638 ,  H01L22/12

Abstract: A defect inspection apparatus includes a movable stage for mounting a substrate having circuit patterns as an object of inspection, an irradiation optical system which irradiates a slit-shaped light beam from an oblique direction to the circuit patterns of the substrate, a detection optical system which includes an image sensor for receiving reflected/scattered light from the substrate by irradiation of the slit-shaped light beam and converting the received light into a signal, and an image processor which processes the signal. The irradiation optical system includes a cylindrical lens and a coherency reduction optical system, which receives the light beam and emits a plurality of slit-shaped light sub-beams which are spatially reduced in coherency in a light-converging direction of the cylindrical lens. The cylindrical lens focuses the plurality of slit-shaped light sub-beams into the slit-shaped light beam irradiated to the surface of the substrate.

Abstract translation: 缺陷检查装置包括：可移动台，用于安装具有作为检查对象的电路图案的基板;照射光学系统，其将来自倾斜方向的狭缝状光束照射到基板的电路图案;检测光学系统， 包括图像传感器，用于通过照射狭缝状光束并将接收到的光转换成信号来从基板接收反射/散射光，以及处理该信号的图像处理器。 照射光学系统包括柱面透镜和相干性降低光学系统，其接收光束并发射在柱面透镜的聚光方向上空间相减的多个狭缝状光子束。 柱面透镜将多个狭缝状光子束聚焦成照射到基板表面的狭缝状光束。

公开(公告)号：US07756076B2

公开(公告)日：2010-07-13

申请号：US11429002

申请日：2006-05-05

Applicant: Hiroyuki Nakano

Inventor： Hiroyuki Nakano

IPC: H04W4/00

CPC classification number: H04W74/06 ,  H04W16/30 ,  H04W52/18

Abstract: The invention provides a cellular mobile communication system that efficiently performs high-speed communication with mobile terminals within the cell using a single frequency. The mobile communication system sequentially performs polling communication control to plural terminals within the own cell, based on a control of a base station positioned near the center of the cell. With this arrangement, the terminals within the cell can communicate with each other using a single frequency.

Abstract translation: 本发明提供了一种蜂窝移动通信系统，其使用单个频率有效地执行小区内的移动终端的高速通信。 移动通信系统基于位于小区中心附近的基站的控制，顺序对本小区内的多个终端进行轮询通信控制。 利用这种布置，单元内的终端可以使用单个频率彼此进行通信。

公开(公告)号：US07725034B2

公开(公告)日：2010-05-25

申请号：US12465956

申请日：2009-05-14

Applicant: Tetsuya Uda ,  Kenta Noda ,  Yasuhiro Uchiyama ,  Hiroshi Masuda ,  Hiroyuki Nakano

Inventor： Tetsuya Uda ,  Kenta Noda ,  Yasuhiro Uchiyama ,  Hiroshi Masuda ,  Hiroyuki Nakano

IPC: H04J14/02

CPC classification number: H04B10/00

Abstract: An optical transmission apparatus comprising a first detector for detecting the power of the supervisory signal light separated from received wavelength-division multiplexed signal lights; a second detector for detecting the power of the wavelength-division multiplexed signal lights after the separation of the supervisory signal light; a gain-controlled type optical amplifier for amplifying the wavelength-division multiplexed signal lights; an optical attenuator coupled to the amplifier; and a control unit for controlling the optical amplifier and the optical attenuator so as to keep the output level of the wavelength-division multiplexed signal lights to a predetermined target value, wherein the control unit restrains automatic output level control by the optical attenuator when the supervisory signal light power fluctuates within its permissible range and fluctuations in the signal light power have deviated from its permissible range.

Abstract translation: 一种光传输装置，包括：第一检测器，用于检测从接收的波分复用信号光分离的监控信号光的功率; 第二检测器，用于在分离监控信号光之后检测波分复用信号光的功率; 用于放大波分复用信号光的增益控制型光放大器; 耦合到所述放大器的光衰减器; 以及控制单元，用于控制光放大器和光衰减器，以便将波分复用信号光的输出电平保持在预定目标值，其中当监视器控制单元抑制光衰减器的自动输出电平控制 信号光功率在其允许范围内波动，信号光功率的波动偏离其允许范围。

公开(公告)号：US20100014083A1

公开(公告)日：2010-01-21

申请号：US12504972

申请日：2009-07-17

Applicant: Takeo UENO ,  Hiroyuki Nakano ,  Yasuhiro Yoshitake

Inventor： Takeo UENO ,  Hiroyuki Nakano ,  Yasuhiro Yoshitake

IPC: G01J4/00

CPC classification number: G01N21/9501 ,  G01N2021/4792 ,  G01N2021/8848

Abstract: An apparatus for inspecting a substrate surface is provided, which includes illumination optics for irradiating the substrate surface linearly with rectilinearly polarized light from an oblique direction, detection optics for acquiring images of the substrate surface, each of the images being formed by the light scattered from the light-irradiated substrate surface, and means for comparing an image selected as an inspection image from the plurality of substrate surface images that the detection optics has acquired to detect defects, and another image selected from the plural images of the substrate surface as a reference image different from the inspection image; the illumination optics being formed with polarization control means for controlling a polarizing direction of the light according to a particular scanning direction of the substrate or a direction orthogonal to the scanning direction.

Abstract translation: 提供了一种用于检查基板表面的装置，其包括用于从倾斜方向线性地用直线偏振光线照射基板表面的照明光学装置，用于获取基板表面的图像的检测光学装置，每个图像由从 光照射的基板表面，以及用于将从检测光学器件已经获取的多个基板表面图像中选择为检查图像的图像与检测缺陷进行比较的装置，以及从基板表面的多个图像中选择的另一图像作为参考 图像与检查图像不同; 所述照明光学元件形成有偏振控制装置，用于根据所述基板的特定扫描方向或与扫描方向正交的方向来控制所述光的偏振方向。

公开(公告)号：US07603742B2

公开(公告)日：2009-10-20

申请号：US11022893

申请日：2004-12-28

Applicant: Hiroyuki Nakano ,  Naoki Torii ,  Toshihiro Saito ,  Atsushi Takagi ,  Motoyasu Yano ,  Hiroshi Matsumoto ,  Yukio Kobayashi ,  Yoshito Hirota

Inventor： Hiroyuki Nakano ,  Naoki Torii ,  Toshihiro Saito ,  Atsushi Takagi ,  Motoyasu Yano ,  Hiroshi Matsumoto ,  Yukio Kobayashi ,  Yoshito Hirota

IPC: B60S1/38

CPC classification number: B60S1/3806

Abstract: A lever assembly holds a wiper strip, which directly wipes a wiping surface. The lever assembly includes a plurality of levers, which are connected together in tournament style. An axial length of the lever assembly is shorter than an axial length of the wiper strip. A cover member receives the lever assembly, and opposed ends of the cover member hold the wiper strip. The cover member includes a plurality of cover portions, which are formed separately from one another.

Abstract translation: 杠杆组件保持擦拭带，其直接擦拭擦拭表面。 杠杆组件包括多个杠杆，它们以比赛风格连接在一起。 杠杆组件的轴向长度短于刮片条的轴向长度。 盖构件接收杠杆组件，并且盖构件的相对端保持擦拭带。 盖构件包括彼此分离形成的多个盖部。

公开(公告)号：US20090228713A1

公开(公告)日：2009-09-10

申请号：US12370064

申请日：2009-02-12

Applicant: Fumihiro Osaka ,  Hiroyuki Nakano ,  Hiroyasu Nunokami

Inventor： Fumihiro Osaka ,  Hiroyuki Nakano ,  Hiroyasu Nunokami

IPC: H04L9/32 ,  G06F21/00

CPC classification number: G06F21/32 ,  G06F21/305

Abstract: An authentication device 40 which is used for a thin client 30 or the like encrypts address information of the biological information management apparatus 10 that is an access destination of the thin client 30 with biological information of a user of the thin client 30, and stores the encrypted address information. When the authentication device 40 receives the biological information of the user of the thin client, the authentication device 40 decrypts the encrypted address information with the received biological information, and outputs the decrypted address information to the thin client 30. When the thin client 30 accesses a biological information management apparatus 10 by using the address information and succeeds in an authentication, the thin client 30 receives profile information of a server 20 from the biological information management apparatus 10. The thin client 30 then logs in the server 20 by using the profile information.

Abstract translation: 用于瘦客户端30等的认证装置40使用瘦客户机30的用户的生物体信息对瘦客户机30的访问目的地的生物体信息管理装置10的地址信息进行加密， 加密地址信息。 当认证装置40接收到瘦客户机的用户的生物体信息时，认证装置40用接收到的生物信息对加密的地址信息进行解密，并将解密的地址信息输出到瘦客户机30。 生物信息管理装置10通过使用地址信息并成功进行认证，瘦客户端30从生物信息管理装置10接收服务器20的简档信息。然后，瘦客户端30通过使用简档登录服务器20 信息。

公开(公告)号：US20090213366A1

公开(公告)日：2009-08-27

申请号：US12435523

申请日：2009-05-05

Applicant: Hiroyuki Nakano ,  Toshihiko Nakata ,  Sachio Uto ,  Akira Hamamatsu ,  Shunji Maeda ,  Yuta Urano

Inventor： Hiroyuki Nakano ,  Toshihiko Nakata ,  Sachio Uto ,  Akira Hamamatsu ,  Shunji Maeda ,  Yuta Urano

IPC: G01N21/958

CPC classification number: G01N21/956 ,  G01N21/47 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8822

Abstract: A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for detecting defects includes a stage part on which a substrate specimen is put and which is arbitrarily movable in each of the X-Y-Z-θ directions, an illumination system for irradiating the circuit pattern with light from an inclined direction, and an image-forming optical system for forming an image of an irradiated detection area on a detector from the upward and oblique directions. With this arrangement, diffracted light and scattered light caused on the circuit pattern through the illumination by the illumination system is collected. Furthermore, a spatial filter is provided on a Fourier transform surface for blocking the diffracted light from a linear part of the circuit pattern. The scattered and reflected light received by the detector from the specimen is converted into an electrical signal. The converted electrical signal of one chip is compared with that of the other adjacent chip. If these signals are not identical to each other, the foreign matter is determined to exist on the specimen in detection.

Abstract translation: 提供一种用于检测缺陷的方法和装置，用于通过减少由于电路图案引起的噪声来检测对诸如氧化物膜的透明膜在内的待检查物体的高灵敏度的有害缺陷或异物。 用于检测缺陷的装置包括：载置基板试样的载台部分，其可以在XYZ-θ方向中任意移动;照射系统，用于利用来自倾斜方向的光照射电路图案;以及图像形成 光学系统，用于从上下方向在检测器上形成照射的检测区域的图像。 利用这种布置，收集通过照明系统的照明在电路图案上产生的衍射光和散射光。 此外，在傅立叶变换表面上提供空间滤波器，用于阻挡来自电路图形的线性部分的衍射光。 由检测器从样本接收的散射和反射光被转换成电信号。 将一个芯片的转换电信号与另一个芯片的转换电信号进行比较。 如果这些信号彼此不相同，则检测到异物被确定为存在于样品上。

公开(公告)号：US20090116839A1

公开(公告)日：2009-05-07

申请号：US12196424

申请日：2008-08-22

Applicant: Nobuhiko Kikuchi ,  Takao Fukushima ,  Naohiro Sakakida ,  Hiroyuki Nakano

Inventor： Nobuhiko Kikuchi ,  Takao Fukushima ,  Naohiro Sakakida ,  Hiroyuki Nakano

IPC: H04J14/02

CPC classification number: H04J14/02 ,  H04L1/0057 ,  H04L1/0071 ,  H04L69/08

Abstract: A signal speed converting apparatus to be connected to a WDM transmission end office, comprising a first interface connected to a first optical line group, a plurality of second interfaces connected to a second optical line group, and a speed converter. The first interface has a first framer for terminating a frame in a first format received from the first optical line group and outputting an information signal extracted from the received frames as a serial signal train or parallel signal trains. The speed converter converts the output signal from the first framer into transmission signal trains each including interleaved communication frame by cyclically distributing the output signal from the first framer to a plurality of internal lines. Each of the second interfaces has a second framer for converting the communication frame received from one of the internal lines into information frame in a second format to be transmitted to the second optical line group. Management information inserting units are located between the first and second interfaces in order to insert management information to be communicated with an opposite apparatus into the transmission signal trains on the internal lines.

Abstract translation: 一种要连接到WDM传输端局的信号速度转换装置，包括连接到第一光线路组的第一接口，连接到第二光线路组的多个第二接口和速度转换器。 第一接口具有第一成帧器，用于以从第一光线路组接收的第一格式终止帧，并将从接收到的帧提取的信息信号作为串行信号串或并行信号序列输出。 速度转换器通过将来自第一成帧器的输出信号周期性地分配到多条内部线路，将来自第一成帧器的输出信号转换成各自包括交错通信帧的发送信号列。 每个第二接口具有第二成帧器，用于将从内部线路之一接收的通信帧转换为以第二格式发送到第二光学线路组的第二格式的信息帧。 管理信息插入单元位于第一和第二接口之间，以将要与对方设备通信的管理信息插入到内线上的传输信号列中。

公开(公告)号：US07526832B2

公开(公告)日：2009-05-05

申请号：US10859084

申请日：2004-06-03

Applicant: Hiroshi Matsumoto ,  Masaaki Kiyama ,  Toshiharu Aoyama ,  Hiroyuki Nakano

Inventor： Hiroshi Matsumoto ,  Masaaki Kiyama ,  Toshiharu Aoyama ,  Hiroyuki Nakano

IPC: B60S1/38 ,  B60S1/40

CPC classification number: B60S1/3863 ,  B60S1/3801 ,  B60S1/381 ,  B60S1/3856 ,  B60S1/3867 ,  B60S1/3879 ,  B60S1/4006 ,  B60S2001/382 ,  B60S2001/3822

Abstract: A connecting arrangement of a lever is rotatably connected to a wiper arm. Arms of the lever are located on longitudinal sides, respectively, of the connecting arrangement and extend in the longitudinal direction of a wiper strip. Each arm of the lever includes a holding portion, which is provided in a longitudinal distal end of the arm to hold the wiper strip together with backing plates. The holding portion of each arm of the lever is positioned in an intermediate location between the connecting arrangement and a corresponding longitudinal end of the wiper strip.

Abstract translation: 杠杆的连接装置可旋转地连接到刮水器臂。 杠杆的臂分别位于连接装置的纵向侧面上并沿着刮水条的纵向方向延伸。 杠杆的每个臂包括保持部分，该保持部分设置在臂的纵向远端中以将擦拭带与背板一起保持。 杠杆的每个臂的保持部分位于连接装置和刮片条的相应纵向端之间的中间位置。

公开(公告)号：US20090091750A1

公开(公告)日：2009-04-09

申请号：US12329274

申请日：2008-12-05

Applicant: Yuta URANO ,  Hiroyuki Nakano ,  Shunji Maeda ,  Sachio Uto

Inventor： Yuta URANO ,  Hiroyuki Nakano ,  Shunji Maeda ,  Sachio Uto

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/956

Abstract: When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by photoelectric conversion, into voltage and reading it. Therefore, the weak detected signal obtained by detecting reflected and scattered light from small foreign matters and defects is buried in the electric noise, which has been an obstacle in detecting small foreign matters and defects. In order to solve the above problem, according to the present invention, an electron multiplying CCD sensor is used as a photo-detector. The electron multiplying CCD sensor is capable of enlarging signals brought about by inputted light relatively to the electric noise by multiplying the electrons produced through photoelectric conversion and reading them. Accordingly, compared to a conventional CCD sensor, it can detect weaker light and, therefore, smaller foreign matters and defects.

Abstract translation: 当在用于检查异物和缺陷的装置中使用CCD传感器作为光检测器时，存在在将由光电转换产生的信号电荷转换成电压并读取的同时将电噪声引起的问题。 因此，通过检测来自小异物和缺陷的反射和散射光获得的弱检测信号被埋在电噪声中，这是检测小异物和缺陷的障碍。 为了解决上述问题，根据本发明，使用电子倍增CCD传感器作为光检测器。 电子倍增CCD传感器能够通过将通过光电转换产生的电子与其进行读取而相对于电噪声放大由输入光产生的信号。 因此，与常规CCD传感器相比，它可以检测较弱的光，因此可以检测较小的异物和缺陷。