公开(公告)号：US09368680B2

公开(公告)日：2016-06-14

申请号：US13565226

申请日：2012-08-02

申请人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

发明人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

IPC分类号： H01L31/0376 ,  H01L33/08 ,  H01L29/423 ,  H01L29/786 ,  H01L27/12 ,  H01L27/32 ,  H01L51/52

CPC分类号： H01L33/08 ,  H01L27/1218 ,  H01L27/1255 ,  H01L27/322 ,  H01L27/3244 ,  H01L27/3248 ,  H01L27/3262 ,  H01L29/42384 ,  H01L29/78621 ,  H01L29/78627 ,  H01L29/78645 ,  H01L29/78696 ,  H01L51/5237 ,  H01L51/524 ,  H01L51/5246 ,  H01L51/5259 ,  H01L51/529 ,  H01L2251/5315 ,  H01L2924/0002 ,  H01L2924/00

摘要： An object of the present invention is to provide an EL display device having a high operation performance and reliability.The switching TFT 201 formed within a pixel has a multi-gate structure, which is a structure which imposes an importance on reduction of OFF current value. Further, the current control TFT 202 has a channel width wider than that of the switching TFT to make a structure appropriate for flowing electric current. Moreover, the LDD region 33 of the current control TFT 202 is formed so as to overlap a portion of the gate electrode 35 to make a structure which imposes importance on prevention of hot carrier injection and reduction of OFF current value.

摘要翻译： 本发明的目的是提供一种具有高操作性能和可靠性的EL显示装置。 在像素内形成的开关TFT201具有多栅极结构，这是对减小OFF电流值有重要意义的结构。 此外，电流控制TFT202具有比开关TFT宽的沟道宽度，以形成适于流动电流的结构。 此外，电流控制TFT202的LDD区域33形成为与栅极电极35的一部分重叠，以形成对防止热载流子注入和关断电流值的重要性的结构。

公开(公告)号：US08563333B2

公开(公告)日：2013-10-22

申请号：US13613228

申请日：2012-09-13

申请人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Takeshi Nishi

发明人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Takeshi Nishi

IPC分类号： H01L33/02

CPC分类号： C23C14/12 ,  C23C14/228 ,  C23C14/24 ,  C23C14/564 ,  C23C14/568 ,  H01L51/0002 ,  H01L51/0025 ,  H01L51/0065 ,  H01L51/0081 ,  H01L51/0089 ,  H01L51/56 ,  H05B33/10

摘要： There is provided a film formation apparatus which is capable of forming an EL layer using an EL material with high purity. The EL material is purified by sublimation immediately before film formation in the film formation apparatus, to thereby remove oxygen, water, and another impurity, which are included in the EL material. Also, when film formation is performed using the EL material (high purity EL material) obtained by purifying with sublimation as an evaporation source, a high purity EL layer can be formed.

公开(公告)号：US08421350B2

公开(公告)日：2013-04-16

申请号：US13492823

申请日：2012-06-09

申请人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

发明人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

IPC分类号： H01J1/62

CPC分类号： H01L51/5253 ,  H01L23/3171 ,  H01L27/1214 ,  H01L27/1248 ,  H01L27/322 ,  H01L27/3244 ,  H01L27/3258 ,  H01L29/78621 ,  H01L51/529 ,  H01L51/56 ,  H01L2924/0002 ,  Y10S428/917 ,  H01L2924/00

摘要： An object of the present invention is to provide an EL display device, which has a high operating performance and reliability.A third passivation film 45 is disposed under an EL element 203 which comprises a pixel electrode (anode) 46, an EL layer 47 and a cathode 48, to make a structure in which heat generated by the EL element 203 is radiated. Further, the third passivation film 45 prevents alkali metals within the EL element 203 from diffusing into the TFTs side, and prevents moisture and oxygen of the TFTs side from penetrating into the EL element 203. More preferably, heat radiating effect is given to a fourth passivation film 50 to make the EL element 203 to be enclosed by heat radiating layers.

公开(公告)号：US07825588B2

公开(公告)日：2010-11-02

申请号：US11603720

申请日：2006-11-21

申请人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

发明人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

IPC分类号： H01J1/64

CPC分类号： H01L51/5253 ,  H01L23/3171 ,  H01L27/1214 ,  H01L27/1248 ,  H01L27/322 ,  H01L27/3244 ,  H01L27/3258 ,  H01L29/78621 ,  H01L51/529 ,  H01L51/56 ,  H01L2924/0002 ,  Y10S428/917 ,  H01L2924/00

摘要： An object of the present invention is to provide an EL display device, which has a high operating performance and reliability. A third passivation film 45 is disposed so as to be in contact with an EL element 203 which comprises a pixel electrode (anode) 46, an EL layer 47 and a cathode 48, to make a structure in which heat generated by the EL element 203 is radiated. Further, the third passivation film 45 prevents alkali metals within the EL element 203 from diffusing into the TFTs side, and prevents moisture and oxygen of the TFTs side from penetrating into the EL element 203. More preferably, heat radiating effect is given to a fourth passivation film 50 to make the EL element 203 to be enclosed by heat radiating layers.

摘要翻译： 本发明的目的是提供一种具有高操作性能和可靠性的EL显示装置。 第三钝化膜45设置成与包括像素电极（阳极）46，EL层47和阴极48的EL元件203接触，以形成由EL元件203产生的热量的结构 被辐射。 此外，第三钝化膜45防止EL元件203内的碱金属扩散到TFT侧，并且防止TFT侧的水分和氧气渗透到EL元件203中。更优选地，将散热效果提供给第四钝化膜 钝化膜50以使EL元件203被散热层包围。

公开(公告)号：US20100255184A1

公开(公告)日：2010-10-07

申请号：US12759776

申请日：2010-04-14

申请人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Takeshi Fukunaga

发明人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Takeshi Fukunaga

IPC分类号： B05D5/06

CPC分类号： H01L51/56 ,  H01L21/6715 ,  H01L21/67207 ,  H01L51/0003

摘要： To provide a film deposition apparatus capable of forming an EL element of high reliability. An oxidization cell (205) is placed in a liquid phase film deposition chamber (109) such as a spin coater. The oxidization cell is provided with an oxygen gettering agent (209) comprised of an element that belongs to Group 1 or 2 of the periodic table. The oxygen gettering agent (209) is oxidized consuming oxygen in the atmosphere of the chamber, to thereby reduce the oxygen concentration in the atmosphere to 1 ppb or less. This makes it possible to form an EL element in a substantially oxygen-less state, greatly improving the reliability of the EL element.

摘要翻译： 提供能够形成高可靠性的EL元件的成膜装置。 将氧化池（205）放置在诸如旋转涂布机的液相成膜室（109）中。 氧化池配有由元素组成的吸气剂（209），该元素属于元素周期表第1族或第2族。 氧吸气剂（209）在室的气氛中氧化消耗氧，从而将大气中的氧浓度降低至1ppb以下。 这使得可以形成基本上无氧状态的EL元件，大大提高了EL元件的可靠性。

公开(公告)号：US07701134B2

公开(公告)日：2010-04-20

申请号：US11074687

申请日：2005-03-09

申请人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

发明人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

IPC分类号： H05B33/04 ,  H05B33/26 ,  H01L31/12

CPC分类号： H01L33/08 ,  H01L27/1218 ,  H01L27/1255 ,  H01L27/322 ,  H01L27/3244 ,  H01L27/3248 ,  H01L27/3262 ,  H01L29/42384 ,  H01L29/78621 ,  H01L29/78627 ,  H01L29/78645 ,  H01L29/78696 ,  H01L51/5237 ,  H01L51/524 ,  H01L51/5246 ,  H01L51/5259 ,  H01L51/529 ,  H01L2251/5315 ,  H01L2924/0002 ,  H01L2924/00

摘要： An object of the present invention is to provide an EL display device having a high operation performance and reliability.The switching TFT 201 formed within a pixel has a multi-gate structure, which is a structure which imposes an importance on reduction of OFF current value. Further, the current control TFT 202 has a channel width wider than that of the switching TFT to make a structure appropriate for flowing electric current. Morever, the LDD region 33 of the current control TFT 202 is formed so as to overlap a portion of the gate electrode 35 to make a structure which imposes importance on prevention of hot carrier injection and reduction of OFF current value.

摘要翻译： 本发明的目的是提供一种具有高操作性能和可靠性的EL显示装置。 在像素内形成的开关TFT201具有多栅极结构，这是对减小OFF电流值有重要意义的结构。 此外，电流控制TFT202具有比开关TFT宽的沟道宽度，以形成适于流动电流的结构。 另外，电流控制TFT202的LDD区域33形成为与栅电极35的一部分重叠，形成对防止热载流子注入和关断电流值的重要性的结构。

公开(公告)号：US20080029765A1

公开(公告)日：2008-02-07

申请号：US11867341

申请日：2007-10-04

申请人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Jun Koyama ,  Kazutaka Inukai ,  Mayumi MIzukami

发明人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Jun Koyama ,  Kazutaka Inukai ,  Mayumi MIzukami

IPC分类号： H01L29/10 ,  H01L31/036

CPC分类号： G09G3/3233 ,  G09G3/30 ,  G09G3/3275 ,  G09G2300/0426 ,  G09G2300/0465 ,  G09G2300/0809 ,  G09G2300/0842 ,  G09G2310/061 ,  G09G2320/0233 ,  H01L27/1203 ,  H01L27/3244 ,  H01L27/3262 ,  H01L29/66772 ,  H01L29/78621 ,  H01L2251/566

摘要： There is provided an electronic device having high reliability and high color reproducibility. A pixel structure is made such that a switching FET (201) and an electric current controlling FET (202) are formed on a single crystal semiconductor substrate (11), and an EL element (203) is electrically connected to the electric current controlling FET (202). The fluctuation in characteristics of the electric current controlling FET (202) is very low among pixels, and an image with high color reproducibility can be obtained. By taking hot carrier measures in the electric current controlling FET (202), the electronic device having high reliability can be obtained.

摘要翻译： 提供了具有高可靠性和高色彩再现性的电子设备。 进行像素结构，使得开关FET（201）和电流控制用FET（202）形成在单晶半导体基板（11）上，并且将EL元件（203）电连接到电流控制FET （202）。 电流控制FET（202）的特性波动在像素中非常低，并且可以获得具有高色彩再现性的图像。 通过在电流控制用FET（202）中采取热载体测量，可以获得具有高可靠性的电子设备。

公开(公告)号：US07288420B1

公开(公告)日：2007-10-30

申请号：US09580485

申请日：2000-05-30

申请人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

发明人： Shunpei Yamazaki ,  Jun Koyama ,  Kunitaka Yamamoto ,  Toshimitsu Konuma

IPC分类号： H01L21/00

CPC分类号： H01L51/52 ,  H01L27/12 ,  H01L27/1214 ,  H01L27/3211 ,  H01L27/3244 ,  H01L27/3258 ,  H01L51/0005 ,  H01L51/0038 ,  H01L51/0042 ,  H01L51/0059 ,  H01L51/0062 ,  H01L51/0077 ,  H01L51/0078 ,  H01L51/0081 ,  H01L51/0085 ,  H01L51/0087 ,  H01L51/5237 ,  H01L51/524 ,  H01L51/5253 ,  H01L51/529

摘要： An object of the present invention is to provide an EL display device having high operation performance and reliability.A third passivation film 45 is disposed under the EL element 203 comprising a pixel electrode (anode) 46, an EL layer 47 and a cathode 48, and diffusion of alkali metals from the EL element 203 formed by ink jet method into TFTs is prevented. Further, the third passivation film 45 prevents penetration of moisture and oxygen the TFTs, and suppress degradation of the EL element 203 by dispersing the heat generated by the EL element 203.

摘要翻译： 本发明的目的是提供一种具有高操作性能和可靠性的EL显示装置。 第三钝化膜45设置在包括像素电极（阳极）46，EL层47和阴极48的EL元件203的下方，并且防止了碱金属从通过喷墨法形成的EL元件203扩散到TFT中。 此外，第三钝化膜45防止水分和氧气透过TFT，并且通过分散由EL元件203产生的热量来抑制EL元件203的劣化。

公开(公告)号：US07279752B2

公开(公告)日：2007-10-09

申请号：US10958835

申请日：2004-10-05

申请人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Jun Koyama ,  Kazutaka Inukai ,  Mayumi Mizukami

发明人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Jun Koyama ,  Kazutaka Inukai ,  Mayumi Mizukami

IPC分类号： H01L27/01 ,  H01L27/12 ,  H01L31/0392

CPC分类号： G09G3/3233 ,  G09G3/30 ,  G09G3/3275 ,  G09G2300/0426 ,  G09G2300/0465 ,  G09G2300/0809 ,  G09G2300/0842 ,  G09G2310/061 ,  G09G2320/0233 ,  H01L27/1203 ,  H01L27/3244 ,  H01L27/3262 ,  H01L29/66772 ,  H01L29/78621 ,  H01L2251/566

摘要： There is provided an electronic device having high reliability and high color reproducibility. A pixel structure is made such that a switching FET (201) and an electric current controlling FET (202) are formed on a single crystal semiconductor substrate (11), and an EL element (203) is electrically connected to the electric current controlling FET (202). The fluctuation in characteristics of the electric current controlling FET (202) is very low among pixels, and an image with high color reproducibility can be obtained. By taking hot carrier measures in the electric current controlling FET (202), the electronic device having high reliability can be obtained.

摘要翻译： 提供了具有高可靠性和高色彩再现性的电子设备。 进行像素结构，使得开关FET（201）和电流控制用FET（202）形成在单晶半导体基板（11）上，并且将EL元件（203）电连接到电流控制FET （202）。 电流控制FET（202）的特性波动在像素中非常低，并且可以获得具有高色彩再现性的图像。 通过在电流控制用FET（202）中采取热载体测量，可以获得具有高可靠性的电子设备。

公开(公告)号：US20070007870A1

公开(公告)日：2007-01-11

申请号：US11522461

申请日：2006-09-18

申请人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Mayumi Mizukami

发明人： Shunpei Yamazaki ,  Toshimitsu Konuma ,  Mayumi Mizukami

IPC分类号： H01L51/52 ,  H05B33/02

CPC分类号： H01L51/0038 ,  H01L27/32 ,  H01L27/322 ,  H01L27/3244 ,  H01L51/0025 ,  H01L51/0035 ,  H01L51/005 ,  H01L51/0081 ,  H01L51/5012 ,  H01L51/5237 ,  H01L51/5243 ,  H01L51/5246 ,  H01L51/5253 ,  H01L51/5259 ,  H01L51/5284 ,  H01L2251/5315 ,  Y10S428/917

摘要： By repeating a purification process of a light-emitting organic compound several times, a thin film made of the light-emitting organic compound to be used in an EL display device contains ionic impurities at the concentration of 0.1 ppm or lower and has a volume resistivity in the range of 3×1010 Ωcm or larger. By using such a thin film as a light-emitting layer in the EL device, a current caused by reasons other than the carrier recombination can be prevented from flowing through the thin film, and deterioration caused by unnecessary heat generation can be suppressed. Accordingly, it is possible to obtain an EL display device with high reliability.

摘要翻译： 通过重复发光有机化合物的净化处理多次，由EL显示装置中使用的发光有机化合物制成的薄膜含有浓度为0.1ppm以下的离子性杂质，具有体积电阻率 在3×10 10Ω或更大的范围内。 通过在EL器件中使用这种薄膜作为发光层，可以防止由载流子复合以外的原因引起的电流流过薄膜，并且可以抑制不必要的发热引起的劣化。 因此，可以获得高可靠性的EL显示装置。