公开(公告)号：US07061612B2

公开(公告)日：2006-06-13

申请号：US10711605

申请日：2004-09-28

Applicant: David W. Johnston

Inventor： David W. Johnston

IPC: G01J4/00

CPC classification number: G01L1/241 ,  G01J4/00 ,  G01N21/21

Abstract: An LED polarimeter is described which is suitable for measuring the stress in photoelastic materials. The polarimeter comprises a sequential arrangement of an LED light source, a first polarizer, a ¼ wave plate, and a second polarizer substantially aligned along a central axis. The relatively monochromatic LED light source essentially eliminates errors caused by chromatic abberations and heat damage to the polarizing film. Preferrably, the LED light source emits in the green region of the visible spectrum to take advantage of the sensitivity of the human eye to this part of the spectrum.

公开(公告)号：US06785051B2

公开(公告)日：2004-08-31

申请号：US10195198

申请日：2002-07-15

Applicant: Douglas C. Allan ,  James E. Webb ,  John H. Bruning

Inventor： Douglas C. Allan ,  James E. Webb ,  John H. Bruning

IPC: G02B530

CPC classification number: G02B17/0892 ,  G01L1/241 ,  G02B1/02 ,  G02B5/3091 ,  G02B17/0808 ,  G02B17/086 ,  G02F1/0131 ,  G03F7/70225 ,  G03F7/70566 ,  G03F7/70958 ,  G03F7/70966

Abstract: Stress-induced photoelastic birefringence compensates for intrinsic birefringence of cubic crystalline structures in deep ultraviolet (less than 200 nm) microlithographic imaging systems. Both the photoelastic birefringence and the intrinsic birefringence are expressed in a tensor format simplified by the symmetries of cubic crystalline structures. The stress-induced photoelastic birefringence can be sized to individually compensate for intrinsic birefringence exhibited in the same optical elements or preferably to collectively compensate for the cumulative effects of intrinsic birefringence in other optical elements in the lithography system.

Abstract translation: 应力诱导的光弹性双折射补偿深紫外（小于200nm）微光刻成像系统中立方晶体结构的固有双折射。 光弹性双折射和本征双折射均以立方晶体结构的对称性简化的张量形式表示。 应力诱导的光弹性双折射的尺寸可以单独地补偿在相同的光学元件中显示的本征双折射，或优选地共同地补偿在光刻系统中的其它光学元件中的本征双折射的累积效应。

公开(公告)号：US20040061053A1

公开(公告)日：2004-04-01

申请号：US10467303

申请日：2003-08-07

Inventor： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

IPC: G21K007/00 ,  G01N023/00

CPC classification number: H01J37/28 ,  G01L1/241 ,  G01L5/0047 ,  G01N23/20 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/2955 ,  H01J2237/24585 ,  H01J2237/2544 ,  H01J2237/2813 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

Abstract translation: 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。

公开(公告)号：US20030021026A1

公开(公告)日：2003-01-30

申请号：US10195198

申请日：2002-07-15

Inventor： Douglas C. Allan ,  James E. Webb ,  John H. Bruning

IPC: G03B021/56

CPC classification number: G02B17/0892 ,  G01L1/241 ,  G02B1/02 ,  G02B5/3091 ,  G02B17/0808 ,  G02B17/086 ,  G02F1/0131 ,  G03F7/70225 ,  G03F7/70566 ,  G03F7/70958 ,  G03F7/70966

Abstract: Stress-induced photoelastic birefringence compensates for intrinsic birefringence of cubic crystalline structures in deep ultraviolet (less than 200 nm) microlithographic imaging systems. Both the photoelastic birefringence and the intrinsic birefringence are expressed in a tensor format simplified by the symmetries of cubic crystalline structures. The stress-induced photoelastic birefringence can be sized to individually compensate for intrinsic birefringence exhibited in the same optical elements or preferably to collectively compensate for the cumulative effects of intrinsic birefringence in other optical elements in the lithography system.

Abstract translation: 应力诱导的光弹性双折射补偿深紫外（小于200nm）微光刻成像系统中立方晶体结构的固有双折射。 光弹性双折射和本征双折射均以立方晶体结构的对称性简化的张量形式表示。 应力诱导的光弹性双折射的尺寸可以单独地补偿在相同的光学元件中显示的本征双折射，或优选地共同地补偿在光刻系统中的其它光学元件中的本征双折射的累积效应。

公开(公告)号：US5699159A

公开(公告)日：1997-12-16

申请号：US738613

申请日：1996-10-29

Applicant: Philip L. Mason

Inventor： Philip L. Mason

IPC: G01L1/24 ,  G01L3/12 ,  G01B9/02

CPC classification number: G01L1/241 ,  G01L3/12

Abstract: This invention discloses a mechanical stress measurement system which utilizes a birefringent coating and spectral demodulation to determine the magnitude and angular orientation of the stresses in a mechanical element from which the loads acting on that mechanical element are calculated. The invention provides for the measurement of Torque, Axial and Bending loads in a shaft, whether they exist singularly or in combination, without the requirement for electrical, mechanical or physical contact with the shaft, and is able to determine the magnitude and sense of the torque and axial loads, and the magnitude and plane of the bending load.

Abstract translation: 本发明公开了一种机械应力测量系统，其利用双折射涂层和光谱解调来确定在其中计算作用在该机械元件上的载荷的机械元件中的应力的大小和角度取向。 本发明提供了测量轴中的扭矩，轴向和弯曲载荷，无论它们是单独存在还是组合存在，而不需要与轴的电，机械或物理接触，并且能够确定 扭矩和轴向载荷以及弯曲载荷的大小和平面。

公开(公告)号：US5400131A

公开(公告)日：1995-03-21

申请号：US25882

申请日：1993-03-03

Applicant: Barrie C. Stockley ,  Clive H. Buckberry

Inventor： Barrie C. Stockley ,  Clive H. Buckberry

IPC: G01L1/24 ,  G01B11/18

CPC classification number: G01L1/241

Abstract: Polarized light from a polarizer 12 is passed through a stressed birefringent object 14 and an analyser 16 to produce a fringe pattern representative of the stress in the object 14. The fringe pattern is observed with a CCD camera 18 and intensity information of the pattern is input to a computer 22. The process is repeated for at least two wavelengths of light and the information for the different wavelengths is combined to form a stress map of the object 14 for display on a VDU 24.

Abstract translation: 来自偏振器12的偏振光通过应力双折射物体14和分析器16以产生表示物体14中的应力的条纹图案。用CCD照相机18观察条纹图案，并且输入图案的强度信息 对于至少两个波长的光重复该过程，并且将用于不同波长的信息组合以形成用于在VDU 24上显示的对象14的应力图。

公开(公告)号：US5298964A

公开(公告)日：1994-03-29

申请号：US861223

申请日：1992-03-31

Applicant: Bruce N. Nelson ,  Malcolm C. Smith

Inventor： Bruce N. Nelson ,  Malcolm C. Smith

IPC: G01L1/24

CPC classification number: G01L1/241

Abstract: A stress sensor having directional measurement capabilities based on the photoelastic effect in isotropic photoelastic materials. Directional measurement capability is achieved in the sensor by the incorporation of three different optical axes passing through the photoelastic element. This creates three independent stress sensors which utilize a single sensing element. Each of the three independent stress sensors are sensitive to applied stress in different directions. The response of each of the sensors is analyzed and the magnitude and direction of incoming stress is determined. The use of a sum-difference output detection scheme results in immunity to light source intensity variations, optical fiber microbending losses, and fiberoptic connector losses. The stress sensor is immune to electromagnetic interference (EMI) and electromagnetic pulse (EMP), and is compatible with fiberoptic data transmission and control lines.

Abstract translation: 一种应力传感器，具有基于各向同性光弹性材料光弹效应的方向测量能力。 通过结合通过光弹元件的三个不同的光轴，在传感器中实现了定向测量能力。 这产生了三个独立的应力传感器，其利用单个感测元件。 三个独立应力传感器中的每一个都对不同方向的应力敏感。 分析每个传感器的响应，并确定进入应力的大小和方向。 使用和差输出检测方案可以实现光源强度变化，光纤微弯损耗和光纤连接器损耗的免疫。 应力传感器不受电磁干扰（EMI）和电磁脉冲（EMP）的影响，与光纤数据传输和控制线路兼容。

公开(公告)号：US5095515A

公开(公告)日：1992-03-10

申请号：US703469

申请日：1991-05-17

Applicant: George Seaver

Inventor： George Seaver

IPC: G01L1/24 ,  G02F1/01 ,  G02F1/29 ,  G02F1/313

CPC classification number: G02F1/3131 ,  G01L1/241 ,  G02F1/29 ,  G02F1/0131

Abstract: An optical switch which comprises a photoelastic, optically transparent material whose index of refraction is changed by stress and which propagates an optical beam or beams from an inlet window to an outlet window in the material, with the inlet window adapted to receive an optical beam from an optical source and the outlet window adapted to pass an optical beam from the photoelastic material to an optical output receptor, and a receptor means of applying a stress gradient to said photoelastic material to change the index of refraction and hence, the optical path of the optical beam between a normal, unstressed optical beam path and a bent, stressed optical beam path. Optical systems are described in which the optical switch is employed to form optical lenses wherein an optical beam is focused by stress within an optical material, such as a photoelastic cylindrical rod. Optical integrated systems are also described employing the optical switch with optical devices as an optical integrated module.

Abstract translation: 一种光学开关，其包括光弹性光学透明材料，其折射率由应力改变，并且将光束或光束从入口窗口传播到材料中的出口窗口，入口窗口适于接收来自 光源和出口窗口，其适于将光束从光弹性材料传递到光输出接收器;以及接收装置，对所述光弹性材料施加应力梯度以改变折射率，因此， 在正常的，不受应力的光束路径和弯曲的应力光束路径之间的光束。 描述了光学系统，其中采用光学开关来形成光学透镜，其中光束由诸如光弹性圆柱形棒之类的光学材料内的应力聚焦。 采用具有光学装置的光学开关作为光学集成模块也描述了光学集成系统。

公开(公告)号：US5021647A

公开(公告)日：1991-06-04

申请号：US360889

申请日：1989-05-30

Applicant: Kyoichi Tatsuno ,  Toshiya Umeda

Inventor： Kyoichi Tatsuno ,  Toshiya Umeda

IPC: G01D5/26 ,  G01D5/34 ,  G01L1/24 ,  G01R15/24

CPC classification number: G01R15/24 ,  G01D5/344 ,  G01L1/241

Abstract: An optical fiber sensor, which has a detector section connected in a single optical path made of an optical-fiber cable and having a light-modulating element and an optical element connected in series. The light-modulating element has its birefringence degree changed in accordance with the physical quantity to be sensed, thereby to modulate the polarization state of the physical quantity. The optical element converts the polarization state of the physical quantity into the intensity of light. The sensor further comprises two light sources, which apply two light beams having different wavelengths .lambda..sub.1 and .lambda..sub.2 to one end of the optical path. The intensities P.sub.1 and P.sub.2 of the beams of the wavelengths .lambda..sub.1 and .lambda..sub.2, both emitted from the other end of the optical path, are detected. The intensities .lambda..sub.1 and .lambda..sub.2 vary in accordance with the changes in the intensity of the light emitted from the light sources, in the loss at the optical-fiber cable and the optical connector, and in the physical quantity to be detected. To obtain data free of the changes in the intensity of the light emitted from the light sources, in the loss at the optical-fiber cable and the optical connector, one type of the sensor has means for controlling one of the light sources such that the intensities P.sub.1 and P.sub.2 are at the same level, and means for detecting the intensities P.sub.01 and P.sub.02 of the light beams emitted from the two light sources and performing the calculation of (P.sub.01 -P.sub.02)/(P.sub.01 +P.sub.02).

公开(公告)号：US5016957A

公开(公告)日：1991-05-21

申请号：US439710

申请日：1989-11-20

Applicant: George Seaver

Inventor： George Seaver

IPC: G01L1/24 ,  G02F1/01 ,  G02F1/29 ,  G02F1/313

CPC classification number: G02F1/3131 ,  G01L1/241 ,  G02F1/29 ,  G02F1/0131

Abstract: An optical switch which comprises a photoelastic, optically transparent material whose index of refraction is changed by mechanical stress and which propagates an optical beam or beams from an inlet window to an outlet window in the material, with the inlet window adapted to receive an optical beam from an optical source and the outlet window adapted to pass an optical beam from the photoelastic material to an optical output receptor, and a means of applying a stress gradient to said photoelastic material to change the index of refraction and hence, the optical path of the optical beam between a normal, unstressed optical beam path and a bent, stressed optical beam path. Optical systems are described in which the optical switch is employed to receive an optical beam from a source and to switch a beam after passing it through the photoelastic optical material to and from an optical receptor. The disclosure also includes a method of optically switching an optical beam between normal and stressed optical beam positions by applying a predetermined mechanical force to a photoelastic optically transparent material to form a mechanical stress gradient within the optical transparent photoelastic material which provides an index of refraction gradient therein and causes the switching of the optical beam.

Abstract translation: 一种光学开关，其包括光弹性光学透明材料，其折射率由机械应力改变，并且将光束或光束从入口窗口传播到材料中的出口窗口，入口窗口适于接收光束 来自光源和出口窗口，其适于将光束从光弹性材料传递到光输出接收器，以及向所述光弹性材料施加应力梯度以改变折射率的装置，因此， 在正常的，不受应力的光束路径和弯曲的应力光束路径之间的光束。 描述了光学系统，其中光学开关用于从光源接收光束并且在将光束通过光弹性光学材料之后转换到光学接收器并从光学接收器转换光束。 本公开还包括通过对光弹性光学透明材料施加预定的机械力以在光学透明光弹性材料内形成机械应力梯度来在正常和受应力光束位置之间光学切换光束的方法，其提供折射率梯度 导致光束的切换。