公开(公告)号：US06927076B2

公开(公告)日：2005-08-09

申请号：US10264517

申请日：2002-10-05

Applicant: Shi-Rong Chen ,  Yu-Wen Fang ,  Ching-Shan Lu

Inventor： Shi-Rong Chen ,  Yu-Wen Fang ,  Ching-Shan Lu

IPC: H01L21/00 ,  H01L21/302 ,  H01L21/3605

CPC classification number: H01L21/67276 ,  H01J37/32935 ,  H01L21/67253

Abstract: A method for automated monitoring and controlling of a semiconductor wafer plasma process including performing a plasma process in a plasma processing system to treat a semiconductor process wafer according to a first plasma process recipe; collecting plasma process parameters including at least an RF power and a plasma process time at pre-determined time intervals; and, storing the plasma process parameters including pre-process plasma processing system parameters according to a selectively queryable database to create a plasma process history such that upon abortion of the plasma process the plasma process history may be selectively retrieved to determine a second plasma process recipe to complete the plasma process.

Abstract translation: 一种用于半导体晶片等离子体处理的自动监测和控制的方法，包括在等离子体处理系统中执行等离子体处理以根据第一等离子体处理配方处理半导体工艺晶片; 以预定的时间间隔收集包括至少RF功率和等离子体处理时间的等离子体处理参数; 以及根据选择性可查询的数据库存储等离子体处理参数，包括预处理等离子体处理系统参数以产生等离子体处理历史，使得在等离子体处理流产时，可选择性地检索等离子体处理历史以确定第二等离子体处理配方 完成等离子体工艺。

公开(公告)号：US20140028232A1

公开(公告)日：2014-01-30

申请号：US13596053

申请日：2012-08-28

Applicant: Kun-Min Chen ,  Ching-Sheng Li ,  Ching-Shan Lu ,  Ming-Jung Tsai

Inventor： Kun-Min Chen ,  Ching-Sheng Li ,  Ching-Shan Lu ,  Ming-Jung Tsai

IPC: H02P7/29

CPC classification number: H02P6/10 ,  H02P6/15

Abstract: A motor driving circuit for driving a direct-current (DC) motor, includes a driving circuit for converting an input voltage into a first and a second output voltages, a Hall sensor for generating a first and a second time sequential control signals according to a working condition of the DC motor, a current sensing unit for detecting a motor current through the DC motor and comparing the motor current to a reference current to generate a comparison result and determine a first transition voltage selector value accordingly, and a control unit coupled to the driving circuit, the current sensing unit and the Hall sensor for controlling a working status of the driving circuit according to the first and the second time sequential control signals and the first transition voltage selector value.

Abstract translation: 用于驱动直流（DC）电动机的电动机驱动电路包括用于将输入电压转换为第一和第二输出电压的驱动电路，用于根据第一和第二输出电压产生第一和第二时间顺序控制信号的霍尔传感器 直流电动机的工作状态，电流检测单元，用于检测通过直流电动机的电动机电流，并将电动机电流与参考电流进行比较以产生比较结果，并相应地确定第一过渡电压选择器值;以及控制单元， 驱动电路，电流检测单元和霍尔传感器，用于根据第一和第二时序控制信号和第一转换电压选择器值来控制驱动电路的工作状态。

公开(公告)号：US08519802B2

公开(公告)日：2013-08-27

申请号：US13172816

申请日：2011-06-29

Applicant: Chia-Tai Yang ,  Yi-Cheng Liu ,  Ching-Sheng Li ,  Kun-Min Chen ,  Ching-Shan Lu

Inventor： Chia-Tai Yang ,  Yi-Cheng Liu ,  Ching-Sheng Li ,  Kun-Min Chen ,  Ching-Shan Lu

IPC: H03K7/08

CPC classification number: H03K7/08

Abstract: The present invention discloses a pulse width modulation driving IC. The pulse width modulation driving IC includes a first pin, for receiving a first signal, a second pin, for receiving a second signal, a comparing unit, for comparing the first signal with a reference voltage, to generate a comparison result indicating a operating mode of the pulse width modulation driving IC, and an output unit, for outputting a pulse width modulation output signal according to the first signal, the second signal and the comparison result.

Abstract translation: 本发明公开了一种脉宽调制驱动IC。 脉宽调制驱动IC包括用于接收第一信号的第一引脚，用于接收第二信号的第二引脚，用于将第一信号与参考电压进行比较的比较单元，以产生指示操作模式的比较结果 以及输出单元，用于根据第一信号，第二信号和比较结果输出脉宽调制输出信号。

公开(公告)号：US20120280642A1

公开(公告)日：2012-11-08

申请号：US13204732

申请日：2011-08-08

Applicant: Ying-Chen Lin ,  Kun-Min Chen ,  Ching-Sheng Li ,  Chia-Tai Yang ,  Ching-Shan Lu

Inventor： Ying-Chen Lin ,  Kun-Min Chen ,  Ching-Sheng Li ,  Chia-Tai Yang ,  Ching-Shan Lu

IPC: H02P6/20

CPC classification number: H02P6/20

Abstract: The present invention discloses a start-up circuit for a motor driving IC. The activation circuit includes a determination unit, for generating a determination result indicating an operating mode of the motor driving IC according to an external pulse width modulation signal, and an output unit, for outputting an activation signal according to the determination result and a pulse width modulation activation signal. A duty of the pulse width modulation activation signal is greater than a duty of the external pulse width modulation signal.

Abstract translation: 本发明公开了一种用于电机驱动IC的启动电路。 激活电路包括：确定单元，用于根据外部脉冲宽度调制信号产生指示电机驱动IC的操作模式的确定结果;以及输出单元，用于根据确定结果输出激活信号和脉冲宽度 调制激活信号。 脉宽调制激活信号的占空比大于外部脉宽调制信号的占空比。

公开(公告)号：US08063601B2

公开(公告)日：2011-11-22

申请号：US12254800

申请日：2008-10-20

Applicant: Ke-Min Chen ,  Ching-Sheng Li ,  Kun-Min Chen ,  Shen-Min Lo ,  Ching-Shan Lu

Inventor： Ke-Min Chen ,  Ching-Sheng Li ,  Kun-Min Chen ,  Shen-Min Lo ,  Ching-Shan Lu

IPC: H02P1/28

CPC classification number: H02P7/285

Abstract: A motor driving circuit for adjusting speed of the motor by changing output voltage is disclosed. One end of the motor is coupled to a variable voltage source. The motor driving circuit includes a motor-driving unit, a control unit and a determining unit. The motor-driving unit includes a first end coupled to another end of the motor, a second end coupled to a ground and a third end, and is utilized for driving the motor. The control unit is utilized for controlling the voltage between the first end and the third end of the motor-driving unit. The determining unit is coupled between the variable voltage source and the control unit, and is utilized for controlling the control unit to adjust the voltage between the first end and the third end of the motor-driving unit according to magnitude of the voltage of the variable voltage source.

Abstract translation: 公开了一种用于通过改变输出电压来调节电动机速度的电动机驱动电路。 马达的一端连接到可变电压源。 马达驱动电路包括马达驱动单元，控制单元和确定单元。 马达驱动单元包括联接到马达的另一端的第一端，联接到地面和第三端的第二端，并且用于驱动马达。 控制单元用于控制电机驱动单元的第一端和第三端之间的电压。 所述确定单元耦合在所述可变电压源和所述控制单元之间，并且用于控制所述控制单元，以根据所述可变电压源的电压的大小来调整所述电动机构驱动单元的第一端和第三端之间的电压 电压源。

公开(公告)号：US20100052591A1

公开(公告)日：2010-03-04

申请号：US12254800

申请日：2008-10-20

Applicant: Ke-Min Chen ,  Ching-Sheng Li ,  Kun-Min Chen ,  Shen-Min Lo ,  Ching-Shan Lu

Inventor： Ke-Min Chen ,  Ching-Sheng Li ,  Kun-Min Chen ,  Shen-Min Lo ,  Ching-Shan Lu

IPC: H02P7/285

CPC classification number: H02P7/285

Abstract: A motor driving circuit for adjusting speed of the motor by changing output voltage is disclosed. One end of the motor is coupled to a variable voltage source. The motor driving circuit includes a motor-driving unit, a control unit and a determining unit. The motor-driving unit includes a first end coupled to another end of the motor, a second end coupled to a ground and a third end, and is utilized for driving the motor. The control unit is utilized for controlling the voltage between the first end and the third end of the motor-driving unit. The determining unit is coupled between the variable voltage source and the control unit, and is utilized for controlling the control unit to adjust the voltage between the first end and the third end of the motor-driving unit according to magnitude of the voltage of the variable voltage source.

Abstract translation: 公开了一种用于通过改变输出电压来调节电动机速度的电动机驱动电路。 马达的一端连接到可变电压源。 马达驱动电路包括马达驱动单元，控制单元和确定单元。 马达驱动单元包括联接到马达的另一端的第一端，联接到地面和第三端的第二端，并且用于驱动马达。 控制单元用于控制电机驱动单元的第一端和第三端之间的电压。 所述确定单元耦合在所述可变电压源和所述控制单元之间，并且用于控制所述控制单元，以根据所述可变电压源的电压的大小来调整所述电动机构驱动单元的第一端和第三端之间的电压 电压源。

公开(公告)号：US08624539B2

公开(公告)日：2014-01-07

申请号：US13204732

申请日：2011-08-08

Applicant: Ying-Chen Lin ,  Kun-Min Chen ,  Ching-Sheng Li ,  Chia-Tai Yang ,  Ching-Shan Lu

Inventor： Ying-Chen Lin ,  Kun-Min Chen ,  Ching-Sheng Li ,  Chia-Tai Yang ,  Ching-Shan Lu

IPC: G05B11/28

CPC classification number: H02P6/20

Abstract: The present invention discloses a start-up circuit for a motor driving IC. The activation circuit includes a determination unit, for generating a determination result indicating an operating mode of the motor driving IC according to an external pulse width modulation signal, and an output unit, for outputting an activation signal according to the determination result and a pulse width modulation activation signal. A duty of the pulse width modulation activation signal is greater than a duty of the external pulse width modulation signal.

Abstract translation: 本发明公开了一种用于电机驱动IC的启动电路。 激活电路包括：确定单元，用于根据外部脉冲宽度调制信号产生指示电机驱动IC的操作模式的确定结果;以及输出单元，用于根据确定结果输出激活信号和脉冲宽度 调制激活信号。 脉宽调制激活信号的占空比大于外部脉宽调制信号的占空比。

公开(公告)号：US08093678B2

公开(公告)日：2012-01-10

申请号：US11783067

申请日：2007-04-05

Applicant: Ching-Shan Lu ,  Feng-Liang Lai ,  Shean-Ren Horng

Inventor： Ching-Shan Lu ,  Feng-Liang Lai ,  Shean-Ren Horng

IPC: H01L21/762 ,  H01L21/70

CPC classification number: H01L21/76232

Abstract: A semiconductor device. The device includes an active region isolated by an isolation structure on a substrate, and a dielectric layer overlying the active region and the isolation structure. The dielectric layer comprises a lower part overlying the active region beyond the boundary of the active region and the isolation structure, and a protruding part overlying the boundary of the active region and the isolation structure.

Abstract translation: 半导体器件。 该器件包括由衬底上的隔离结构隔离的有源区和覆盖有源区和隔离结构的介电层。 电介质层包括覆盖有源区域超过有源区域和隔离结构的边界的有源区域的下部，以及覆盖有源区域和隔离结构的边界的突出部分。

公开(公告)号：US20080246111A1

公开(公告)日：2008-10-09

申请号：US11783067

申请日：2007-04-05

Applicant: Ching-Shan Lu ,  Feng-Liang Lai ,  Shean-Ren Horng

Inventor： Ching-Shan Lu ,  Feng-Liang Lai ,  Shean-Ren Horng

IPC: H01L29/00

CPC classification number: H01L21/76232

Abstract: A semiconductor device. The device includes an active region isolated by an isolation structure on a substrate, and a dielectric layer overlying the active region and the isolation structure. The dielectric layer comprises a lower part overlying the active region beyond the boundary of the active region and the isolation structure, and a protruding part overlying the boundary of the active region and the isolation structure.

Abstract translation: 半导体器件。 该器件包括由衬底上的隔离结构隔离的有源区和覆盖有源区和隔离结构的介电层。 电介质层包括覆盖有源区域超过有源区域和隔离结构的边界的有源区域的下部，以及覆盖有源区域和隔离结构的边界的突出部分。

公开(公告)号：US06954715B2

公开(公告)日：2005-10-11

申请号：US10654760

申请日：2003-09-04

Applicant: Ching-Shan Lu

Inventor： Ching-Shan Lu

IPC: G05B23/02 ,  G06F11/00 ,  G06F15/00 ,  G06F11/30

CPC classification number: G05B23/0264 ,  G05B23/0224 ,  G06F11/008

Abstract: A system and method for equipment malfunction detection and diagnosis. The system includes equipment and a detection/diagnosis unit. The equipment transfers status information thereof to the detection/diagnosis unit at preset intervals. The detection/diagnosis unit receives and stores the status information of the equipment, and checks whether the status information conforms to a process control standard. If not, it is determined that the equipment has a malfunction, and the detection/diagnosis unit generates a notification or warning message, stops the operation of the equipment, and retrieves a recovery measure for the malfunction from a diagnostic database.

Abstract translation: 一种用于设备故障检测和诊断的系统和方法。 该系统包括设备和检测/诊断单元。 设备以预设的间隔将其状态信息传送到检测/诊断单元。 检测/诊断单元接收并存储设备的状态信息，并且检查状态信息是否符合过程控制标准。 如果没有，则确定设备有故障，并且检测/诊断单元产生通知或警告消息，停止设备的操作，并且从诊断数据库检索故障的恢复措施。