Laser Optical System, Repair Apparatus And Method Using The Same
    12.
    发明申请
    Laser Optical System, Repair Apparatus And Method Using The Same 有权
    激光光学系统,修复设备及其使用方法

    公开(公告)号:US20120103955A1

    公开(公告)日:2012-05-03

    申请号:US13279716

    申请日:2011-10-24

    Abstract: According to example embodiments, a laser optical system includes a laser generator, at least one scan module, an objective lens, a relay lens, a review optical system, and a control device. The laser generator is configured to generate a laser beam. The at least one scan module is configured to reflect the laser beam generated by the laser generator and to direct the laser beam in different directions. The objective lens is configured to focus the laser beam on a substrate. The relay lens is configured to guide the laser beam scanned by the at least one scan module to within an incident range of the objective lens. The review optical system is configured to monitor, in real time, repair of the substrate using the laser beam. The control device is configured to control the at least one scan module.

    Abstract translation: 根据示例实施例,激光光学系统包括激光发生器,至少一个扫描模块,物镜,中继透镜,复查光学系统和控制装置。 激光发生器被配置为产生激光束。 所述至少一个扫描模块被配置为反射由激光发生器产生的激光束并且将激光束引向不同的方向。 物镜配置成将激光束聚焦在基板上。 中继透镜被配置为将由至少一个扫描模块扫描的激光束引导到物镜的入射范围内。 检查光学系统被配置为实时地监视使用激光束修复衬底。 所述控制装置被配置为控制所述至少一个扫描模块。

    APPARATUS FOR REFINING ORGANIC MATERIAL
    14.
    发明申请
    APPARATUS FOR REFINING ORGANIC MATERIAL 审中-公开
    精炼有机材料的设备

    公开(公告)号:US20130216968A1

    公开(公告)日:2013-08-22

    申请号:US13541251

    申请日:2012-07-03

    CPC classification number: F27B5/02 F27D5/00

    Abstract: An apparatus for refining an organic material includes an outer tube, a plurality of inner tubes in the outer tube and including at least one loading inner tube for loading an organic material to be refined and comprising a first loading boat and a second loading boat above the first loading boat in the loading inner tube, and at least one collecting inner tube for collecting refined organic material, a heating unit outside the outer tube, and a vacuum pump coupled to the outer tube for providing low pressure in the outer tube and the inner tubes.

    Abstract translation: 一种用于精制有机材料的设备包括外管,外管中的多个内管,并且包括至少一个装载内管,用于装载待精炼的有机材料,并且包括第一装载船和第二装载船 首先在装载内管中装载船,以及至少一个用于收集精制有机材料的收集内管,外管外部的加热单元,以及耦合到外管的真空泵,用于在外管和内部管中提供低压 管。

Patent Agency Ranking