High density MIM capacitor structure and fabrication process
    11.
    发明申请
    High density MIM capacitor structure and fabrication process 有权
    高密度MIM电容器结构及制造工艺

    公开(公告)号:US20050121744A1

    公开(公告)日:2005-06-09

    申请号:US10729034

    申请日:2003-12-04

    摘要: A stacked integrated circuit (IC) MIM capacitor structure and method for forming the same the MIM capacitor structure including a first MIM capacitor structure formed in a first IMD layer comprising an first upper and first lower electrode portions; at least a second MIM capacitor structure arranged in stacked relationship in an overlying IMD layer comprising a second upper electrode and second lower electrode to form an MIM capacitor stack; wherein, the first lower electrode is arranged in common electrical signal communication comprising metal filled vias with the second upper electrode and the first upper electrode is arranged in common electrical signal communication with the second lower electrode.

    摘要翻译: 一种用于形成MIM电容器结构的叠层集成电路(IC)MIM电容器结构及方法,包括形成在包括第一上电极部分和第一下电极部分的第一IMD层中的第一MIM电容器结构; 至少第二MIM电容器结构,以层叠的关系布置在包括第二上电极和第二下电极的上覆IMD层中,以形成MIM电容器堆叠; 其中,所述第一下部电极布置成共同的电信号通信,包括金属填充的通孔与所述第二上部电极和所述第一上部电极被布置成与所述第二下部电极共同的电信号通信。

    Method of fabricating a bipolar junction transistor using multiple selectively implanted collector regions
    12.
    发明授权
    Method of fabricating a bipolar junction transistor using multiple selectively implanted collector regions 有权
    使用多个选择性注入的集电极区域制造双极结型晶体管的方法

    公开(公告)号:US06352901B1

    公开(公告)日:2002-03-05

    申请号:US09534164

    申请日:2000-03-24

    申请人: Kuan-Lun Chang

    发明人: Kuan-Lun Chang

    IPC分类号: H01L2120

    CPC分类号: H01L29/66272 H01L29/0821

    摘要: A process for fabricating a bipolar junction transistor, featuring the use of multiple self-aligned collector regions, used to limit the width of the base region of the transistor, has been developed. The self-aligned collector regions are formed via multiple ion implantation procedures, performed through, and self-aligned to, an overlying emitter opening, in an oxide layer. The self-aligned collector regions, completely fill the space in the lighter doped collector region, located between the overlying base region, and the underlying subcollector region.

    摘要翻译: 已经开发了用于制造双极结型晶体管的工艺,其特征在于使用多个自对准的集电极区域来限制晶体管的基极区域的宽度。 经由多个离子注入程序形成自对准的集电极区域,其通过氧化物层中的上层发射极开口进行和自对准。 自对准的集电极区域完全填充位于覆盖的基极区域和下面的子集电极区域之间的较轻掺杂的集电极区域中的空间。

    Semiconductor layout structure for ESD protection circuits
    14.
    发明申请
    Semiconductor layout structure for ESD protection circuits 有权
    ESD保护电路的半导体布局结构

    公开(公告)号:US20060278928A1

    公开(公告)日:2006-12-14

    申请号:US11152440

    申请日:2005-06-14

    IPC分类号: H01L23/62

    CPC分类号: H01L27/0262

    摘要: A semiconductor layout structure for an electrostatic discharge (ESD) protection circuit is disclosed. The semiconductor layout structure includes a first area, in which one or more devices are constructed for functioning as a silicon controlled rectifier, and a second area, in which at least one device is constructed for functioning as a trigger source that provides a triggering current to trigger the silicon controlled rectifier for dissipating ESD charges during an ESD event. The first area and the second area are placed adjacent to one another without having a resistance area physically interposed or electrically connected therebetween, such that the triggering current received by the silicon controlled rectifier is increased during the ESD event.

    摘要翻译: 公开了一种用于静电放电(ESD)保护电路的半导体布局结构。 半导体布局结构包括第一区域,其中构造一个或多个器件用作可控硅整流器,以及第二区域,其中构造至少一个器件用作触发源,该触发源提供触发电流 触发可控硅整流器,以在ESD事件期间耗散ESD电荷。 第一区域和第二区域彼此相邻放置,而不会在其间物理地插入或电连接电阻区域,使得在ESD事件期间由可控硅整流器接收的触发电流增加。

    Method for fabricating a BiCMOS device featuring twin wells and an N type epitaxial layer
    15.
    发明授权
    Method for fabricating a BiCMOS device featuring twin wells and an N type epitaxial layer 有权
    用于制造具有双阱和N型外延层的BiCMOS器件的方法

    公开(公告)号:US06303419B1

    公开(公告)日:2001-10-16

    申请号:US09534165

    申请日:2000-03-24

    IPC分类号: H01L218238

    CPC分类号: H01L21/8249

    摘要: A process for fabricating a BiCMOS device, on a semiconductor substrate, featuring PFET and NFET devices, and an NPN bipolar junction transistor, has been developed. The process features the integration, or the sharing of process steps, used for both the CMOS and bipolar devices, such as the creation of an N type buried layer, used in one region for isolation of PFET devices, and used in a second region, of the semiconductor substrate, as a subcollector region, for the bipolar device. Features of the BiCMOS process include the formation of N well, and P well regions, for CMOS device, as well as the use of an epitaxial silicon layer, to allow optimum bipolar characteristics to be achieved.

    摘要翻译: 已经开发了在具有PFET和NFET器件的半导体衬底以及NPN双极结型晶体管上制造BiCMOS器件的工艺。 该方法具有用于CMOS和双极器件的集成或共享工艺步骤,例如在用于隔离PFET器件的一个区域中使用并用于第二区域中的N型掩埋层的产生, 作为双极性器件的子集电极区域。 BiCMOS工艺的特征包括形成N阱,用于CMOS器件的P阱区,以及使用外延硅层,以实现最佳的双极特性。