Abstract:
Methods of achieving high breakdown voltages in semiconductor devices by suppressing the surface flashover using high dielectric strength insulating encapsulation material are generally described. In one embodiment of the present invention, surface flashover in AlGaN/GaN heterostructure field-effect transistors (HFETs) is suppressed by using high dielectric strength insulating encapsulation material. Surface flashover in as-fabricated III-Nitride based HFETs limits the operating voltages at levels well below the breakdown voltages of GaN.
Abstract:
A method of preparing a UV detector of Al.sub.x Ga.sub.1-x N. Metal organic chemical vapor deposition (MOCVD) is utilized to grow AlN and then Al.sub.x Ga.sub.1-x N on a sapphire substrate. A photodetector structure is fabricated on the AlGaN.
Abstract translation:制备Al x Ga 1-x N的UV检测器的方法。 金属有机化学气相沉积(MOCVD)用于在蓝宝石衬底上生长AlN,然后生长Al x Ga 1-x N。 在AlGaN上制造光电检测器结构。