公开(公告)号：US08207472B2

公开(公告)日：2012-06-26

申请号：US12326694

申请日：2008-12-02

申请人： Mark T. Kosmowski

发明人： Mark T. Kosmowski

IPC分类号： B23K26/38 ,  B23K26/14

CPC分类号： B23K26/16 ,  B23K26/14 ,  B23K26/147

摘要： A method of capturing and removing metallic debris created on a target side of a target metal specimen undergoing laser micromachining entails providing a barrier that encompasses the immediate volume surrounding a laser cutting head output nozzle to contain the ejected debris and extracting the debris through a vacuum outlet. A preferred system implementing this approach to debris management includes a barrier in the form of a flexible fiber brush configured in the shape of a ring and positioned to trap ejected debris within a localized area surrounding a target area where the laser beam is incident on the target metal specimen. The ring brush is made of material that is robust to molten metals. An inert gas directed at a high flow rate along the target surface of the metal specimen carries ejected surface debris trapped in the ring brush toward a vacuum outlet.

摘要翻译： 捕获和去除在经历激光微加工的目标金属样品的目标侧上产生的金属碎屑的方法需要提供一个屏障，该屏障包围围绕激光切割头输出喷嘴的立即体积以容纳喷射的碎片并通过真空出口抽出碎屑 。 实施这种碎屑管理方法的优选系统包括柔性纤维刷形式的屏障，该柔性纤维刷被配置成环的形状并被定位成将喷射的碎屑捕获在激光束入射到目标上的目标区域周围的局部区域内 金属标本。 环形刷由对熔融金属坚固的材料制成。 沿着金属试样的目标表面以高流速引导的惰性气体将被卷绕在环形刷中的被排出的表面碎片带向真空出口。

公开(公告)号：US07889322B2

公开(公告)日：2011-02-15

申请号：US11747118

申请日：2007-05-10

申请人： Mark T. Kosmowski ,  Robert Ferguson ,  Jeremy Willey

发明人： Mark T. Kosmowski ,  Robert Ferguson ,  Jeremy Willey

IPC分类号： G03B27/58

CPC分类号： B23K26/032 ,  B23K26/0853

摘要： A specimen inspection stage implemented with a processing stage coupling mechanism provides a capability to conduct with maximum efficiency post-processing specimen inspections on-board a processing platform. Heavy inspection equipment is mounted on a specimen inspection stage that is separate from a processing stage. In a preferred embodiment, the processing stage moves in response to an applied motive force and performs laser-based processing operations on a specimen. While laser processing is ongoing, the specimen inspection stage remains parked in its home position. When it is time for post-processing inspection, a stage coupling and decoupling mechanism couples together the specimen inspection stage and the processing stage, which transports the specimen inspection stage to and from the specimen position.

摘要翻译： 采用加工台联接机构实施的试样检查阶段，能够最大限度地提高加工后处理样品检查的能力。 重型检验设备安装在与加工台分开的试样检查台上。 在优选实施例中，处理阶段响应于所施加的动力而移动，并对样本进行基于激光的处理操作。 在激光加工正在进行的同时，样品检查阶段仍停留在原位。 在进行后处理检查的时候，阶段耦合和去耦机构将样本检查阶段和处理阶段结合在一起，将样本检查阶段运送到样本位置。

公开(公告)号：US07886449B2

公开(公告)日：2011-02-15

申请号：US12394966

申请日：2009-02-27

申请人： Mark T. Kosmowski

发明人： Mark T. Kosmowski

IPC分类号： G01B11/27 ,  G01B7/02

CPC分类号： B23K26/046 ,  B23K26/035 ,  F16C29/008 ,  F16C29/025 ,  F16C32/0618 ,  G02B7/08 ,  G12B5/00 ,  H01L21/68 ,  H01L21/68785 ,  Y10S33/21

摘要： A laser processing system in which a laser beam propagates along a beam axis and through a lens for incidence on a work surface of a target specimen mounted on a support. The lens forms a focal region of the laser beam. The support is operatively connected to a multiple-axis positioning system that moves the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface. An assembly includes at least one flexure that supports the lens and guides movement of the lens along the beam axis in response to a motive force to adjust the focal region of the laser beam relative to the work surface.

摘要翻译： 一种激光处理系统，其中激光束沿着光束轴线传播并通过透镜入射到安装在支撑件上的目标样品的工作表面上。 透镜形成激光束的焦点区域。 支撑件可操作地连接到多轴定位系统，该多轴定位系统使激光束和目标样本相对于彼此移动，以将激光束定位在工作表面上的选定位置。 组件包括支撑透镜的至少一个挠曲件，并且响应于调节激光束的焦点区域相对于工作表面的动力引导透镜沿着光束轴线的运动。

公开(公告)号：US20090314753A1

公开(公告)日：2009-12-24

申请号：US12326694

申请日：2008-12-02

申请人： Mark T. Kosmowski

发明人： Mark T. Kosmowski

IPC分类号： B23K26/16

CPC分类号： B23K26/16 ,  B23K26/14 ,  B23K26/147

摘要： A method of capturing and removing metallic debris created on a target side of a target metal specimen undergoing laser micromachining entails providing a barrier that encompasses the immediate volume surrounding a laser cutting head output nozzle to contain the ejected debris and extracting the debris through a vacuum outlet. A preferred system implementing this approach to debris management includes a barrier in the form of a flexible fiber brush configured in the shape of a ring and positioned to trap ejected debris within a localized area surrounding a target area where the laser beam is incident on the target metal specimen. The ring brush is made of material that is robust to molten metals. An inert gas directed at a high flow rate along the target surface of the metal specimen carries ejected surface debris trapped in the ring brush toward a vacuum outlet.

摘要翻译： 捕获和去除在经历激光微加工的目标金属样品的目标侧上产生的金属碎屑的方法需要提供一个屏障，该屏障包围围绕激光切割头输出喷嘴的立即体积以容纳喷射的碎片并通过真空出口抽出碎屑 。 实施这种碎屑管理方法的优选系统包括柔性纤维刷形式的屏障，该柔性纤维刷被配置成环的形状并被定位成将喷射的碎屑捕获在激光束入射到目标上的目标区域周围的局部区域内 金属标本。 环形刷由对熔融金属坚固的材料制成。 沿着金属试样的目标表面以高流速引导的惰性气体将被卷绕在环形刷中的被排出的表面碎片带向真空出口。

公开(公告)号：US20080196631A1

公开(公告)日：2008-08-21

申请号：US11676937

申请日：2007-02-20

申请人： Mark T. Kosmowski ,  Kelly Bruland

发明人： Mark T. Kosmowski ,  Kelly Bruland

IPC分类号： A47B9/00 ,  H01L21/00

CPC分类号： H01L21/68785 ,  B23K26/02 ,  B23K26/082 ,  B23K26/083 ,  B23K26/0869 ,  B23K2101/40 ,  H01L21/68

摘要： A split axis stage architecture is implemented as a multiple stage positioning system that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. The substrate is precisely cut (“lapped”) such that its upper and lower stage surface portions are flat and parallel to each other.

摘要翻译： 分裂轴台架构被实现为能够以高速和加速度的振动和热稳定材料输送的多级定位系统。 分裂轴设计使位于分离的平行平面中的两个垂直轴分离舞台运动。 用作花岗岩或其他石板或陶瓷材料或铸铁的形状的尺寸稳定的基材用作下层和上层的基材。 衬底被精确地切割（“研磨”），使得其上部和下部表面部分是平的并且彼此平行。