公开(公告)号：US08461480B2

公开(公告)日：2013-06-11

申请号：US12957063

申请日：2010-11-30

申请人： Mark T. Kosmowski ,  Mehmet E. Alpay

发明人： Mark T. Kosmowski ,  Mehmet E. Alpay

IPC分类号： B23K26/14 ,  B23K26/00

CPC分类号： B23K26/0736 ,  B23K26/082 ,  B23K26/146 ,  B23K26/40 ,  B23K2103/50 ,  C03B33/04 ,  C03B33/093 ,  Y02P40/57

摘要： An orthogonal integrated cleaving apparatus and methods of controlling such an apparatus are taught. The cleaving apparatus includes two cleaving devices mounted at right angles with respect to a mount facing a substrate to be processed. The non-metallic and/or brittle substrate is separated along two orthogonal axes without rotating or moving the substrate to a second machine by moving the mount or the substrate along the axes. Each cleaving device laser sequentially heats a surface of the substrate along a respective cutting axis, cools the cut area and then laser re-heats the cut area to form a clean break.

摘要翻译： 教导了一种正交集成分离装置和控制这种装置的方法。 切割装置包括相对于面向待处理基板的安装件成直角安装的两个切割装置。 通过沿着轴移动安装件或基板，非金属和/或脆性基板沿着两个正交轴线分离，而不转动或移动基板到第二机器。 每个切割装置激光器沿相应的切割轴顺序地加热基板的表面，冷却切割区域，然后激光重新加热切割区域以形成干净的断裂。

公开(公告)号：US20100243617A1

公开(公告)日：2010-09-30

申请号：US12412130

申请日：2009-03-26

申请人： Mark T. Kosmowski

发明人： Mark T. Kosmowski

IPC分类号： B23K26/38 ,  B23B35/00 ,  B23B39/06

CPC分类号： H05K3/0047 ,  H05K3/0008 ,  Y10T408/03 ,  Y10T408/175

摘要： A via drilling system is preferably constructed to process one target at a time. The via drilling system preferably provides a relatively small footprint for the via drilling system, relatively small moment arms between via drilling system components, a relatively short stiffness loop, and a relatively fast processing time for a target. Multiple tools are preferably provided to perform multiple operations substantially simultaneously on the target.

摘要翻译： 通孔钻孔系统优选地构造成一次处理一个目标物。 通孔钻孔系统优选地为通孔钻孔系统提供相对较小的占地面积，通孔钻孔系统部件之间的相对小的力矩臂，相对较短的刚度回路以及目标的相对较快的处理时间。 优选地提供多个工具以在目标上基本上同时执行多个操作。

公开(公告)号：US07760331B2

公开(公告)日：2010-07-20

申请号：US11676937

申请日：2007-02-20

申请人： Mark T. Kosmowski ,  Kelly Bruland

发明人： Mark T. Kosmowski ,  Kelly Bruland

IPC分类号： G03B27/58

CPC分类号： H01L21/68785 ,  B23K26/02 ,  B23K26/082 ,  B23K26/083 ,  B23K26/0869 ,  B23K2101/40 ,  H01L21/68

摘要： A split axis stage architecture is implemented as a multiple stage positioning system that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. The substrate is precisely cut (“lapped”) such that its upper and lower stage surface portions are flat and parallel to each other.

摘要翻译： 分裂轴台架构被实现为能够以高速和加速度的振动和热稳定材料输送的多级定位系统。 分裂轴设计使位于分离的平行平面中的两个垂直轴分离舞台运动。 用作花岗岩或其他石板或陶瓷材料或铸铁的形状的尺寸稳定的基材用作下层和上层的基材。 衬底被精确地切割（“研磨”），使得其上部和下部表面部分是平的并且彼此平行。

公开(公告)号：US20080198485A1

公开(公告)日：2008-08-21

申请号：US11676945

申请日：2007-02-20

申请人： Mark T. Kosmowski

发明人： Mark T. Kosmowski

IPC分类号： G02B7/02

CPC分类号： H01L21/68 ,  B23K26/0876 ,  B23K26/10 ,  F16C29/008 ,  F16C29/025 ,  F16C32/0603 ,  F16C32/0618 ,  H01L21/68785 ,  Y10S33/21

摘要： A rigid support structure allows for faster and more accurate positioning of axially adjustable optical components in a laser processing system. Vibrational and thermal stability is improved when an optics assembly is housed in a rigid air bearing sleeve that is mounted to a support structure above a specimen stage.

摘要翻译： 刚性支撑结构允许在激光加工系统中更快且更精确地定位轴向可调光学部件。 当光学组件容纳在安装到样品台上方的支撑结构的刚性空气轴承套筒中时，振动和热稳定性得到改善。

公开(公告)号：US20080198373A1

公开(公告)日：2008-08-21

申请号：US11747118

申请日：2007-05-10

申请人： Mark T. Kosmowski ,  Robert Ferguson ,  Jeremy Willey

发明人： Mark T. Kosmowski ,  Robert Ferguson ,  Jeremy Willey

IPC分类号： G01N21/01

CPC分类号： B23K26/032 ,  B23K26/0853

摘要： A specimen inspection stage implemented with a processing stage coupling mechanism provides a capability to conduct with maximum efficiency post-processing specimen inspections on-board a processing platform. Heavy inspection equipment is mounted on a specimen inspection stage that is separate from a processing stage. In a preferred embodiment, the processing stage moves in response to an applied motive force and performs laser-based processing operations on a specimen. While laser processing is ongoing, the specimen inspection stage remains parked in its home position. When it is time for post-processing inspection, a stage coupling and decoupling mechanism couples together the specimen inspection stage and the processing stage, which transports the specimen inspection stage to and from the specimen position.

摘要翻译： 采用加工台联接机构实施的试样检查阶段，能够最大限度地提高加工后处理样品检查的能力。 重型检验设备安装在与加工台分开的试样检查台上。 在优选实施例中，处理阶段响应于所施加的动力而移动，并对样本进行基于激光的处理操作。 在激光加工正在进行的同时，样品检查阶段仍停留在原位。 在进行后处理检查的时候，阶段耦合和去耦机构将样本检查阶段和处理阶段结合在一起，将样本检查阶段运送到样本位置。

公开(公告)号：US08735774B2

公开(公告)日：2014-05-27

申请号：US12510630

申请日：2009-07-28

申请人： Mark T. Kosmowski

发明人： Mark T. Kosmowski

IPC分类号： B23K26/08

CPC分类号： B23K26/0853 ,  B23K26/351 ,  B23K26/36 ,  B23K26/361 ,  B23K26/40 ,  B23K26/702 ,  B23K2101/40 ,  B23K2103/50

摘要： A laser beam propagates along a beam axis for incidence on a work surface mounted on a support. The support operatively connects to a positioning system moving at least one of the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface. At least one force reaction compensation motor is located in a common force plane with, and as close as possible to, a corresponding stage motor. Any moment arm between the compensation motor and the corresponding stage motor is reduced or eliminated, allowing the compensation motor to directly couple and react to stage forces with virtually zero moment arm. Six degrees of freedom can be controlled with only four motors, since each compensation motor is directly coupled and aligned to a corresponding stage motor.

摘要翻译： 激光束沿着光束轴线传播以入射到安装在支撑件上的工作表面上。 支撑件可操作地连接到相对于彼此移动至少一个激光束和目标样本的定位系统，以将激光束定位在工作表面上的选定位置。 至少一个力反作用补偿电动机位于与相应级电动机相同且尽可能接近的公共力平面中。 补偿电机和相应级电动机之间的任何力矩臂被减少或消除，允许补偿电机直接耦合并对几乎零力臂的分段作用力作出反应。 只有四台电机可以控制六个自由度，因为每个补偿电机直接耦合并对准到相应的电动机。

公开(公告)号：US08461482B2

公开(公告)日：2013-06-11

申请号：US12483544

申请日：2009-06-12

申请人： Mark T. Kosmowski ,  Mehmet E. Alpay

发明人： Mark T. Kosmowski ,  Mehmet E. Alpay

IPC分类号： B25B1/22 ,  H05H7/00 ,  B23K26/38

CPC分类号： B23K26/10 ,  B23K26/60 ,  B23K26/702 ,  B23K2103/10 ,  Y10T29/49863

摘要： A process and apparatus neutralizes a warp effect resulting from a build up of micro strains caused by machining a part with a long wavelength laser. The part to be machined is pre-stressed in an opposite direction of a warp stress due to machining using a fixture for holding the part without yielding any other features in the part. The part is machined while held in the pre-stressed position in the fixture.

摘要翻译： 工艺和设备中和由通过用长波长激光器加工零件而引起的微变形的累积导致的翘曲效应。 要加工的部件在与经向应力相反的方向上预应力，这是由于使用固定件进行机械加工而不产生部件中的其它特征。 该部件在夹持在夹具中的预应力位置的同时被加工。

公开(公告)号：US20120132628A1

公开(公告)日：2012-05-31

申请号：US12957063

申请日：2010-11-30

申请人： Mark T. Kosmowski ,  Mehmet E. Alpay

发明人： Mark T. Kosmowski ,  Mehmet E. Alpay

IPC分类号： B23K26/14

CPC分类号： B23K26/0736 ,  B23K26/082 ,  B23K26/146 ,  B23K26/40 ,  B23K2103/50 ,  C03B33/04 ,  C03B33/093 ,  Y02P40/57

摘要： An orthogonal integrated cleaving apparatus and methods of controlling such an apparatus are taught. The cleaving apparatus includes two cleaving devices mounted at right angles with respect to a mount facing a substrate to be processed. The non-metallic and/or brittle substrate is separated along two orthogonal axes without rotating or moving the substrate to a second machine by moving the mount or the substrate along the axes. Each cleaving device laser sequentially heats a surface of the substrate along a respective cutting axis, cools the cut area and then laser re-heats the cut area to form a clean break.

摘要翻译： 教导了一种正交集成分离装置和控制这种装置的方法。 切割装置包括相对于面向待处理基板的安装件成直角安装的两个切割装置。 通过沿着轴移动安装件或基板，非金属和/或脆性基板沿着两个正交轴线分离，而不转动或移动基板到第二机器。 每个切割装置激光器沿相应的切割轴顺序地加热基板的表面，冷却切割区域，然后激光重新加热切割区域以形成干净的断裂。

公开(公告)号：US07603785B2

公开(公告)日：2009-10-20

申请号：US11676945

申请日：2007-02-20

申请人： Mark T. Kosmowski

发明人： Mark T. Kosmowski

IPC分类号： G01B11/27

CPC分类号： H01L21/68 ,  B23K26/0876 ,  B23K26/10 ,  F16C29/008 ,  F16C29/025 ,  F16C32/0603 ,  F16C32/0618 ,  H01L21/68785 ,  Y10S33/21

摘要： A rigid support structure allows for faster and more accurate positioning of axially adjustable optical components in a laser processing system. Vibrational and thermal stability is improved when an optics assembly is housed in a rigid air bearing sleeve that is mounted to a support structure above a specimen stage.

摘要翻译： 刚性支撑结构允许在激光加工系统中更快且更精确地定位轴向可调光学部件。 当光学组件容纳在安装到样品台上方的支撑结构的刚性空气轴承套筒中时，振动和热稳定性得到改善。

公开(公告)号：US20090314754A1

公开(公告)日：2009-12-24

申请号：US12483544

申请日：2009-06-12

申请人： Mark T. Kosmowski ,  Mehmet E. Alpay

发明人： Mark T. Kosmowski ,  Mehmet E. Alpay

IPC分类号： B23K26/38

CPC分类号： B23K26/10 ,  B23K26/60 ,  B23K26/702 ,  B23K2103/10 ,  Y10T29/49863

摘要： A process and apparatus neutralizes a warp effect resulting from a build up of micro strains caused by machining a part with a long wavelength laser. The part to be machined is pre-stressed in an opposite direction of a warp stress due to machining using a fixture for holding the part without yielding any other features in the part. The part is machined while held in the pre-stressed position in the fixture.

摘要翻译： 工艺和设备中和由通过用长波长激光器加工零件而引起的微变形的累积导致的翘曲效应。 要加工的部件在与经向应力相反的方向上预应力，这是由于使用固定件进行机械加工而不产生部件中的其它特征。 该部件在夹持在夹具中的预应力位置的同时被加工。