DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
    11.
    发明申请
    DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD 有权
    缺陷检查装置和缺陷检查方法

    公开(公告)号:US20090105967A1

    公开(公告)日:2009-04-23

    申请号:US12294076

    申请日:2006-03-24

    Abstract: An object of the present invention is to quantitatively evaluate a distribution of defects which are generated within an inspection material. In order to achieve this object, the present invention provides a defect inspection apparatus comprising: an ultrasonic wave probe; an ultrasonic wave transmitting and receiving device that irradiates ultrasonic waves via the ultrasonic wave probe onto a surface of an inspection material on which a predetermined propagation medium has been provided, and that also receives as noise signals ultrasonic waves that have been scattered by defects present in the interior of the inspection material; a frequency spectrum calculation device that performs time division on the noise signals so as to divide them into time widths that correspond to positions in the depth direction of the inspection material, and calculates a frequency spectrum for each one of the time-divided noise signals; and a defect distribution detection device that, based on the frequency spectrums, calculates values showing a level of defect progression corresponding to a position in the thickness direction of the inspection material.

    Abstract translation: 本发明的目的是定量评估在检查材料内产生的缺陷的分布。 为了达到上述目的,本发明提供一种缺陷检查装置,包括:超声波探头; 超声波发送接收装置,其通过超声波探测器将超声波照射到已经设置有预定传播介质的检查材料的表面上,并且还接收作为噪声信号的超声波, 检验材料的内部; 频谱计算装置,对噪声信号进行时分,以将其分割成与检查材料的深度方向上的位置对应的时间宽度,并计算每个分时噪声信号的频谱; 以及缺陷分布检测装置,其基于所述频谱,计算显示与所述检查材料的厚度方向上的位置相对应的缺陷进展水平的值。

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