公开(公告)号：US06771001B2

公开(公告)日：2004-08-03

申请号：US09810825

申请日：2001-03-16

Applicant: Minyao Mao ,  Donald M. Friedrich ,  Markus Duelli ,  Bryant Hichwa

Inventor： Minyao Mao ,  Donald M. Friedrich ,  Markus Duelli ,  Bryant Hichwa

IPC: H02N100

CPC classification number: H02N1/008

Abstract: An electrostatic comb drive suitable for micro-electro-mechanical systems (“MEMS”) application uses shaped fingers to achieve bi-directional actuation from a unipolar actuation pulse. The finger shape also provides auto-braking of the movable member of the drive using a simple actuating pulse. In a further embodiment, an end stop inhibits overshoot and a back spring pushes the movable portion of the device back toward an operating position. In yet a further embodiment, a Vernier scale is provided on the movable portion of the drive relative to the fixed portion of the drive to indicate relative shift of these portions after the device is fabricated.

Abstract translation: 适用于微电子机械系统（“MEMS”）应用的静电梳驱动使用成形指状物从单极致动脉冲实现双向致动。 手指形状还使用简单的致动脉冲来提供驱动器的可移动部件的自动制动。 在另一个实施例中，端部止挡件阻止过冲，并且后弹簧将装置的可移动部分推回到操作位置。 在又一个实施例中，在驱动器的可移动部分上相对于驱动器的固定部分设置游标，以指示在制造装置之后这些部分的相对移动。

公开(公告)号：US08616057B1

公开(公告)日：2013-12-31

申请号：US12692609

申请日：2010-01-23

Applicant: Minyao Mao

Inventor： Minyao Mao

IPC: G01C19/56

CPC classification number: G01C19/574

Abstract: An angular rate sensor having two generally planar proof masses, a sense axis in the plane of the masses, and an input axis perpendicular to the sense axis. The masses are suspended from a driving frame, which is mounted for torsional movement about the input axis in drive-mode. And the masses are constrained for anti-phase movement along the sense axis in sense-mode in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the anti-phase movement of the masses along the sense axis for monitoring rate of rotation.

Abstract translation: 角速率传感器具有两个大体上平面的质量，质心平面中的检测轴和垂直于检测轴的输入轴。 质量悬挂在驱动框架上，驱动框架被安装成以驱动模式绕输入轴线进行扭转运动。 并且质量受制于响应于围绕输入轴的质量旋转产生的科里奥利力的感测模式中的感测轴的反相运动，传感器响应于沿着感测轴的质量的反相运动 用于监测旋转速度。

公开(公告)号：US08453504B1

公开(公告)日：2013-06-04

申请号：US12692606

申请日：2010-01-23

Applicant: Minyao Mao

Inventor： Minyao Mao

IPC: G01C19/00 ,  G01P3/44

CPC classification number: G01C19/56 ,  G01C19/574

Abstract: An angular rate sensor having two generally planar proof masses, a drive axis in the plane of the masses, and an input axis perpendicular to the drive axis. The masses are suspended from a sensing frame and constrained for anti-phase movement along the drive axis in drive-mode. The sensing frame is mounted for torsional movement in sense-mode about the input axis in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement of the sensing frame and the masses about the input axis for monitoring rate of rotation.

Abstract translation: 角速率传感器具有两个大体上平面的质量，在质量平面内的驱动轴和垂直于驱动轴的输入轴。 质量悬浮在感测框架上，并被限制为在驱动模式下沿着驱动轴的反相运动。 响应于通过围绕输入轴的质量旋转产生的科里奥利力，传感框架被安装成用于围绕输入轴的感测模式的扭转运动，传感器响应感测框架和质量围绕输入轴的扭转运动 用于监测旋转速度。

公开(公告)号：US20090183570A1

公开(公告)日：2009-07-23

申请号：US12016822

申请日：2008-01-18

Applicant: Cenk Acar ,  Minyao Mao

Inventor： Cenk Acar ,  Minyao Mao

IPC: G01P15/125

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0831

Abstract: Micromachined accelerometer having one or more proof masses (16, 36, 37, 71, 72) mounted on one or more decoupling frames (17, 38, 39) or on a shuttle (73) such that the proof mass(es) can move along a first (y) axis in response to acceleration along the first axis while being constrained against movement along a second (x) axis and for torsional movement about a third (z) axis perpendicular to the first and second axes in response to acceleration along the second axis. Electrodes (26, 53, 54, 78, 79) that move with the proof mass(es) are interleaved with stationary electrodes (27, 56, 57, 81, 82) to form capacitors (A-D) that change in capacitance both in response to movement of the proof mass(es) along the first axis and in response to torsional movement of the proof mass(es) about the third axis, and circuitry (31-34) connected to the electrodes for providing output signals corresponding to acceleration along the first and second axes. The capacitances of two capacitors on each side of the second axis change in the same direction in response to acceleration along the first axis and in opposite directions in response to acceleration along the second axis. Signals from the capacitors that change capacitance in opposite directions both in response to acceleration along the first axis and in response to acceleration along the second axis are differentially combined to provide first and second difference signals, and the difference signals are additively and differentially combined to provide output signals corresponding to acceleration along the first and second axes.

Abstract translation: 具有安装在一个或多个解耦框架（17,38,39）上或穿梭器（73）上的一个或多个检验质量块（16,36,37,71,72）的微机械加速度计，使得证明物质可以移动 响应于沿着第一轴线的加速度沿着第一（y）轴线沿着第一轴线（y），同时被限制为沿着第二（x）轴线的运动，并且响应于沿着加速沿着垂直于第一和第二轴线的第三（z）轴线的扭转运动 第二轴。 与检测质量块一起移动的电极（26,53,54,78,79）与固定电极（27,56,57,81,82）交错，以形成电容器（AD），电容器在响应时变化 沿着第一轴线移动检测质量块并响应于围绕第三轴线的检测质量块的扭转运动，以及连接到电极的电路（31-34），用于提供对应于加速度的输出信号 第一和第二轴。 响应于沿着第二轴的加速度，响应于沿着第一轴的加速度和相反方向响应于沿着第二轴的加速度，第二轴的每一侧的两个电容器的电容在相同的方向上变化。 响应于沿着第一轴的加速度和响应于沿着第二轴的加速度而在相反方向改变电容的电容器的信号被差分地组合以提供第一和第二差分信号，并且差分信号被相加和差分地组合以提供 对应于沿着第一和第二轴的加速度的输出信号。

公开(公告)号：US07228738B2

公开(公告)日：2007-06-12

申请号：US11146294

申请日：2005-06-06

Applicant: Cenk Acar ,  Minyao Mao ,  Lynn Edward Costlow

Inventor： Cenk Acar ,  Minyao Mao ,  Lynn Edward Costlow

IPC: G01P9/04

CPC classification number: G01C19/5719 ,  G01C19/5712

Abstract: Rate sensor having a plurality of generally planar masses, a drive axis in the plane of each of the masses, an input axis perpendicular to the drive axes, and sense axes perpendicular to the drive axes and the input axis. The masses are driven to oscillate about the drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.

Abstract translation: 速率传感器具有多个大致平坦的质量，每个质量的平面中的驱动轴，垂直于驱动轴的输入轴以及垂直于驱动轴和输入轴的感测轴。 质量被驱动绕驱动轴摆动，并被安装成响应于通过围绕输入轴的质量的旋转而产生的科里奥利力而围绕传感轴的扭转运动，传感器响应于围绕感测轴的扭转运动以用于监测速率 的旋转。

公开(公告)号：US08739628B2

公开(公告)日：2014-06-03

申请号：US13165436

申请日：2011-06-21

Applicant: Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

Inventor： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

IPC: G01P15/08

CPC classification number: G01P15/125 ,  G01P15/09 ,  G01P15/123 ,  G01P2015/0842

Abstract: An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.

Abstract translation: 惯性传感器包括板状基材层，质​​量体，支撑框架，从支撑框架沿质量体的中心方向延伸的限位挡块，以及检测位移部的位移的检测单元。 惯性传感器采用极限挡块限制质量体的向下位移，防止质量体的支撑部分损坏。

公开(公告)号：US08621927B2

公开(公告)日：2014-01-07

申请号：US13850309

申请日：2013-03-26

Applicant: Minyao Mao

Inventor： Minyao Mao

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/574

Abstract: An angular rate sensor having two generally planar proof masses disposed along a drive axis in the plane of the masses, a sense axis perpendicular to the drive axis, and an input axis perpendicular to the plane of the masses. The masses are suspended from a pair of driving frames, which are mounted and constrained for anti-phase linear movement along the drive axis in drive-mode. Detectors responsive to the anti-phase movement of the masses in directions parallel to the sense axis in response to Coriolis forces produced by rotation of the masses about the input axis for monitoring rate of rotation about the input axis.

Abstract translation: 一种角速率传感器，具有沿质量平面中的驱动轴设置的两个大致平面的质量块，垂直于驱动轴的感测轴和垂直于质量平面的输入轴。 质量悬挂在一对驱动框架中，驱动框架被安装并限制在驱动模式下沿着驱动轴的反相线性运动。 响应于质量围绕输入轴旋转产生的科里奥利力，响应于物体在与感测轴平行的方向上的反相运动的检测器，用于监测围绕输入轴的旋转速率。

公开(公告)号：US08459111B1

公开(公告)日：2013-06-11

申请号：US12692607

申请日：2010-01-23

Applicant: Minyao Mao

Inventor： Minyao Mao

IPC: G01C19/00 ,  G01P3/44

CPC classification number: G01C19/574

Abstract: An angular rate sensor having two generally planar proof masses, a sense axis in the plane of the masses, and an input axis perpendicular to the sense axis. The masses are suspended from a driving frame, which is mounted for torsional movement about the input axis in drive-mode. And the masses are constrained for anti-phase movement along the sense axis in sense-mode in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the anti-phase movement of the masses along the sense axis for monitoring rate of rotation.

公开(公告)号：US20130081465A1

公开(公告)日：2013-04-04

申请号：US13591335

申请日：2012-08-22

Applicant: Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Won Kyu Jeung

Inventor： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Won Kyu Jeung

IPC: G01C19/56

CPC classification number: G01C19/574

Abstract: Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies supporting the driving masses so as to freely move in a state in which the driving masses float; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

Abstract translation: 这里公开了惯性传感器。 惯性传感器包括：多个驱动质量块; 支撑驱动质量的支撑体，以便在驱动质量浮动的状态下自由移动; 连接所述多个驱动块并将所述多个驱动块与所述支撑体连接的连接桥; 以及电极图案部，其包括驱动电极，同时驱动驱动质量，感测电极检测每个驱动质量块的轴向科里奥利力。

公开(公告)号：US07240552B2

公开(公告)日：2007-07-10

申请号：US11146310

申请日：2005-06-06

Applicant: Cenk Acar ,  Minyao Mao

Inventor： Cenk Acar ,  Minyao Mao

IPC: G01P9/04

CPC classification number: G01C19/5712

Abstract: Rate sensor having a plurality of generally planar masses, a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, and sense axes perpendicular to the drive axis and the input axis. The masses are driven to oscillate about drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the messes about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.

Abstract translation: 速率传感器具有多个大致平坦的质量，质量平面中的驱动轴，垂直于驱动轴的输入轴，以及垂直于驱动轴和输入轴的感测轴。 质量被驱动以围绕驱动轴振荡，并且被安装成响应于通过围绕输入轴线的混乱旋转产生的科里奥利力而围绕感测轴的扭转运动，响应于围绕感测轴线的扭转运动的传感器用于监测 回转。