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11.发明授权Method of manufacturing a nano structure by etching, using a substrate containing silicon 有权通过蚀刻制造纳米结构体的方法，使用含硅的衬底公开(公告)号：US08084365B2
公开(公告)日：2011-12-27
申请号：US12880188
申请日：2010-09-13
申请人： Taiko Motoi , Kenji Tamamori , Shinan Wang , Masahiko Okunuki , Haruhito Ono , Toshiaki Aiba , Nobuki Yoshimatsu
发明人： Taiko Motoi , Kenji Tamamori , Shinan Wang , Masahiko Okunuki , Haruhito Ono , Toshiaki Aiba , Nobuki Yoshimatsu
IPC分类号： H01L21/308
CPC分类号： B82Y10/00 , H01L21/3083 , H01L21/31144
摘要： A method of manufacturing a nano structure by etching, using a substrate containing Si. A focused Ga ion or In ion beam is irradiated on the surface of the substrate containing Si. The Ga ions or the In ions are injected while sputtering away the surface of the substrate so that a layer containing Ga or In is formed on the surface of the substrate. Dry etching by a gas containing fluorine (F) is performed with the layer containing the Ga or the In formed on the surface of the substrate taken as an etching mask, and the nano structure is formed having a pattern of at least 2 μm tin in depth according to a predetermined line width.
摘要翻译： 使用含有Si的基板通过蚀刻制造纳米结构体的方法。 将聚焦的Ga离子或In离子束照射在含有Si的衬底的表面上。 注入Ga离子或In离子，同时溅射衬底的表面，使得在衬底的表面上形成含有Ga或In的层。 使用含有氟（F）的气体进行干蚀刻，其中包含形成在基板表面上的Ga或In的层作为蚀刻掩模，并且纳米结构形成为具有至少2μm锡的图案 根据预定线宽度的深度。
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公开(公告)号：US07690047B2
公开(公告)日：2010-03-30
申请号：US11627842
申请日：2007-01-26
申请人： Susumu Yasuda , Junichi Seki , Takao Kusaka , Nobuki Yoshimatsu
发明人： Susumu Yasuda , Junichi Seki , Takao Kusaka , Nobuki Yoshimatsu
IPC分类号： G01N23/00
CPC分类号： G01Q70/04
摘要： A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.
摘要翻译： 一种扫描探针装置，用于获取样本的信息，在样本中记录信息，或者在样本与装置之间相对移动来处理样本，该装置由探针构成; 以及扫描台，其包括用于移动用于保持样品的样品保持台的驱动元件和可移除在样品保持台移动期间产生的惯性力的方向的可移动部分。 扫描台还包括用于驱动扫描台的驱动电路，并且可拆卸地或可更换地安装到装置的主组件上。
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13.发明授权公开(公告)号：US07690046B2
公开(公告)日：2010-03-30
申请号：US11747581
申请日：2007-05-11
申请人： Susumu Yasuda , Junichi Seki , Takao Kusaka , Nobuki Yoshimatsu
发明人： Susumu Yasuda , Junichi Seki , Takao Kusaka , Nobuki Yoshimatsu
摘要： A drive stage for a scanning probe apparatus includes a supporting member, a plurality of movable portions fixed to the supporting member, and a plurality of drive elements configured and positioned to drive the plurality of movable portions. The drive stage is driven in a direction in which inertial forces of the plurality of movable portions are mutually canceled during drive of the plurality of drive elements. The drive stage further includes an inertial force difference detection member configured and positioned to detect a difference in inertial force between the plurality of movable portions, and an inertial force adjustment member configured and positioned to effect inertial force adjustment so that the difference in inertial force between the plurality of movable portions is decreased on the basis of a detection output of the inertial force detection member.
摘要翻译： 用于扫描探针装置的驱动台包括支撑构件，固定到支撑构件的多个可移动部分，以及构造和定位以驱动多个可移动部分的多个驱动元件。 在多个驱动元件的驱动期间，驱动级被驱动在多个可动部的惯性力相互抵消的方向上。 驱动平台还包括惯性力差检测构件，其构造和定位成检测多个可移动部分之间的惯性力差，以及惯性力调节构件，其构造和定位成实现惯性力调节，使得惯性力差 多个可动部根据惯性力检测部件的检测输出而减少。
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公开(公告)号：US07631547B2
公开(公告)日：2009-12-15
申请号：US11612111
申请日：2006-12-18
申请人： Nobuki Yoshimatsu , Takao Kusaka , Susumu Yasuda , Junichi Seki
发明人： Nobuki Yoshimatsu , Takao Kusaka , Susumu Yasuda , Junichi Seki
摘要： A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between the sample and the apparatus includes a sample stage for holding the sample, and a drive stage with a probe, a cantilever supporting the probe, a cantilever holding member for holding the cantilever, and a drive element for driving the probe in three directions perpendicular to each other. In addition, a movable portion surrounds the drive element and is positioned outside of the drive element, with the movable portion movable in a direction in which an inertial force generated during movement of the probe is canceled. The drive stage includes an optical path, through which light passes, provided inside of the drive stage.
摘要翻译： 用于获取样品信息或在样品与设备之间相对移动的样品处理的扫描探针装置包括用于保持样品的样品台和具有探针的驱动台，支撑探针的悬臂，悬臂保持构件 用于保持悬臂，以及用于在垂直于彼此的三个方向上驱动探针的驱动元件。 此外，可动部分围绕驱动元件并且位于驱动元件的外侧，其中可移动部分可以在探测器移动期间产生的惯性力被消除的方向上移动。 驱动级包括设置在驱动级内部的光通过的光路。
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公开(公告)号：US20070187594A1
公开(公告)日：2007-08-16
申请号：US11627845
申请日：2007-01-26
申请人： Takao Kusaka , Nobuki Yoshimatsu , Susumu Yasuda , Junichi Seki
发明人： Takao Kusaka , Nobuki Yoshimatsu , Susumu Yasuda , Junichi Seki
摘要： A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.
摘要翻译： 一种扫描探针装置，用于获取样本的信息，在样本中记录信息，或者在样本与装置之间相对移动来处理样本，该装置由探针构成; 以及扫描台，其包括用于移动用于保持样品的样品保持台的驱动元件和可移除在样品保持台移动期间产生的惯性力的方向的可移动部分。 扫描阶段还包括用于存储扫描台的特征信息的存储器，并且可拆卸地或可替换地安装到装置的主组件。
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公开(公告)号：US20070187593A1
公开(公告)日：2007-08-16
申请号：US11627842
申请日：2007-01-26
申请人： Susumu Yasuda , Junichi Seki , Takao Kusaka , Nobuki Yoshimatsu
发明人： Susumu Yasuda , Junichi Seki , Takao Kusaka , Nobuki Yoshimatsu
IPC分类号： G01N23/00
CPC分类号： G01Q70/04
摘要： A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.
摘要翻译： 一种扫描探针装置，用于获取样本的信息，在样本中记录信息，或者在样本与装置之间相对移动来处理样本，该装置由探针构成; 以及扫描台，其包括用于移动用于保持样品的样品保持台的驱动元件和可移除在样品保持台移动期间产生的惯性力的方向的可移动部分。 扫描台还包括用于驱动扫描台的驱动电路，并且可拆卸地或可更换地安装到装置的主组件上。
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