公开(公告)号：US20110027998A1

公开(公告)日：2011-02-03

申请号：US12880188

申请日：2010-09-13

申请人： Taiko Motoi ,  Kenji Tamamori ,  Shinan Wang ,  Masahiko Okunuki ,  Haruhito Ono ,  Toshiaki Aiba ,  Nobuki Yoshimatsu

发明人： Taiko Motoi ,  Kenji Tamamori ,  Shinan Wang ,  Masahiko Okunuki ,  Haruhito Ono ,  Toshiaki Aiba ,  Nobuki Yoshimatsu

IPC分类号： H01L21/308

CPC分类号： B82Y10/00 ,  H01L21/3083 ,  H01L21/31144

摘要： A method of manufacturing a nano structure by etching, using a substrate containing Si. A focused Ga ion or In ion beam is irradiated on the surface of the substrate containing Si. The Ga ions or the In ions are injected while sputtering away the surface of the substrate so that a layer containing Ga or In is formed on the surface of the substrate. Dry etching by a gas containing fluorine (F) is performed with the layer containing the Ga or the In formed on the surface of the substrate taken as an etching mask, and the nano structure is formed having a pattern of at least 2 μm tin in depth according to a predetermined line width.

摘要翻译： 使用含有Si的基板通过蚀刻制造纳米结构体的方法。 将聚焦的Ga离子或In离子束照射在含有Si的衬底的表面上。 注入Ga离子或In离子，同时溅射衬底的表面，使得在衬底的表面上形成含有Ga或In的层。 使用含有氟（F）的气体进行干蚀刻，其中包含形成在基板表面上的Ga或In的层作为蚀刻掩模，并且纳米结构形成为具有至少2μm锡的图案 根据预定线宽度的深度。

公开(公告)号：US20090230320A1

公开(公告)日：2009-09-17

申请号：US12474364

申请日：2009-05-29

申请人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

发明人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

IPC分类号： G21K5/10 ,  G01N13/10

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851

摘要： In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

摘要翻译： 在替代样品保持台或探针的同时能够始终有效地抵消惯性力以抑制振动的扫描探针装置中，用于样品或探针的载物台包括用于移动样品保持台并可移动的驱动元件 可在样品保持台移动期间产生的惯性力的方向移动的部分。 台架构造为使得驱动元件，可移动部分和样品保持台或探针可整体地可拆卸地安装在扫描探针装置的主组件上。

公开(公告)号：US07569817B2

公开(公告)日：2009-08-04

申请号：US11612104

申请日：2006-12-18

申请人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

发明人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

IPC分类号： H01J37/20 ,  G12B21/24 ,  G01N13/10

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851

摘要： In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

摘要翻译： 在替代样品保持台或探针的同时能够始终有效地抵消惯性力以抑制振动的扫描探针装置中，用于样品或探针的载物台包括用于移动样品保持台并可移动的驱动元件 可在样品保持台移动期间产生的惯性力的方向移动的部分。 台架构造为使得驱动元件，可移动部分和样品保持台或探针可整体地可拆卸地安装在扫描探针装置的主组件上。

公开(公告)号：US20070158559A1

公开(公告)日：2007-07-12

申请号：US11612104

申请日：2006-12-18

申请人： Takao KUSAKA ,  Nobuki YOSHIMATSU ,  Susumu YASUDA ,  Junichi Seki

发明人： Takao KUSAKA ,  Nobuki YOSHIMATSU ,  Susumu YASUDA ,  Junichi Seki

IPC分类号： G21K7/00

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851

摘要： In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

摘要翻译： 在替代样品保持台或探针的同时能够始终有效地抵消惯性力以抑制振动的扫描探针装置中，用于样品或探针的载物台包括用于移动样品保持台并可移动的驱动元件 可在样品保持台移动期间产生的惯性力的方向移动的部分。 台架构造为使得驱动元件，可移动部分和样品保持台或探针可整体地可拆卸地安装在扫描探针装置的主组件上。

公开(公告)号：US07765606B2

公开(公告)日：2010-07-27

申请号：US11627845

申请日：2007-01-26

申请人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

发明人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

IPC分类号： G01N23/00

CPC分类号： G01Q70/04 ,  G01Q10/04

摘要： A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

摘要翻译： 一种扫描探针装置，用于获取样本的信息，在样本中记录信息，或者在样本与装置之间相对移动来处理样本，该装置由探针构成; 以及扫描台，其包括用于移动用于保持样品的样品保持台的驱动元件和可移除在样品保持台移动期间产生的惯性力的方向的可移动部分。 扫描阶段还包括用于存储扫描台的特征信息的存储器，并且可拆卸地或可替换地安装到装置的主组件。

公开(公告)号：US20090315153A1

公开(公告)日：2009-12-24

申请号：US12109701

申请日：2008-04-25

申请人： Taiko Motoi ,  Kenji Tamamori ,  Shinan Wang ,  Masahiko Okunuki ,  Haruhito Ono ,  Toshiaki Aiba ,  Nobuki Yoshimatsu

发明人： Taiko Motoi ,  Kenji Tamamori ,  Shinan Wang ,  Masahiko Okunuki ,  Haruhito Ono ,  Toshiaki Aiba ,  Nobuki Yoshimatsu

IPC分类号： H01L29/06 ,  H01L21/302

CPC分类号： B82Y10/00 ,  H01L21/3083 ,  H01L21/31144

摘要： To provide a method of manufacturing a nano structure having a pattern of 2 μm or more in depth formed on the surface of a substrate containing Si and a nano structure having a pattern of a high aspect and nano order. A nano structure having a pattern of 2 μm or more in depth formed on the surface of a substrate containing Si, wherein the nano structure is configured to contain Ga or In on the surface of the pattern, and has the maximum value of the concentration of the Ga or the In positioned within 50 nm of the surface of the pattern in the depth direction of the substrate. Further, its manufacturing method is configured such that the surface of the substrate containing Si is irradiated with a focused Ga ion or In ion beam, and the Ga ions or the In ions are injected, while sputtering away the surface of the substrate, and a layer containing Ga or In is formed on the surface of the substrate, and with this layer taken as an etching mask, a dry etching is performed.

摘要翻译： 本发明提供一种制造具有深度形成在2μm以上的图案的纳米结构体的方法，该方法形成在含有Si的衬底和具有高方面和纳米级的图案的纳米结构的表面上。 在包含Si的基板的表面上形成深度为2μm或更大的图案的纳米结构，其中纳米结构被配置为在图案的表面上含有Ga或In，并且具有 Ga或In位于衬底的深度方向上图案表面的50nm以内。 此外，其制造方法被配置为使得包含Si的衬底的表面被照射聚焦的Ga离子或In离子束，并且注入Ga离子或In离子，同时溅射离开衬底的表面，并且 在基板的表面上形成含有Ga或In的层，将该层作为蚀刻掩模进行干法蚀刻。

公开(公告)号：US08035089B2

公开(公告)日：2011-10-11

申请号：US12474364

申请日：2009-05-29

申请人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

发明人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

IPC分类号： G21K5/10

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851

摘要： In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

摘要翻译： 在替代样品保持台或探针的同时能够始终有效地抵消惯性力以抑制振动的扫描探针装置中，用于样品或探针的载物台包括用于移动样品保持台并可移动的驱动元件 可在样品保持台移动期间产生的惯性力的方向移动的部分。 台架构造为使得驱动元件，可移动部分和样品保持台或探针可整体地可拆卸地安装在扫描探针装置的主组件上。

公开(公告)号：US07902637B2

公开(公告)日：2011-03-08

申请号：US12109701

申请日：2008-04-25

申请人： Taiko Motoi ,  Kenji Tamamori ,  Shinan Wang ,  Masahiko Okunuki ,  Haruhito Ono ,  Toshiaki Aiba ,  Nobuki Yoshimatsu

发明人： Taiko Motoi ,  Kenji Tamamori ,  Shinan Wang ,  Masahiko Okunuki ,  Haruhito Ono ,  Toshiaki Aiba ,  Nobuki Yoshimatsu

IPC分类号： H01L29/06 ,  H01L21/302

CPC分类号： B82Y10/00 ,  H01L21/3083 ,  H01L21/31144

摘要： A nano structure formed on the surface of a substrate containing Si and having a pattern of at least 2 μm in depth, in which Ga or In is contained in the surface of the pattern, and the Ga or the In has a concentration distribution that an elemental composition ratio Ga/Si or In/Si of Si and Ga or In detected by an X-ray photoelectron spectroscopy is at least 0.4 atomic percent in the depth direction of the substrate, and the maximum value of the concentration is positioned within 50 nm of the surface of the pattern.

摘要翻译： 纳米结构形成在含有Si的衬底的表面上，其深度为至少2μm的图案，其中Ga或In包含在图案的表面中，Ga或In的浓度分布为 通过X射线光电子能谱检测的Si和Ga或In的元素组成比Ga / Si或In / Si在衬底的深度方向上至少为0.4原子％，并且浓度的最大值位于50nm内 的图案表面。

公开(公告)号：US20070267580A1

公开(公告)日：2007-11-22

申请号：US11747581

申请日：2007-05-11

申请人： Susumu Yasuda ,  Junichi Seki ,  Takao Kusaka ,  Nobuki Yoshimatsu

发明人： Susumu Yasuda ,  Junichi Seki ,  Takao Kusaka ,  Nobuki Yoshimatsu

IPC分类号： G21K5/10

CPC分类号： G01Q70/04 ,  G01Q10/04

摘要： A drive stage for a scanning probe apparatus includes a supporting member, a plurality of movable portions fixed to the supporting member, and a plurality of drive elements configured and positioned to drive the plurality of movable portions. The drive stage is driven in a direction in which inertial forces of the plurality of movable portions are mutually canceled during drive of the plurality of drive elements. The drive stage further includes an inertial force difference detection member configured and positioned to detect a difference in inertial force between the plurality of movable portions, and an inertial force adjustment member configured and positioned to effect inertial force adjustment so that the difference in inertial force between the plurality of movable portions is decreased on the basis of a detection output of the inertial force detection member.

摘要翻译： 用于扫描探针装置的驱动台包括支撑构件，固定到支撑构件的多个可移动部分，以及构造和定位以驱动多个可移动部分的多个驱动元件。 在多个驱动元件的驱动期间，驱动级被驱动在多个可动部的惯性力相互抵消的方向上。 驱动平台还包括惯性力差检测构件，其构造和定位成检测多个可移动部分之间的惯性力差，以及惯性力调节构件，其构造和定位成实现惯性力调节，使得惯性力差 多个可动部根据惯性力检测部件的检测输出而减少。

公开(公告)号：US20070144243A1

公开(公告)日：2007-06-28

申请号：US11612111

申请日：2006-12-18

申请人： Nobuki YOSHIMATSU ,  Takao Kusaka ,  Susumu YASUDA ,  Junichi Seki

发明人： Nobuki YOSHIMATSU ,  Takao Kusaka ,  Susumu YASUDA ,  Junichi Seki

IPC分类号： G12B21/24 ,  G01N13/10

CPC分类号： G01Q10/02 ,  G01Q70/04

摘要： A drive stage, for driving a sample or a probe, capable of ensuring a movable range of a movable portion as a counterweight and always effectively canceling an inertial force to suppress vibration of a supporting member leading to vibration of the sample or the probe includes a counter drive element for moving the probe or a sample holding table and a movable portion movable in a direction in which the inertial force generated during movement of the probe or the sample holding table. The movable portion surrounds the counter drive element outside the counter drive element.

摘要翻译： 用于驱动样本或探针的驱动台能够确保可移动部分作为配重的可移动范围并且总是有效地抵消惯性力以抑制导致样品或探针的振动的支撑构件的振动，包括： 用于移动探针或样品保持台的可逆驱动元件和可在探头或样品保持台移动期间产生的惯性力的方向上移动的可动部分。 可动部分围绕计数器驱动元件围绕计数器驱动元件。