HIGH FREQUENCY MEASUREMENT APPARATUS AND CALIBRATION METHOD FOR HIGH FREQUENCY MEASUREMENT APPARATUS
    12.
    发明申请
    HIGH FREQUENCY MEASUREMENT APPARATUS AND CALIBRATION METHOD FOR HIGH FREQUENCY MEASUREMENT APPARATUS 有权
    高频测量装置的高频测量装置和校准方法

    公开(公告)号:US20120084037A1

    公开(公告)日:2012-04-05

    申请号:US13240671

    申请日:2011-09-22

    申请人: Ryohei TANAKA

    发明人: Ryohei TANAKA

    IPC分类号: G01R35/00 G06F19/00

    摘要: A method for calibrating voltage and current detected by a high frequency measurement apparatus is provided. By the method, a basic calibration parameter for a wide impedance range but with low accuracy and quadrant-specific calibration parameters for highly accurate calibration are calculated. This calculation is performed based, on values obtained by measuring three reference loads and true values of the reference loads. A first calibration unit of the apparatus calibrates the detected voltage and current by using the basic calibration parameter. A quadrant determining unit of the apparatus determines in which quadrant an impedance calculated from the calibrated voltage and current lies. A second calibration unit of the apparatus further calibrates the voltage and current by using a quadrant-specific calibration parameter corresponding to the determination result input from the quadrant determining unit.

    摘要翻译: 提供了一种用于校准由高频测量装置检测的电压和电流的方法。 通过该方法,计算了宽阻抗范围的基本校准参数,但是具有低精度和象限特异性校准参数用于高精度校准。 该计算基于通过测量三个参考载荷和参考载荷的真实值获得的值来执行。 设备的第一校准单元通过使用基本校准参数校准检测到的电压和电流。 设备的象限确定单元确定在哪个象限中根据校准的电压和电流计算的阻抗位于。 该装置的第二校准单元通过使用与从象限确定单元输入的确定结果相对应的象限特定校准参数进一步校准电压和电流。

    HIGH-FREQUENCY MEASURING DEVICE AND HIGH-FREQUENCY MEASURING DEVICE CALIBRATION METHOD
    13.
    发明申请
    HIGH-FREQUENCY MEASURING DEVICE AND HIGH-FREQUENCY MEASURING DEVICE CALIBRATION METHOD 有权
    高频测量装置和高频测量装置校准方法

    公开(公告)号:US20110238356A1

    公开(公告)日:2011-09-29

    申请号:US13044218

    申请日:2011-03-09

    申请人: Ryohei TANAKA

    发明人: Ryohei TANAKA

    IPC分类号: G01R35/00 G06F19/00

    CPC分类号: G01R35/005 G01R27/04

    摘要: A method is provided for calibrating voltage values and current values detected by a high-frequency measuring device. In a first step, a first parameter is calculated based on impedances calculated when the measuring device is connected to a first set of three reference loads and impedances of the first set of three reference loads. In a second step, plasma processing is carried out with the measuring device connected to a load to be measured, and detected voltage and current values are calibrated using the first parameter, and impedances as viewed from a connection point towards the load side are calculated based on the calibrated voltage and current values. In a third step, three impedances that encompass, when displayed on a Smith chart, a narrower range than a range encompassed by the impedances of the first set of three reference loads are determined, where the narrower range includes the impedances calculated in the second step. In a fourth step, a second parameter is calculated based on impedances calculated when the measuring device is connected to a second set of three reference loads respectively having the three impedances and also on impedances of the second set of three reference loads. In a fifth step, the measuring device is connected to the load to be measured, and detected voltage and current values are calibrated using the first parameter and the second parameter.

    摘要翻译: 提供了一种用于校准由高频测量装置检测的电压值和电流值的方法。 在第一步骤中,基于当测量装置连接到第一组三个参考载荷和第一组三个参考载荷的阻抗时计算的阻抗来计算第一参数。 在第二步骤中,使用测量装置连接到要测量的负载进行等离子体处理,并且使用第一参数校准检测到的电压和电流值,并且基于从连接点朝向负载侧观察的阻抗基于 校准电压和电流值。 在第三步骤中,确定当在史密斯圆图上显示比由第一组三个参考载荷的阻抗所包围的范围窄的范围时,三个阻抗被确定,其中较窄的范围包括在第二步骤中计算的阻抗 。 在第四步骤中,基于当测量装置连接到分别具有三个阻抗的三个参考载荷的第二组以及第二组三个参考载荷的阻抗时计算的阻抗计算第二参数。 在第五步中,测量装置连接到要测量的负载,并且使用第一参数和第二参数来校准检测到的电压和电流值。

    Signal processing device for computing phase difference between alternating current signals
    14.
    发明授权
    Signal processing device for computing phase difference between alternating current signals 有权
    信号处理装置,用于计算交流信号之间的相位差

    公开(公告)号:US07702702B2

    公开(公告)日:2010-04-20

    申请号:US11406885

    申请日:2006-04-19

    摘要: A signal processing device includes a converting unit, a filtering unit, a differential computing unit, and a phase difference computing unit. The converting unit samples two alternating signals with a predetermined period and converts the sampled level values into digital alternating signal data. The filtering unit filters the two digital alternating signal data generated by the converting unit so as to abstract digital alternating signal data having a predetermined frequency, and the filtering unit comprises an adaptive digital filter. The differential computing unit computes differentials of the digital alternating signal data generated by the filtering unit. The phase difference computing unit computes phase difference using the two digital alternating signal data generated by the filtering unit, and the two digital alternating signal data generated by the differential computing unit.

    摘要翻译: 信号处理装置包括转换单元,滤波单元,差分计算单元和相位差计算单元。 转换单元以预定周期对两个交替信号进行采样,并将采样的电平值转换为数字交替信号数据。 滤波单元对由转换单元产生的两个数字交替信号数据进行滤波,以抽出具有预定频率的数字交替信号数据,并且滤波单元包括自适应数字滤波器。 差分计算单元计算由滤波单元产生的数字交流信号数据的差分。 相位差计算单元使用由滤波单元生成的两个数字交替信号数据和由差分计算单元生成的两个数字交替信号数据来计算相位差。

    Arc detector for plasma processing system
    15.
    发明申请
    Arc detector for plasma processing system 有权
    等离子体处理系统的电弧探测器

    公开(公告)号:US20080149603A1

    公开(公告)日:2008-06-26

    申请号:US11906120

    申请日:2007-09-28

    申请人: Ryohei Tanaka

    发明人: Ryohei Tanaka

    CPC分类号: H05H1/34 H05H2001/3494

    摘要: An arc detector is provided for a plasma processing system including a HF power source, a plasma processor, and a voltage/current signal detector. The arc detector includes a calculator for the phase difference between the AC voltage signal and the AC current signal, a calculator for an effective voltage based on the AC voltage signal, a calculator for an effective current based on the AC current signal, an FFT processor for the frequency spectrum of the AC voltage or current signal, and an arc analyzer connected to the phase difference calculator, effective voltage calculator, effective current calculator, and FFT processor. The arc analyzer calculates the plasma processor's impedance based on the calculated phase difference, effective voltage, and effective current. The arc analyzer monitors arcs in the plasma processor, based on the fluctuation rate of the calculated impedance and the output level of a frequency component in the spectrum. (FIG. 2)

    摘要翻译: 为包括HF电源,等离子体处理器和电压/电流信号检测器的等离子体处理系统提供电弧检测器。 电弧检测器包括用于AC电压信号和AC电流信号之间的相位差的计算器,基于AC电压信号的有效电压的计算器,基于AC电流信号的有效电流的计算器,FFT处理器 用于交流电压或电流信号的频谱,以及连接到相位差计算器,有效电压计算器,有效电流计算器和FFT处理器的电弧分析仪。 电弧分析仪根据计算出的相位差,有效电压和有效电流来计算等离子体处理器的阻抗。 电弧分析仪基于计算出的阻抗的波动率和频谱中的频率分量的输出电平来监测等离子体处理器中的弧。 (图2)

    High-frequency power source
    16.
    发明申请
    High-frequency power source 有权
    高频电源

    公开(公告)号:US20060220656A1

    公开(公告)日:2006-10-05

    申请号:US11391115

    申请日:2006-03-28

    IPC分类号: G01R27/00

    摘要: A high-frequency power source supplies high-frequency power to a load whose reflection characteristic for the power varies with time. The power source includes a frequency-variable power generator, a power detector for detecting the power into the load and the power from the load, a reflection coefficient calculator for calculating a reflection coefficient based on the detection of the power into and from the load, a frequency detector causing the power generator to generate high-frequency powers at various frequencies within a predetermined frequency range for obtaining the frequency that gives a minimum value to the calculated reflection coefficient, and a power supply controller for causing the power generator to generate a high-frequency power of the frequency obtained by the frequency detector and for supplying the high-frequency power to the load.

    摘要翻译: 高频电源向负载的反射特性随时间变化的负载提供高频电力。 电源包括可变功率发生器,用于检测负载的功率和来自负载的功率的功率检测器,反射系数计算器,用于基于对负载的功率的检测来计算反射系数, 频率检测器,其使所述发电机在预定频率范围内以各种频率产生高频功率,以获得给出所计算的反射系数的最小值的频率;以及电源控制器,用于使所述发电机产生高电平 由频率检测器获得的频率的频率功率和用于向负载提供高频功率。

    Adaptive digital filter
    17.
    发明申请
    Adaptive digital filter 有权
    自适应数字滤波器

    公开(公告)号:US20050180497A1

    公开(公告)日:2005-08-18

    申请号:US11056449

    申请日:2005-02-11

    IPC分类号: H03H17/04 H03H21/00 H03K5/159

    CPC分类号: H03H21/0012

    摘要: An adaptive digital filter includes a filtering circuit and a coefficient renewal circuit. The filtering circuit has a coefficient a defined by a fundamental formula: a[n+1]=a[n]+β·e[n]·q[n]/p[n]. β is a number greater than 0 and smaller than 2, e[n] is a difference between the input and the output of the filter, and q[n] and p[n] are formulas. The renewal circuit calculates a renewal value of the coefficient a. The coefficient renewal circuit calculates 2m (m is an integer) greater than p[n] in the fundamental formula, and also calculates the renewal value of the coefficient a in accordance with an execution formula: a[n+1]=a[n]+β·e[n]·q[n]/2m in place of the fundamental formula.

    摘要翻译: 自适应数字滤波器包括滤波电路和系数更新电路。 滤波电路具有由基本公式a [n + 1] = a [n] + beta.e [n] .q [n] / p [n]定义的系数α。 β是大于0且小于2的数,e [n]是滤波器的输入和输出之间的差,q [n]和p [n]是公式。 更新电路计算系数a的更新值。 系数更新电路计算基本公式中大于p [n]的2(m是整数),并且还根据执行公式计算系数a的更新值:a [ n + 1] = a [n] + beta.e [n] .q [n] / 2 代替基本公式。

    Signal processing apparatus, and voltage or current measurer utilizing the same
    18.
    发明申请
    Signal processing apparatus, and voltage or current measurer utilizing the same 审中-公开
    信号处理装置,利用该信号处理装置的电压或电流测量装置

    公开(公告)号:US20050171992A1

    公开(公告)日:2005-08-04

    申请号:US11048434

    申请日:2005-01-31

    IPC分类号: G01R19/02 G01R19/00 G06G7/02

    CPC分类号: G01R19/02 G01R19/0061

    摘要: A signal processing apparatus produces a signal representing the effective value of an inputted alternating signal. The apparatus includes a square calculator, a filter and a square-root calculator. The square calculator produces a square signal representing several squared values of the inputted alternating signal. The filter extracts a DC component signal from the square signal. The square-root calculator produces a signal representing the square root of a level value of the extracted DC component signal.

    摘要翻译: 信号处理装置产生表示输入的交变信号的有效值的信号。 该装置包括平方计算器,滤波器和平方根计算器。 平方计算器产生表示输入的交变信号的几个平方值的平方信号。 滤波器从平方信号中提取直流分量信号。 平方根计算器产生表示提取的DC分量信号的电平值的平方根的信号。

    Nickel-chromium-tungsten base superalloy
    19.
    发明授权
    Nickel-chromium-tungsten base superalloy 失效
    镍铬钨基超耐热合金

    公开(公告)号:US5449490A

    公开(公告)日:1995-09-12

    申请号:US300514

    申请日:1994-09-06

    IPC分类号: C22C19/05

    CPC分类号: C22C19/055 C22C19/056

    摘要: The improved superalloy that possesses all the characteristics required of the high-temperature structural material of high-temperature gas-cooled reactors (i.e., high-temperature strength, corrosion resistance, good producibility, good hot workability and resistance to embrittlement due to thermal aging) consists essentially of 16-28% Cr, 15-24% W (provided that Cr+W=39-44%), 0.01-0.1% Zr, 0.001-0.015% Y, 0.0005-0.01% B, up to 0.05% C, up to 0.1% Si, up to 0.1% Mn (provided that Si+Mn.ltoreq.0.1%), up to 0.1% Ti, up to 0.1% Al and up to 0.1% Nb (provided that Ti+Al.ltoreq.0.1% and Ti+Al+Nb.ltoreq.0.15%), with the balance being Ni and inevitable impurities and all percentages being on a weight basis.

    摘要翻译: 具有高温气冷反应堆的高温结构材料所需要的所有特性的改进的超级合金(即,高温强度,耐腐蚀性,良好的可生产性,良好的热加工性和耐热老化的脆化性) 基本上由16-28%Cr,15-24%W(条件是Cr + W = 39-44%),0.01-0.1%Zr,0.001-0.015%Y,0.0005-0.01%B,至多0.05%C ,高达0.1%的Si,至多0.1%的Mn(条件是Si + Mn <0.1%),至多0.1%的Ti,至多0.1%的Al和至多0.1%的Nb(条件是Ti + Al < = 0.1%,Ti + Al + Nb <0.15%),余量为Ni和不可避免的杂质,所有百分数均为重量。

    Voice-operated control circuit and method for using same
    20.
    发明授权
    Voice-operated control circuit and method for using same 失效
    语音控制电路及其使用方法

    公开(公告)号:US08775190B2

    公开(公告)日:2014-07-08

    申请号:US12931602

    申请日:2011-02-04

    IPC分类号: G10L21/00 A63H30/00 G06F17/00

    CPC分类号: A63H30/04 G10L2025/783

    摘要: A voice-operated control circuit and method for using the voice-operated control circuit in connection with a toy vehicle. The voice-operated control circuit contains an audio detector, such as a microphone, to detect audible sound signals, and an integrated circuit that determines the duration of the audible sound signals received by the audio detector. At a user-defined time and based on the audible sound signals received, the integrated circuit determines and controls the duration of operation of various components of the toy vehicle, such as a motor, lights and/or sounds.

    摘要翻译: 一种语音操作控制电路和方法,用于与玩具车连接使用语音控制电路。 语音控制电路包括诸如麦克风的音频检测器以检测可听见的声音信号,以及确定由音频检测器接收的可听见的声音信号的持续时间的集成电路。 在用户定义的时间并且基于接收到的可听见的声音信号,集成电路确定并控制玩具车的各种部件(例如电机,灯光和/或声音)的操作持续时间。