公开(公告)号：US06798498B2

公开(公告)日：2004-09-28

申请号：US10050542

申请日：2002-01-18

Applicant: Hiroyuki Wada ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Eiji Isomura ,  Tetsuo Abe ,  Tadashi Hattori ,  Akifumi Ooshima ,  Makoto Uragaki ,  Yoshiyuki Noguchi ,  Hiroyuki Tamaki ,  Masataka Ebe ,  Tomohiro Ishiguro ,  Yasuyuki Kato

Inventor： Hiroyuki Wada ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Eiji Isomura ,  Tetsuo Abe ,  Tadashi Hattori ,  Akifumi Ooshima ,  Makoto Uragaki ,  Yoshiyuki Noguchi ,  Hiroyuki Tamaki ,  Masataka Ebe ,  Tomohiro Ishiguro ,  Yasuyuki Kato

IPC: G01N2100

CPC classification number: G01N21/956

Abstract: A polysilicon film evaluation apparatus is provided which enables objective automatic evaluation of the status of a polysilicon film, as formed to a high accuracy in a contact-free fashion. To this end, there is provided a polysilicon film evaluation apparatus 1 including a stage 25 on which to set a substrate W carrying a polysilicon film, an optical system for observation with the visible light 4, 8, 12, 40a for illuminating the visible light on a substrate W on the stage to photograph a surface image of the polysilicon film on the substrate W to effect auto-focusing, an optical system for observation with UV light 6, 10, 40b for illuminating the UV light on the substrate on the stage to acquire a surface image of the polysilicon film of the substrate, auto-focused using the optical system for observation with the visible light, and an evaluating unit 51 for evaluating the linearity and periodicity of a spatial structure of the film surface of the polysilicon film, from a surface image of the polysilicon film obtained by the optical system for observation with UV light, to evaluate the status of the polysilicon film based on the results of evaluation of the linearity and periodicity.

Abstract translation: 提供了一种多晶硅膜评价装置，其能够以无接触的方式高精度地形成，从而能够客观地自动评估多晶硅膜的状态。 为此，提供了一种多晶硅膜评价装置1，其包括载置多晶硅膜的基板W，载置多晶硅膜的基板W的阶段25，用于照射可见光的可见光4,8,12,4a的观察用光学系统 在台面上的基板W上拍摄基板W上的多晶硅膜的表面图像以实现自动聚焦，用于用紫外光6,10,40b观察的光学系统用于照射台上的基板上的UV光 获取使用可见光观察用光学系统自动聚焦的基板的多晶硅膜的表面像，以及用于评价多晶硅膜的膜表面的空间结构的线性和周期性的评估单元51 从由用于用UV光观察的光学系统获得的多晶硅膜的表面图像，基于线性度的评估结果来评估多晶硅膜的状态a 周期性

公开(公告)号：US06695471B2

公开(公告)日：2004-02-24

申请号：US10180655

申请日：2002-06-26

Applicant: Etsu Hashimoto ,  Yoshitada Katagiri ,  Tetsuo Abe ,  Yoshio Suzuki

Inventor： Etsu Hashimoto ,  Yoshitada Katagiri ,  Tetsuo Abe ,  Yoshio Suzuki

IPC: G01K116

CPC classification number: G01K7/42

Abstract: A temperature meter for measuring temperature of a measurement target object to which a temperature sensor cannot be fixed directly is formed by a temperature sensor configured to measure an observed temperature in a vicinity of the measurement target object; a timer configured to measure a temperature observation time; and a calculation processor configured to calculate the temperature of the measurement target object according to the observed temperature and the temperature observation time by carrying out a prescribed calculation processing.

Abstract translation: 用于测量温度传感器不能直接固定到的测量对象物体的温度的温度计由测量被测物体附近的观察温度的温度传感器构成; 定时器，被配置为测量温度观察时间; 以及计算处理器，被配置为通过执行规定的计算处理来根据观察到的温度和温度观测时间来计算测量对象物体的温度。

公开(公告)号：US06623336B2

公开(公告)日：2003-09-23

申请号：US09788558

申请日：2001-02-21

Applicant: Hiroshi Shindou ,  Masahiro Sasaki ,  Akio Ogawa ,  Tetsuo Abe ,  Masaki Kouzu ,  Masao Yamaguchi

Inventor： Hiroshi Shindou ,  Masahiro Sasaki ,  Akio Ogawa ,  Tetsuo Abe ,  Masaki Kouzu ,  Masao Yamaguchi

IPC: B24B900

CPC classification number: G11B5/3116 ,  B24B37/048 ,  B24B49/16 ,  G11B5/3103 ,  G11B5/3163 ,  G11B5/3173

Abstract: When electric elements are formed on a ceramic bar or the like, the positional displacement of the respective elements occurs due to a division exposing process or the like. An object of the present invention is to provide a device and a method which unify the non-polished portion of the respective elements by conducting polishing while a complicated deformation or the like is given to the ceramic bar. To achieve this object, the ceramic bar or like is held by using a jig, and a plurality of loads are applied to portions of the jig where the ceramic bar or the like is held, to thereby deform the ceramic bar or the like and polish the element in that state. In this situation the load applied points are disposed so as to avoid the boundaries of the division exposure.

Abstract translation: 当电元件形成在陶瓷棒等上时，由于分割曝光处理等，各元件的位置偏移。 本发明的目的是提供一种通过进行抛光来统一未磨光部分的装置和方法，同时向陶瓷棒施加复杂的变形等。 为了实现该目的，通过使用夹具来保持陶瓷棒等，并且将多个负载施加到夹具的陶瓷棒等的夹持部分，从而使陶瓷棒等发生变形和抛光 该状态中的元素。 在这种情况下，负载施加点被设置为避免划分曝光的边界。

公开(公告)号：US06565414B2

公开(公告)日：2003-05-20

申请号：US09732722

申请日：2000-12-11

Applicant: Tetsuo Abe ,  Akio Ogawa ,  Tsugihiro Hasebe ,  Hiroshi Shindou ,  Osamu Fukuroi

Inventor： Tetsuo Abe ,  Akio Ogawa ,  Tsugihiro Hasebe ,  Hiroshi Shindou ,  Osamu Fukuroi

IPC: B24B1100

CPC classification number: B24B37/30 ,  B24B37/048 ,  B24B49/10 ,  B24B49/16 ,  G11B5/102 ,  G11B5/1871 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3903

Abstract: In the polishing work for forming a crown shape on a ceramic bar bearing a plurality of conversion units for the magnetic heads, the present invention is to provide a well-controlled satisfactory shape by pressing the ceramic bar, provided with plural grooves perpendicular to the longitudinal direction and on a surface opposed to the polished plane, to a substantially concave polishing plane through an elastic member principally composed of rubber, then measuring the magneto resistivity of an element provided in the conversion unit of the magnetic head, and adjusting the pressure at the crown forming operation by a closed loop control based on the result of such measurement.

公开(公告)号：US5473425A

公开(公告)日：1995-12-05

申请号：US327713

申请日：1994-10-24

Applicant: Tomohide Tokumaru ,  Tetsuo Abe ,  Morio Misono

Inventor： Tomohide Tokumaru ,  Tetsuo Abe ,  Morio Misono

IPC: H01L21/66

CPC classification number: H01L22/12

Abstract: An apparatus for inspecting the outward appearance of each of IC packages stored in an embossed tape includes a drive wheel having an outer periphery about which the embossed tape is wound. The drive wheel is rotatable in a vertical plane for moving the embossed tape. A pair of cameras are so mounted as to face the outer periphery of the drive wheel at its upwardly and downwardly moving portions, respectively, and are used to produce two different images of each IC package from two different angles through a cover tape bonded to the embossed tape for enclosing the IC packages. The apparatus prevents any diffused reflection of light by the cover tape and any inclination of each IC package during its inspection.

Abstract translation: 用于检查存储在压花带中的每个IC封装的外观的装置包括具有卷绕带状带的外周的驱动轮。 驱动轮可在垂直平面中旋转以移动压花带。 一对照相机分别安装成与驱动轮的外周面相对的上下移动部分，并且用于通过粘合到该两个不同角度的盖带从两个不同的角度产生每个IC封装的两个不同的图像。 用于封装IC封装的压纹胶带。 该装置防止在其检查期间封盖带的光的任何漫反射和每个IC封装的任何倾斜。

公开(公告)号：US5383370A

公开(公告)日：1995-01-24

申请号：US682638

申请日：1991-04-09

Applicant: Kenneth D. Abramson ,  Tetsuo Abe

Inventor： Kenneth D. Abramson ,  Tetsuo Abe

IPC: B23P19/06 ,  G01L5/00 ,  G01L3/10

CPC classification number: G01L5/0042

Abstract: A device for verifying or measuring a minimum value of a previously applied torque on a workpiece such as bolt, nut, etc., includes a motor, a reduction gear assembly, a torque transducer and a fastener engaging member, including a rotatably spindle. The motor causes the spindle to rotate. A torsion bar interposed the spindle and the motor absorbs the inertia of the motor when the motor is stopped to minimize torque overshoot, as well as taking up the rotation generated by the motor immediately upon engagement with a workpiece. An angle encoder senses any rotation of the workpiece caused by the rotation of the spindle. Any rotation of the workpiece means that the previously applied torque is below a minimum predetermined value.

Abstract translation: 用于验证或测量诸如螺栓，螺母等的工件上的先前施加的扭矩的最小值的装置包括电动机，减速齿轮组件，扭矩传感器和紧固件接合构件，包括可旋转的主轴。 电机使主轴旋转。 插入主轴和马达的扭杆在电机停止时吸收马达的惯性，以最小化扭矩过冲，以及在与工件接合时马达产生的旋转。 角度编码器感测由主轴的旋转引起的工件的任何旋转。 工件的任意旋转意味着先前施加的转矩低于最小预定值。

公开(公告)号：US5152046A

公开(公告)日：1992-10-06

申请号：US749512

申请日：1991-08-19

Applicant: Tetsuo Abe

Inventor： Tetsuo Abe

IPC: B23P19/06 ,  B25B23/14

CPC classification number: B23P19/066 ,  B25B23/14 ,  Y10T29/49766

Abstract: There is disclosed a constant-speed, fastener tightening method using a nut runner for setting the final tightened state of the fastener in terms of tightening torque, characterized in that the fastener is tightened by maintaining the rotative speed of the nut runner at a constant speed regardless of variations in tightening loads.

Abstract translation: 公开了一种使用螺母转轮的恒速紧固件紧固方法，用于根据紧固扭矩设定紧固件的最终紧固状态，其特征在于，通过将螺母扳手的旋转速度保持在恒定速度来紧固紧固件 无论紧固载荷如何变化。

公开(公告)号：US06217425B1

公开(公告)日：2001-04-17

申请号：US09327710

申请日：1999-06-08

Applicant: Hiroshi Shindou ,  Tetsuo Abe ,  Akio Ogawa ,  Tsugihiro Hasebe

Inventor： Hiroshi Shindou ,  Tetsuo Abe ,  Akio Ogawa ,  Tsugihiro Hasebe

IPC: B24B722

CPC classification number: B24B37/048 ,  B24B37/00 ,  G11B5/1871 ,  G11B5/3103 ,  G11B5/3116 ,  G11B5/3169 ,  G11B5/3173 ,  Y10T29/49048 ,  Y10T29/4905

Abstract: An apparatus for lapping a workpiece including a plurality of magnetic heads supported by a tool is disclosed. The lapping apparatus comprises a rotary lapping table, a lapping head attachment frame, an adjuster ring resiliently supported by the frame, a lapping head attached to the adjuster ring, a tilting assembly attached to the lapping head, and an up and down movable back plate pivotally attached to the lapping head. The apparatus further comprises first actuators or cylinders for correcting balance by applying forces on right and left sides of the pivotal point of the back plate, and second actuators or cylinders for correcting bow of the workpiece by applying operating forces on a plurality of predetermined locations of the tool so that the moving directions of movable parts of the second actuator means are substantially parallel with the directions of the operating forces.

Abstract translation: 公开了一种用于研磨包括由工具支撑的多个磁头的工件的装置。 研磨装置包括旋转研磨台，研磨头附接框架，由框架弹性支撑的调节环，附接到调节环的研磨头，附接到研磨头的倾斜组件，以及上下可动背板 枢转地附接到研磨头。 该装置还包括用于通过在后板的枢转点的右侧和左侧施加力来校正平衡的第一致动器或气缸，以及用于通过在多个预定位置上施加操作力来校正工件的弓形的第二致动器或气缸 使得第二致动器装置的可移动部件的移动方向基本上与操作力的方向平行的工具。

公开(公告)号：US5509264A

公开(公告)日：1996-04-23

申请号：US224323

申请日：1994-04-07

Applicant: Seiya Ito ,  Motoaki Hirao ,  Michihiro Shiraha ,  Shunpei Nozoe ,  Kazuyoshi Kawamura ,  Kenichi Fujii ,  Eiichi Harada ,  Tatsuo Ino ,  Masahiro Uozumi ,  Tetsuo Abe

Inventor： Seiya Ito ,  Motoaki Hirao ,  Michihiro Shiraha ,  Shunpei Nozoe ,  Kazuyoshi Kawamura ,  Kenichi Fujii ,  Eiichi Harada ,  Tatsuo Ino ,  Masahiro Uozumi ,  Tetsuo Abe

IPC: C10J3/46 ,  F01K23/06 ,  F01K23/10 ,  F02C3/28 ,  F02C6/18

CPC classification number: F01K23/067 ,  F02C3/28 ,  Y02E20/18

Abstract: A direct coal fired type gas turbine combined power generation system comprises a pressurized gasifier provided with a gas outlet, a gas cooling unit provided for the gas outlet of the pressurized gasifier, a high temperature dust collector unit connected through a line to a gas cooling unit, a gas turbine combustor connected through a line to the dust collector unit, a gas turbine connected through a line to the gas turbine combustor, a gas turbine generator connected through an output shaft to the gas turbine, a heat recovery boiler connected to the gas turbine, a gas refining unit disposed in association with the heat recovery boiler and connected through a line at an upstream side thereof to the gas cooling unit, a steam turbine connected through a line to a downstream side of the heat recovery boiler and the gas cooling unit through a line and a steam turbine generator connected through an output shaft to the steam turbine.

Abstract translation: 直接燃煤型燃气轮机组合发电系统包括设置有气体出口的加压气化器，为加压气化器的气体出口设置的气体冷却单元，通过管线连接到气体冷却单元的高温集尘单元 通过管线连接到集尘单元的燃气轮机燃烧器，通过管线连接到燃气轮机燃烧器的燃气轮机，通过输出轴连接到燃气轮机的燃气轮机发电机，连接到气体的热回收锅炉 涡轮机，气体精炼单元，其与热回收锅炉相关联地设置并通过其上游侧的管路连接到气体冷却单元;蒸汽涡轮机，其通过管线连接到热回收锅炉的下游侧，并且气体冷却 通过一根管线和一个通过输出轴连接到蒸汽轮机的汽轮机发电机。