公开(公告)号：US06798498B2

公开(公告)日：2004-09-28

申请号：US10050542

申请日：2002-01-18

申请人： Hiroyuki Wada ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Eiji Isomura ,  Tetsuo Abe ,  Tadashi Hattori ,  Akifumi Ooshima ,  Makoto Uragaki ,  Yoshiyuki Noguchi ,  Hiroyuki Tamaki ,  Masataka Ebe ,  Tomohiro Ishiguro ,  Yasuyuki Kato

发明人： Hiroyuki Wada ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Eiji Isomura ,  Tetsuo Abe ,  Tadashi Hattori ,  Akifumi Ooshima ,  Makoto Uragaki ,  Yoshiyuki Noguchi ,  Hiroyuki Tamaki ,  Masataka Ebe ,  Tomohiro Ishiguro ,  Yasuyuki Kato

IPC分类号： G01N2100

CPC分类号： G01N21/956

摘要： A polysilicon film evaluation apparatus is provided which enables objective automatic evaluation of the status of a polysilicon film, as formed to a high accuracy in a contact-free fashion. To this end, there is provided a polysilicon film evaluation apparatus 1 including a stage 25 on which to set a substrate W carrying a polysilicon film, an optical system for observation with the visible light 4, 8, 12, 40a for illuminating the visible light on a substrate W on the stage to photograph a surface image of the polysilicon film on the substrate W to effect auto-focusing, an optical system for observation with UV light 6, 10, 40b for illuminating the UV light on the substrate on the stage to acquire a surface image of the polysilicon film of the substrate, auto-focused using the optical system for observation with the visible light, and an evaluating unit 51 for evaluating the linearity and periodicity of a spatial structure of the film surface of the polysilicon film, from a surface image of the polysilicon film obtained by the optical system for observation with UV light, to evaluate the status of the polysilicon film based on the results of evaluation of the linearity and periodicity.

摘要翻译： 提供了一种多晶硅膜评价装置，其能够以无接触的方式高精度地形成，从而能够客观地自动评估多晶硅膜的状态。 为此，提供了一种多晶硅膜评价装置1，其包括载置多晶硅膜的基板W，载置多晶硅膜的基板W的阶段25，用于照射可见光的可见光4,8,12,4a的观察用光学系统 在台面上的基板W上拍摄基板W上的多晶硅膜的表面图像以实现自动聚焦，用于用紫外光6,10,40b观察的光学系统用于照射台上的基板上的UV光 获取使用可见光观察用光学系统自动聚焦的基板的多晶硅膜的表面像，以及用于评价多晶硅膜的膜表面的空间结构的线性和周期性的评估单元51 从由用于用UV光观察的光学系统获得的多晶硅膜的表面图像，基于线性度的评估结果来评估多晶硅膜的状态a 周期性

公开(公告)号：US06933185B2

公开(公告)日：2005-08-23

申请号：US10394223

申请日：2003-03-24

申请人： Hiroyuki Wada ,  Yoshimi Hirata ,  Ayumu Taguchi ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Shigeo Kubota ,  Tetsuo Abe ,  Akifumi Ooshima ,  Tadashi Hattori ,  Makoto Takatoku ,  Yukiyasu Sugano

发明人： Hiroyuki Wada ,  Yoshimi Hirata ,  Ayumu Taguchi ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Shigeo Kubota ,  Tetsuo Abe ,  Akifumi Ooshima ,  Tadashi Hattori ,  Makoto Takatoku ,  Yukiyasu Sugano

IPC分类号： H01L21/263 ,  H01L21/66 ,  C30B28/02 ,  H01L21/786

CPC分类号： H01L22/12

摘要： The state of a polysilicon film formed by excimer laser annealing an amorphous silicon film is to be evaluated. When the amorphous silicon film is annealed to form a polysilicon film, linearity or periodicity presents itself in the spatial structure of the film surface of the polysilicon film formed depending on the energy applied to the amorphous silicon during annealing. This linearity or periodicity is processed as an image and represented numerically from the image by exploiting the linearity or periodicity. The state of the polysilicon film is checked based on the numerical results.

摘要翻译： 对通过非晶硅膜的准分子激光退火而形成的多晶硅膜的状态进行评价。 当非晶硅膜退火以形成多晶硅膜时，线性或周期性本身就取决于退火期间施加到非晶硅的能量而形成的多晶硅膜的膜表面的空间结构。 该线性或周期性被处理为图像并且通过利用线性或周期性从图像数字地表示。 基于数值结果检查多晶硅膜的状态。

公开(公告)号：US06953939B2

公开(公告)日：2005-10-11

申请号：US10472312

申请日：2003-01-21

申请人： Tetsuo Abe ,  Kouki Okawauchi ,  Tadashi Hattori ,  Hironori Fujita ,  Minoru Takeda ,  Yuichi Aki ,  Naoki Date ,  Setsuo Norioka ,  Toshiaki Miyokawa ,  Seiichi Nakagawa

发明人： Tetsuo Abe ,  Kouki Okawauchi ,  Tadashi Hattori ,  Hironori Fujita ,  Minoru Takeda ,  Yuichi Aki ,  Naoki Date ,  Setsuo Norioka ,  Toshiaki Miyokawa ,  Seiichi Nakagawa

IPC分类号： G01N23/225 ,  G01Q30/02 ,  G01Q30/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  G01K5/10 ,  G21K5/10 ,  G21K7/00

CPC分类号： H01J37/20 ,  G01N23/225 ,  H01J37/18 ,  H01J2237/188 ,  H01J2237/2817

摘要： A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test subject, which is, a testing apparatus 1 using a scanning electron microscope for performing tests and measurements on any part of a test subject in a nondestructive way by using a scanning electron microscope 6a, comprising a local vacuum formation portion 9 for forming a local vacuum region by blocking around a part to be tested of the test subject from the outside air, wherein the local vacuum formation portion comprises an exhaust portion for exhausting to form a partial vacuum region, a float means 14 for floating the whole local vacuum formation portion above the test subject by emitting a compressed gas to an outer circumference portion of the local vacuum formation portion and a length measuring means 16 for measuring a distance between the test subject and the local vacuum formation portion for controlling floating of the local vacuum formation portion by the float means.

摘要翻译： 一种使用扫描电子显微镜的测试装置，用于以非破坏性方式对测试对象的任何部分进行测试和测量，而不受被测对象的尺寸的限制，即使用扫描电子显微镜进行测试的测试装置1 以及通过使用扫描电子显微镜6a以非破坏性方式对测试对象的任何部分进行测量，该扫描电子显微镜包括用于通过从外部阻挡测试对象的被测试部分而形成局部真空区域的局部真空形成部分9 空气，其中所述局部真空形成部分包括用于排出以形成部分真空区域的排气部分，浮子装置14，用于通过将压缩气体发射到所述局部真空部分的外圆周部分来使所述局部真空形成部分上方的整个局部真空形成部分 真空形成部分和用于测量测试对象与局部真空形成口之间的距离的长度测量装置16 用于通过浮动装置控制局部真空形成部分的浮动。

公开(公告)号：US09810979B2

公开(公告)日：2017-11-07

申请号：US13541899

申请日：2012-07-05

申请人： Tadashi Hattori

发明人： Tadashi Hattori

IPC分类号： B29C59/02 ,  G03F7/00 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： G03F7/0002 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00

摘要： An imprint apparatus includes: a first driving mechanism configured to move at least one of a mold holder and a substrate holder such that a mold and an imprint material are contact with each other; a second driving mechanism configured to move at least one of the holders such that the substrate is aligned with the mold; a measurement device configured to measure relative positions between a mold mark and a substrate mark in a state in which the mold and the imprint material are not in contact with each other; and a controller configured to control the second driving mechanism based on information of a relationship between a moving amount of at least one of the holders, and change in relative positions between the marks, information of the moving amount, and information of the measured relative positions.

公开(公告)号：US20120013329A1

公开(公告)日：2012-01-19

申请号：US13259689

申请日：2010-01-19

申请人： Tadashi Hattori ,  Kyungwoo Kim

发明人： Tadashi Hattori ,  Kyungwoo Kim

IPC分类号： G01B7/30

CPC分类号： G01P3/443 ,  F16C19/184 ,  F16C33/61 ,  F16C33/723 ,  F16C41/007 ,  F16C2326/02 ,  G01P1/026 ,  G01P3/487

摘要： A rotation sensor device for a wheel including a core metal member configured to attach to an outer member of a wheel bearing device and having a containment recess protruding in a direction of a pulser ring provided on an inner member. The rotation sensor device further includes a sensing portion formed by molding a sensor element with a synthetic resin material as a separate component from the core metal member. The sensing portion is fixed within the containment recess and positioned opposite the pulser ring with a bottom wall of the containment recess positioned therebetween.

摘要翻译： 一种用于车轮的旋转传感器装置，包括：芯金属构件，其构造成附接到车轮轴承装置的外部构件，并且具有沿设置在内部构件上的脉冲发生器环的方向突出的容纳凹部。 旋转传感器装置还包括通过将具有合成树脂材料的传感器元件作为与芯金属构件分离的部件成型而形成的感测部分。 感测部分固定在容纳凹部内并且与脉冲发生器环相对定位，其中位于其间的容纳凹部的底壁。

公开(公告)号：US07341694B2

公开(公告)日：2008-03-11

申请号：US10669660

申请日：2003-09-25

申请人： Hiroyuki Nishiyama ,  Shiro Kakimoto ,  Ryuji Inoue ,  Hitoshi Yokoi ,  Noboru Ishida ,  Takafumi Oshima ,  Satoshi Sugaya ,  Koichi Imaeda ,  Tadashi Hattori ,  Atsushi Satsuma

发明人： Hiroyuki Nishiyama ,  Shiro Kakimoto ,  Ryuji Inoue ,  Hitoshi Yokoi ,  Noboru Ishida ,  Takafumi Oshima ,  Satoshi Sugaya ,  Koichi Imaeda ,  Tadashi Hattori ,  Atsushi Satsuma

IPC分类号： G01N27/04 ,  G01N33/00

CPC分类号： G01N33/0054 ,  G01N27/4075 ,  Y02A50/246 ,  Y10T436/173845 ,  Y10T436/175383 ,  Y10T436/25875

摘要： In an ammonia sensor (1), lead portions (7) and (9) are provided on an insulating substrate (5); a pair of comb-shaped electrodes (11) and (13) are connected to the lead portions (7) and (9), respectively; a sensitive layer (15) is provided on the comb-shaped electrodes (11) and (13); and a protective layer (17) is provided on the sensitive layer (15). Particularly, the sensitive layer (15) is formed of a gas-sensitive raw material predominantly containing ZrO2 and containing at least W in an amount of 2 to 40 wt. % as reduced to WO3.

摘要翻译： 在氨传感器（1）中，引线部分（7）和（9）设置在绝缘基板（5）上; 一对梳状电极（11）和（13）分别连接到引线部分（7）和（9）; 敏感层（15）设置在梳状电极（11）和（13）上; 并且在敏感层（15）上设置保护层（17）。 特别地，敏感层（15）由主要含有ZrO 2的气敏原料形成，至少含有W为2〜40wt。 ％降低至WO 3。

公开(公告)号：US07337679B2

公开(公告)日：2008-03-04

申请号：US11137500

申请日：2005-05-26

申请人： Tadashi Hattori ,  Masashi Sugimoto

发明人： Tadashi Hattori ,  Masashi Sugimoto

IPC分类号： G01B7/30

CPC分类号： G01D11/245 ,  G01P1/026

摘要： A rotation sensor includes a rotation detector mounted on a holder which is in turn inserted in a casing through its opening. A cover is formed by molding a resin so as to cover the opening of the casing and the portion of the holder protruding from the opening of the casing. A pair of relay terminals extend through a base portion of the holder and a gap defined in the holder, are fixed to a support wall, and connected to respective lead pieces of the detector. A resin cover is formed by molding a resin. When forming the cover, pressure is applied to the holder, thereby causing the holder to bulge axially in the holder. This in turn pushes the relay terminals in the axial direction. But since the relay terminals are fixed to the support wall, the support wall will absorb such pushing force, thereby preventing such pushing from being transmitted to the detector. In order to more effectively absorb such pushing force, the relay terminals may be provided with bent portions in the gap.

摘要翻译： 旋转传感器包括安装在保持器上的旋转检测器，该保持器又通过其开口插入到壳体中。 通过模制树脂以覆盖壳体的开口和保持器从壳体的开口突出的部分而形成盖。 一对继电器端子延伸穿过保持器的基部并且限定在保持器中的间隙固定到支撑壁上，并连接到检测器的相应引线片。 通过模制树脂形成树脂盖。 当形成盖时，将压力施加到保持器，从而使保持件在保持器中轴向凸出。 这继而沿轴向推动继电器端子。 但是由于中继端子固定在支撑壁上，支撑壁将吸收这种推力，从而防止这种推动传递到检测器。 为了更有效地吸收这种推力，中继端子可以在间隙中设置弯曲部分。

公开(公告)号：US07190160B2

公开(公告)日：2007-03-13

申请号：US11131360

申请日：2005-05-18

申请人： Tadashi Hattori

发明人： Tadashi Hattori

IPC分类号： G01B7/30

CPC分类号： G01P1/026 ,  G01D11/245

摘要： A wheel speed sensor includes a rotation detector mounted in an opening formed in a holder which is in turn inserted in a casing having one end closed. A pair of lead pieces extend from the detector and have connecting portions connected to respective relay terminals. A lid having a projection is fitted in the opening of the holder so that the projection is inserted between the connecting portions. The projection thus separates and insulates the connecting portions from each other. A cover is formed by molding a resin to cover the open end of the casing and the portion of the holder protruding from the open end of the casing.

摘要翻译： 车轮速度传感器包括安装在形成在保持器中的开口中的旋转检测器，该保持器又插入具有一端封闭的壳体中。 一对引线片从检测器延伸，并具有连接到各个继电器端子的连接部分。 具有突起的盖装配在保持器的开口中，使得突起插入在连接部分之间。 因此突起因此将连接部彼此分离并绝缘。 通过模制树脂以覆盖壳体的开口端和从壳体的开口端突出的保持器的部分来形成盖。

公开(公告)号：US07042576B2

公开(公告)日：2006-05-09

申请号：US10349108

申请日：2003-01-23

申请人： Tadashi Hattori

发明人： Tadashi Hattori

IPC分类号： G01B11/02

CPC分类号： G01B9/02027 ,  G01B9/02021 ,  G01B9/02072

摘要： A high speed, wide-range, high-accuracy positioning stage device for eliminating errors due to deterministic elements such as variation of surface machining accuracy of a bar mirror and for preventing error accumulation due to indeterminate elements such as air fluctuations when switching between laser interferometers. When an X1 laser interferometer as a first position measurement device and an X2 laser interferometer as a second position measurement device are switched, at a place at which at least two position measurement devices are activated, when a value is handed over from the X1 laser interferometer, which was activated, to the X2 laser interferometer, which is to be activated, errors due to the effect of X-bar mirror flatness and air fluctuations are found by a correction function for the X-bar mirror and/or a table and the average of the measured values, and the value of the X2 laser interferometer is corrected by a correction device such as a calculation device.

公开(公告)号：US20060017433A1

公开(公告)日：2006-01-26

申请号：US11131360

申请日：2005-05-18

申请人： Tadashi Hattori

发明人： Tadashi Hattori

IPC分类号： H02H1/00 ,  G01B7/30

CPC分类号： G01P1/026 ,  G01D11/245

摘要： A wheel speed sensor includes a rotation detector mounted in an opening formed in a holder which is in turn inserted in a casing having one end closed. A pair of lead pieces extend from the detector and have connecting portions connected to respective relay terminals. A lid having a projection is fitted in the opening of the holder so that the projection is inserted between the connecting portions. The projection thus separates and insulates the connecting portions from each other. A cover is formed by molding a resin to cover the open end of the casing and the portion of the holder protruding from the open end of the casing.

摘要翻译： 车轮速度传感器包括安装在形成在保持器中的开口中的旋转检测器，该保持器又插入具有一端封闭的壳体中。 一对引线片从检测器延伸，并具有连接到各个继电器端子的连接部分。 具有突起的盖装配在保持器的开口中，使得突起插入在连接部分之间。 因此突起因此将连接部彼此分离并绝缘。 通过模制树脂以覆盖壳体的开口端和从壳体的开口端突出的保持器的部分来形成盖。