公开(公告)号：US5688980A

公开(公告)日：1997-11-18

申请号：US729089

申请日：1996-10-10

Applicant: Wan-in Lee ,  Jun-ki Lee ,  Seshu B. Desu

Inventor： Wan-in Lee ,  Jun-ki Lee ,  Seshu B. Desu

IPC: C01G21/02 ,  C07F7/00 ,  C07F7/24 ,  C23C16/40 ,  C30B25/00 ,  C30B29/32 ,  H01B3/00 ,  H01G4/33 ,  H01L21/822 ,  H01L27/04 ,  H01L41/187 ,  C04B35/46

CPC classification number: C07F7/003 ,  C23C16/409

Abstract: An organometallic lead precursor, represented by following formula: L.sub.x .multidot.Pb(THD).sub.2 �I! wherein L is an electron donor ligand selected from the group consisting of NR.sub.3 (R=H, CH.sub.3) gas and Cl.sub.2 gas; THD denotes 2,2',6,6'-tetramethyl-3,5-heptanedione; and x is in the range of 0.5 to 2, is prepared by flowing a gas phase electron donor into a bubbler containing bis (2,2',6,6'-tetramethyl-3,5-heptanedione)Pb at a predetermined temperature, to synthesize, in-situ, an adduct. The precursor exhibits a remarkable improvement in volatility and in stability at the vaporization point. Lead-titanium based thin films prepared from the precursor, display superior reproducibility and reliability.

Abstract translation: 由下式表示的有机金属铅前体：LxxPb（THD）2 [I]其中L是选自NR3（R = H，CH3）和Cl2气体的电子供体配体; THD表示2,2'，6,6'-四甲基-3,5-庚二酮; 并且x在0.5至2的范围内，通过使气相电子给体在预定温度下流入含有双（2,2'，6,6'-四甲基-3,5-庚二酮）Pb的起泡器中来制备， 原位合成一种加合物。 该前体在蒸发点显示挥发性和稳定性方面的显着改善。 由前体制备的铅钛基薄膜显示出优异的再现性和可靠性。

公开(公告)号：US5641540A

公开(公告)日：1997-06-24

申请号：US415837

申请日：1995-04-03

Applicant: Wan-in Lee ,  Jun-ki Lee

Inventor： Wan-in Lee ,  Jun-ki Lee

IPC: H01G4/33 ,  C23C16/40 ,  H01B3/12

CPC classification number: C23C16/409

Abstract: An organometallic zirconium precursor, represented by following formula:L.sub.x.Zr(THD).sub.4 [I]wherein L is an electron donor ligand selected from the group consisting of NR.sub.3 (R.dbd.H, CH.sub.3) gas and Cl.sub.2 gas; THD denotes 2,2',6,6'-tetramethyl-3,5-heptanedione; and x is in the range of 0.3 to 1.5 with the proviso that L is NR.sub.3 or in the range of 0.5 to 2 with the proviso that L is Cl.sub.2, is prepared by flowing a gas phase electron donor into a bubbler containing bis (2,2',6,6'-tetramethyl-3,5-heptanedione)Zr at a predetermined temperature, to synthesize, in-situ, an adduct. The precursor exhibits a remarkable improvement in volatility, and in stability at the vaporization point.Lead-zirconium-titanium thin films prepared from the precursor, display superior reproducibility and reliability.

Abstract translation: 由下式表示的有机金属锆前体：Lx.Zr（THD）4 [I]其中L是选自NR 3（R = H，CH 3）气体和Cl 2气体的电子供体配体; THD表示2,2'，6,6'-四甲基-3,5-庚二酮; 并且x为0.3至1.5的范围，条件是L为NR 3或0.5至2的范围，条件是L为Cl 2，通过使气相电子给体流入含有双（2， 2'，6,6'-四甲基-3,5-庚二酮）Zr在预定温度下，原位合成加合物。 该前体在挥发性方面表现出显着的改善，并且在蒸发点处具有稳定性。 由前体制备的铅锆钛薄膜显示出优异的再现性和可靠性。

公开(公告)号：US5637352A

公开(公告)日：1997-06-10

申请号：US539518

申请日：1995-10-05

Applicant: Wan-in Lee ,  Jun-ki Lee ,  Seshu B. Desu

Inventor： Wan-in Lee ,  Jun-ki Lee ,  Seshu B. Desu

IPC: C01G21/02 ,  C07F7/00 ,  C07F7/24 ,  C23C16/40 ,  C30B25/00 ,  C30B29/32 ,  H01B3/00 ,  H01G4/33 ,  H01L21/822 ,  H01L27/04 ,  H01L41/187

CPC classification number: C07F7/003 ,  C23C16/409

Abstract: An organometallic lead precursor, represented by following formula:L.sub.x.Pb(THD).sub.2 [I]wherein L is an electron donor ligand selected from the group consisting of NR.sub.3 (R=H, CH.sub.3) gas and Cl.sub.2 gas; THD denotes 2,2',6,6'-tetramethyl-3,5-heptanedione; and x is in the range of 0.5 to 2, is prepared by flowing a gas phase electron donor into a bubbler containing bis (2,2',6,6'-tetramethyl-3,5-heptanedione)Pb at a predetermined temperature, to synthesize, in-situ, an adduct. The precursor exhibits a remarkable improvement in volatility, and in stability at the vaporization point.Lead-titanium based thin films prepared from the precursor, display superior reproducibility and reliability.

Abstract translation: 由下式表示的有机金属铅前体：Lx.Pb（THD）2 [I]其中L是选自NR 3（R = H，CH 3）气体和Cl 2气体的电子供体配体; THD表示2,2'，6,6'-四甲基-3,5-庚二酮; 并且x在0.5至2的范围内，通过使气相电子给体在预定温度下流入含有双（2,2'，6,6'-四甲基-3,5-庚二酮）Pb的起泡器中来制备， 原位合成一种加合物。 该前体在挥发性方面表现出显着的改善，并且在蒸发点处具有稳定性。 由前体制备的铅钛基薄膜显示出优异的再现性和可靠性。