WAFER LASER-MARKING METHOD AND DIE FABRICATED USING THE SAME
    11.
    发明申请
    WAFER LASER-MARKING METHOD AND DIE FABRICATED USING THE SAME 审中-公开
    使用相同方法制作的波长激光标记方法和DIE

    公开(公告)号:US20100001416A1

    公开(公告)日:2010-01-07

    申请号:US12482131

    申请日:2009-06-10

    Abstract: A wafer laser-marking method is provided. First, a wafer having a first surface (an active surface) and a second surface (a back surface) opposite to each other is provided. Next, the wafer is thinned. Then, the thinned wafer is fixed on a tape such that the second surface of the wafer is attached to the tape. Finally, the laser marking step is performed, such that a laser light penetrates the tape and marks a pattern on the second surface of the wafer. There are glue residuals remained in the laser-marking pattern of the die manufactured according to the laser-marking method of the invention, and the components of the glue residuals at least include elements of silicon, carbon and oxygen.

    Abstract translation: 提供了晶片激光打标方法。 首先,提供具有彼此相对的第一表面(活性表面)和第二表面(背面)的晶片。 接下来,晶片变薄。 然后,将薄的晶片固定在带上,使得晶片的第二表面附接到带上。 最后,执行激光标记步骤,使得激光穿透带并在晶片的第二表面上标记图案。 根据本发明的激光标记方法制造的模具的激光标记图案中残留有胶合残留物,并且胶残留物的成分至少包括硅,碳和氧的元素。

    Fabricating method of wafer protection layers
    12.
    发明授权
    Fabricating method of wafer protection layers 有权
    晶圆保护层的制造方法

    公开(公告)号:US07510909B2

    公开(公告)日:2009-03-31

    申请号:US11162606

    申请日:2005-09-16

    Applicant: Yu-Pin Tsai

    Inventor: Yu-Pin Tsai

    Abstract: A fabricating method of wafer protection layers and a wafer structure are provided. The fabricating method includes providing a wafer first. The wafer includes pluralities of chips and has an active surface, a corresponding reverse surface and a plurality of pre-cut trenches on the active surface. On the active surface, pluralities of bumps are disposed. Next, a first curing-type protection layer and a pellicle are disposed over the active surface. Afterwards, the first curing-type protection layer is asked to contact the active surface. Besides, a second curing-type protection layer is disposed on the reverse surface. Afterward, the first and the second curing-type protection layer are cured. Finally, the wafer is cut through the pre-cut trenches to separate the chips from the wafer.

    Abstract translation: 提供了晶片保护层和晶片结构的制造方法。 该制造方法包括首先提供晶片。 晶片包括多个芯片,并且在活性表面上具有活性表面,相应的反面和多个预切割沟槽。 在活性表面上设置有多个凸块。 接下来,在活性表面上设置第一固化型保护层和防护薄膜。 之后,要求第一固化型保护层与活性表面接触。 此外,第二固化型保护层设置在反面上。 之后,固化第一固化型保护层和第二固化型保护层。 最后,通过预切割沟槽切割晶片以将芯片与晶片分离。

    Wafer laser-making method and die fabricated using the same
    13.
    发明授权
    Wafer laser-making method and die fabricated using the same 有权
    晶圆激光制造方法和使用其制造的模具

    公开(公告)号:US08728915B2

    公开(公告)日:2014-05-20

    申请号:US13225756

    申请日:2011-09-06

    Abstract: A wafer laser-marking method is provided. First, a wafer having a first surface (an active surface) and a second surface (a back surface) opposite to each other is provided. Next, the wafer is thinned. Then, the thinned wafer is fixed on a non-UV tape such that the second surface of the wafer is attached to the tape. Finally, the laser marking step is performed, such that a laser light penetrates the non-UV tape and marks a pattern on the second surface of the wafer. According to the laser-marking method of the embodiment, the pattern is formed by the non-UV residuals left on the second surface of the wafer, and the components of the glue residuals at least include elements of silicon and carbon.

    Abstract translation: 提供了晶片激光打标方法。 首先,提供具有彼此相对的第一表面(活性表面)和第二表面(背面)的晶片。 接下来,晶片变薄。 然后,将薄的晶片固定在非UV带上,使得晶片的第二表面附接到带上。 最后,执行激光标记步骤,使得激光穿透非UV带并且在晶片的第二表面上标记图案。 根据本实施例的激光标记方法,图案由残留在晶片的第二表面上的非UV残余物形成,并且胶合残余物的成分至少包括硅和碳的元素。

    FABRICATING METHOD OF WAFER PROTECTION LAYERS
    15.
    发明申请
    FABRICATING METHOD OF WAFER PROTECTION LAYERS 有权
    防护层制作方法

    公开(公告)号:US20060057778A1

    公开(公告)日:2006-03-16

    申请号:US11162606

    申请日:2005-09-16

    Applicant: Yu-Pin Tsai

    Inventor: Yu-Pin Tsai

    Abstract: A fabricating method of wafer protection layers and a wafer structure are provided. The fabricating method includes providing a wafer first. The wafer includes pluralities of chips and has an active surface, a corresponding reverse surface and a plurality of pre-cut trenches on the active surface. On the active surface, pluralities of bumps are disposed. Next, a first curing-type protection layer and a pellicle are disposed over the active surface. Afterwards, the first curing-type protection layer is asked to contact the active surface. Besides, a second curing-type protection layer is disposed on the reverse surface. Afterward, the first and the second curing-type protection layer are cured. Finally, the wafer is cut through the pre-cut trenches to separate the chips from the wafer.

    Abstract translation: 提供了晶片保护层和晶片结构的制造方法。 制造方法包括首先提供晶片。 晶片包括多个芯片,并且在活性表面上具有活性表面,相应的反面和多个预切割沟槽。 在活性表面上设置有多个凸块。 接下来,在活性表面上设置第一固化型保护层和防护薄膜。 之后,要求第一固化型保护层与活性表面接触。 此外,第二固化型保护层设置在反面上。 之后,固化第一固化型保护层和第二固化型保护层。 最后,通过预切割沟槽切割晶片以将芯片与晶片分离。

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