公开(公告)号：US20150243482A1

公开(公告)日：2015-08-27

申请号：US14632944

申请日：2015-02-26

Applicant: ADVANTEST CORPORATION

Inventor： Shinichi Hamaguchi ,  Masaki Kurokawa ,  Masahiro Takizawa

IPC: H01J37/317

CPC classification number: G03F7/2037 ,  G03F1/20 ,  G03F1/50 ,  G03F7/2063 ,  H01J37/3174 ,  H01J37/3175 ,  H01J2237/31776

Abstract: An electron beam exposure method includes the steps of: preparing an exposure mask having a plurality of opening patterns formed by dividing a drawing object pattern into exposable regions; and drawing the drawing object pattern by performing exposure with an electron beam passing through the opening patterns of the exposure mask. Each end portion serving as a joint in each opening pattern of the exposure mask is provided with a joining portion tapered in a width of the opening pattern. The exposure is performed in such a way that portions drawn through adjacent joining portions overlap each other.

Abstract translation: 电子束曝光方法包括以下步骤：制备具有通过将绘制对象图案划分为可曝光区域而形成的多个开口图案的曝光掩模; 以及通过利用穿过曝光掩模的开口图案的电子束进行曝光来画出绘制对象图案。 作为曝光掩模的每个开口图案中的接头的每个端部设置有在开口图案的宽度上渐缩的接合部。 以这样的方式进行曝光，使得通过相邻的接合部分拉出的部分彼此重叠。

公开(公告)号：US20140061465A1

公开(公告)日：2014-03-06

申请号：US13968022

申请日：2013-08-15

Applicant: ADVANTEST CORPORATION

Inventor： Kenji Abe ,  Masaki Kurokawa ,  Akiyoshi Tsuda ,  Hideki Nasuno

IPC: H01J37/244 ,  H01J9/00

CPC classification number: H01J37/244 ,  H01J9/00 ,  H01J9/02 ,  H01J37/28 ,  H01J2237/24405

Abstract: There is provided an electron beam detector including an electron beam scatterer which is disposed at a predetermined distance below a shield including a plurality of openings formed therein, and a beam detection element disposed at a predetermined distance below the scatterer and configured to convert an electron beam into an electric signal. In the electron beam detector, the scatterer is disposed at an equal distance from any of the openings in the shield, and the beam detection element is disposed at an equal distance from any of the openings in the shield. Thus, the electron beam detector can suppress a variation in detection sensitivity depending on the position of the opening.

Abstract translation: 提供了一种电子束检测器，其包括电子束散射体，该电子束散射体设置在包括形成在其中的多个开口的屏蔽下方的预定距离处;以及光束检测元件，其设置在散射体下方预定距离处，并且被配置为将电子束 变成电信号。 在电子束检测器中，散射体设置在与屏蔽件中的任何开口相等的距离处，并且光束检测元件设置在与屏蔽件中的任何开口相等的距离处。 因此，电子束检测器可以根据开口的位置抑制检测灵敏度的变化。