公开(公告)号：US20230245905A1

公开(公告)日：2023-08-03

申请号：US18101656

申请日：2023-01-26

Applicant: ASM IP Holding B.V.

Inventor： Joaquin Aguilar Santillan ,  Shubham Garg ,  Hong Gao ,  Todd Dunn ,  Shanker Kuttath

IPC: H01L21/67 ,  H05B3/28 ,  G01K1/02 ,  B32B18/00 ,  B32B3/26 ,  B32B3/08 ,  H01L21/683

CPC classification number: H01L21/67109 ,  H05B3/283 ,  G01K1/026 ,  B32B18/00 ,  B32B3/26 ,  B32B3/08 ,  H01L21/67248 ,  H01L21/6833 ,  H05B2203/005 ,  B32B2307/3065 ,  B32B2307/302

Abstract: A heater assembly having a laminate heater plate and a shaft. The laminate heater plate is formed from a plurality of layers, wherein one or more layers may comprise one or more of a heating element, an RF electrode, a cooling channel, and an RTD sensor.

公开(公告)号：US20220223453A1

公开(公告)日：2022-07-14

申请号：US17570232

申请日：2022-01-06

Applicant: ASM IP Holding B.V.

Inventor： Joaquin Aguilar Santillan ,  Hong Gao ,  Shanker Kuttath

IPC: H01L21/683 ,  H01L21/67 ,  H05B3/12 ,  H05B3/18

Abstract: Electrostatic chucks and methods of forming electrostatic chucks are disclosed. Exemplary electrostatic chucks include a ceramic body, a device embedded within the ceramic body, and an interface layer formed overlying the device. Exemplary methods include providing ceramic precursor material within a mold, providing a device, coating the device with an interface material to form a coated device, placing the coated device on or within the ceramic precursor material, and sintering the ceramic precursor material to form the electrostatic chuck and an interface layer between the device and ceramic material formed during the step of sintering.