-
11.发明授权公开(公告)号：US11754906B2
公开(公告)日：2023-09-12
申请号：US18093717
申请日：2023-01-05
Applicant: ASML Netherlands B.V.
CPC classification number: G02F1/353 , G02F1/3501 , G02F1/365 , G02F1/3503 , G02F1/3528
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
-
Patent Agency Ranking
公开(公告)号：US11703634B2
公开(公告)日：2023-07-18
申请号：US17836537
申请日：2022-06-09
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G02B6/02328 , G02B6/02366 , G03F7/70008 , G01B11/25
Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.
-
13.发明授权公开(公告)号：US11556044B2
公开(公告)日：2023-01-17
申请号：US17485836
申请日：2021-09-27
Applicant: ASML Netherlands B.V.
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
-
14.发明授权公开(公告)号：US11287747B2
公开(公告)日：2022-03-29
申请号：US16983264
申请日：2020-08-03
Applicant: ASML NETHERLANDS B.V.
Inventor： Andrey Nikipelov , Patrick Sebastian Uebel , Amir Abdolvand , Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Natallia Eduardauna Uzunbajakava
IPC: G03F7/20
Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.
-
15.发明授权公开(公告)号：US11163208B2
公开(公告)日：2021-11-02
申请号：US16808141
申请日：2020-03-03
Applicant: ASML Netherlands B.V.
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
-
公开(公告)号：US11099319B2
公开(公告)日：2021-08-24
申请号：US16838400
申请日：2020-04-02
Applicant: ASML Netherlands B.V.
Abstract: An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.
-
-
-
-
-
Search Results
16
records
(took 0.033 seconds)
