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    183 nm CW Laser and Inspection System
    1.
    发明申请
    183 nm CW Laser and Inspection System 审中-公开

    公开(公告)号：US20190107766A1

    公开(公告)日：2019-04-11

    申请号：US16205032

    申请日：2018-11-29

    申请人： KLA-Tencor Corporation

    发明人： Yung-Ho Alex Chuang ,  Xiaoxu Lu ,  Baigang Zhang ,  John Fielden ,  Vladimir Dribinski

    IPC分类号： G02F1/35 ,  G02F1/355

    CPC分类号： G02F1/353 ,  G02F1/3501 ,  G02F1/3551 ,  G02F1/3558 ,  G02F2001/3503 ,  G02F2001/354 ,  G02F2201/16

    摘要： A laser assembly generates continuous wave (CW) laser output light in the range of approximately 181 nm to approximately 185 nm by generating fourth harmonic light from first fundamental CW light having a first fundamental wavelength between 1 μm and 1.1 μm, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and then mixing the fifth harmonic light with second fundamental or signal CW light having a second wavelength between 1.26 μm and 1.82 μm. The fifth harmonic light is generated using an external cavity that circulates first fundamental CW light through a first nonlinear crystal, and by directing the fourth harmonic light through the first nonlinear crystal. The laser output light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.

    SYSTEM AND METHOD FOR GENERATING AN OPTICAL FREQUENCY STANDARD
    2.
    发明申请
    SYSTEM AND METHOD FOR GENERATING AN OPTICAL FREQUENCY STANDARD 审中-公开

    公开(公告)号：US20180329274A1

    公开(公告)日：2018-11-15

    申请号：US15741481

    申请日：2016-07-01

    申请人： The University of Adelaide

    发明人： Christopher Perrella ,  Philip Stephen Light ,  Andre Nicholas Luiten

    IPC分类号： G02F1/37 ,  G02F1/35 ,  H01S3/00 ,  H01S3/13 ,  H01S3/067 ,  H01S3/23

    CPC分类号： G02F1/37 ,  G02F1/3501 ,  G02F1/3532 ,  G02F2001/3507 ,  H01S3/0085 ,  H01S3/0092 ,  H01S3/067 ,  H01S3/1303 ,  H01S3/1305 ,  H01S3/1306 ,  H01S3/2383

    摘要： A system for generating an optical frequency standard is described. The system comprises a first laser source for generating a first laser output at a first frequency, a first second harmonic generator receiving as an input the first laser output to generate a frequency-doubled first laser output at a doubled first frequency, a second laser source for generating a second laser output at a second frequency different from the first frequency and a second harmonic generator receiving as an input the second laser output to form a frequency-doubled second laser output at a doubled second frequency. The system further includes a two-colour stabilisation arrangement to stabilise a sum of the doubled first and the doubled second frequencies that includes an interaction region incorporating a laser active material having a two-photon transition from a first energy level to a second energy level which receives as an input the frequency-doubled first laser output and the frequency-doubled second laser output where these outputs are selected to together cause the two-photon transition from the first energy level to the second energy level using an intermediate energy level to enhance the two-photon transition rate. The system also includes a detector to detect an indicator of the two-photon transition occurring in the interaction region which generates a frequency stabilisation signal for modifying either the first laser output or the second laser output to stabilise the sum of the doubled first frequency and the doubled second frequency to the two-photon transition based on the indicator and a stabilised optical output generator that includes a sum frequency generator receiving as an input the first laser output and the second laser output to generate a stabilised optical output with a frequency corresponding to the optical frequency standard.

    Optical parametric oscillator with fast tuning
    5.
    发明授权
    Optical parametric oscillator with fast tuning 有权

    公开(公告)号：US09915853B2

    公开(公告)日：2018-03-13

    申请号：US14756711

    申请日：2015-10-02

    申请人： Lam Khanh Nguyen

    发明人： Lam Khanh Nguyen

    IPC分类号： G02F1/39 ,  G02F1/35 ,  G02F1/355 ,  H02P25/06

    CPC分类号： G02F1/39 ,  G02F1/3501 ,  G02F1/3551 ,  G02F2001/3503 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/3546 ,  H02P25/034 ,  H02P25/06

    摘要： An OPO with very fast and accurate tuning. The angle of the crystals in the OPO is controlled by converting the linear motion of a voice coil into rotational motion. In preferred embodiments one or two OPO crystals are mounted as a crystal unit that can rotate around an axis such that the angle of the crystals with respect to the beams' direction can be varied to generate the desired wavelengths. The crystal unit has a lever that is connected to the shaft of the voice coil such that as the shaft extend or retracts the level is pulled or pushed and the linear motion of the shaft is converted to an angular motion of the crystal unit. The position of the voice-coil shaft is controlled in a close-loop based on a built-in encoder. The relation between the reading of the encoder and the crystals' angle is recorded and provides the calibration of the unit. Preferably calibration is done by measuring the output wavelength of the OPO as a function of the encoder position.