公开(公告)号：US20020181849A1

公开(公告)日：2002-12-05

申请号：US09873910

申请日：2001-06-04

Applicant: AXSUN Technologies, Inc.

Inventor： Dale C. Flanders

IPC: G02B006/35

CPC classification number: G02B6/29395 ,  G02B6/2935 ,  G02B6/29358 ,  G02B2006/12104

Abstract: A dynamic optical spectral filter is implemented in a microelectromechanical system (MEMS). It comprises a frame. An array of mirrors is provided on a first portion of the frame, along with a second array of adjustment mirrors on a second portion of the frame. An array of variable beam splitters is provided on a middle portion of the frame, between the first array and the second array. Finally, to provide the filter functionality, optical delays are disposed in beam paths between the first mirror array the second mirror array. These elements are used to produce multiple Mach-Zehnder interferometers, such as cascaded or series interferometers. Implementations have advantages associated with speed of operation and can have polarization isotropy.

Abstract translation: 动态光谱滤波器在微机电系统（MEMS）中实现。 它包括一个框架。 在框架的第一部分上设置反射镜阵列以及在框架的第二部分上的第二调节镜阵列。 可变分束器的阵列设置在框架的中间部分之间，在第一阵列和第二阵列之间。 最后，为了提供滤波器功能，光学延迟被布置在第一反射镜阵列与第二反射镜阵列之间的光束路径中。 这些元件用于生产多台Mach-Zehnder干涉仪，如级联或串联干涉仪。 实施具有与操作速度相关的优点，并且可以具有偏振各向同性。

公开(公告)号：US20020072015A1

公开(公告)日：2002-06-13

申请号：US10016797

申请日：2001-12-10

Applicant: AXSUN Technologies, Inc.

Inventor： Michael F. Miller ,  Dale C. Flanders

IPC: G03C005/00 ,  G02B026/08 ,  G02B005/08 ,  B29D011/00

CPC classification number: B81B3/001 ,  G02B26/001 ,  G02B26/02

Abstract: Tabs or stops are integrated into a membrane structure to prevent its snapdown. Features comprising two surfaces separated by a distance equal to the maximum desired range of movement are produced. When the two surfaces contact, the motion of the structure is arrested or greatly diminished by increasing its rigidity. For an electrostatically actuated MEMS structure, these features can be used to limit the range of motion such that pull-in or snapdown is avoided, greatly enhancing the reliability of the device. One key design feature is that the two contacting surfaces are maintained at the same electrical potential avoiding problems associated with electrostatic cavity discharge.

Abstract translation: 标签或止动件集成到膜结构中以防止其卡扣。 产生包括两个表面分开等于最大期望运动范围的距离的特征。 当两个表面接触时，结构的运动通过增加其刚度而被阻止或大大减小。 对于静电驱动的MEMS结构，这些特征可用于限制运动范围，从而避免拉入或跳跃，大大提高了设备​​的可靠性。 一个关键设计特征是两个接触表面保持在相同的电位，避免与静电腔排放相关的问题。