公开(公告)号：US06303401B2

公开(公告)日：2001-10-16

申请号：US09729066

申请日：2000-12-04

Applicant: Marion Nichterwitz ,  Alexander Ruf

Inventor： Marion Nichterwitz ,  Alexander Ruf

IPC: H01Z2100

CPC classification number: C25D21/12 ,  C25D7/12

Abstract: A method for producing a metal layer with a given thickness includes the step of measuring an electrical resistance of the metal layer via connections on a starting layer provided under the metal layer. The resistance measurement is performed during or after the deposition of the metal layer. The layer thickness of the deposited metal layer is determined from the resistance measurement. Depending on the thickness of the already deposited metal layer, the deposition process is continued or repeated until a metal layer with a desired thickness is produced.

Abstract translation: 用于制造具有给定厚度的金属层的方法包括通过设置在金属层下面的起始层上的连接来测量金属层的电阻的步骤。 电阻测量在金属层沉积期间或之后进行。 沉积金属层的层厚由电阻测量确定。 取决于已经沉积的金属层的厚度，继续或重复沉积过程，直到产生具有所需厚度的金属层。

公开(公告)号：US06238826B1

公开(公告)日：2001-05-29

申请号：US09477445

申请日：2000-01-04

Applicant: Alexander Ruf

Inventor： Alexander Ruf

IPC: G03F900

CPC classification number: G03F7/20

Abstract: An apparatus for transferring structures to a layer to be patterned. The apparatus has a base element and at least one radiation-conducting structure projecting from the base element. The radiation-conducting structure guides radiation to an exit aperture facing away from the base element and the shape of which structure is matched to that of the structure to be transferred.

Abstract translation: 一种用于将结构转移到待图案化层的装置。 该装置具有基座元件和从基座元件伸出的至少一个辐射导电结构。 辐射传导结构将辐射引导到远离基本元件的出口孔，并且其结构的形状与要传送的结构的形状相匹配。

公开(公告)号：US5465611A

公开(公告)日：1995-11-14

申请号：US220157

申请日：1994-03-30

Applicant: Alexander Ruf ,  Michael Abraham ,  Manfred Lacher ,  Thomas Zetterer ,  Thomas R. Dietrich

Inventor： Alexander Ruf ,  Michael Abraham ,  Manfred Lacher ,  Thomas Zetterer ,  Thomas R. Dietrich

IPC: B81B3/00 ,  B81C1/00 ,  G01B1/00 ,  G01B7/34 ,  G01B9/00 ,  G01B9/04 ,  G01L1/04 ,  G01L1/24 ,  G01L5/00 ,  G01N27/00 ,  G01Q20/02 ,  G01Q60/38 ,  G01Q70/08 ,  H01J37/28 ,  H01L21/302

CPC classification number: G01Q60/38 ,  B82Y35/00 ,  G01Q20/02 ,  Y10S977/863

Abstract: A sensor head (1) is described, which has a spacer (5b) between a carrier element (2) and the spring arm (7), which, perhaps carries a sensor tip (9) at the free end; the spacer defines the distance d between the spring arm (7) and the carrier element (2). In a preferred embodiment, the spacer (5b) comprises a sacrificial layer (5a), which is etched out, except for the spacer (5b), after the formation of a corresponding layer system between the spring arm (7) and the carrier element (2). The carrier element (2) and the spring arm (7) are each provided with a reflecting layer (4 and 6). In accordance with another specific embodiment, plasmonactive layers can also be provided.

Abstract translation: 描述了一种传感器头（1），其在载体元件（2）和弹簧臂（7）之间具有间隔件（5b），其可以在自由端承载传感器尖端（9） 间隔件限定弹簧臂（7）和载体元件（2）之间的距离d。 在优选实施例中，在弹簧臂（7）和载体元件（7）之间形成相应的层系统之后，间隔物（5b）包括除了间隔物（5b）之外被蚀刻掉的牺牲层（5a） （2）。 载体元件（2）和弹簧臂（7）均设有反射层（4和6）。 根据另一具体实施方案，也可以提供等离子体活性层。