公开(公告)号：US20230117345A1

公开(公告)日：2023-04-20

申请号：US17506040

申请日：2021-10-20

Applicant: Applied Materials Israel Ltd.

Inventor： Elad Eizner ,  Amir Shoham

IPC: G02B21/06 ,  G02B5/30 ,  G01N21/95 ,  G01N21/47

Abstract: An optical inspection system that may include an illumination optics configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; at least one collection optics configured to collect light from the sample; at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; multiple polarizers that are configured to (a) set a polarization of the illumination light beam by selectively introducing, under a control of the control unit, at least one illumination optics polarization change, and (b) set a polarization of the at least one detected light beam by selectively introducing, under a control of the control unit, at least one collection optics polarization change. The multiple polarizers may include one or more illumination half-wave plates, one or more quarter-wave plates, and one or more inhomogeneous polarizers.

公开(公告)号：US09810643B1

公开(公告)日：2017-11-07

申请号：US14037304

申请日：2013-09-25

Applicant: Applied Materials Israel, Ltd.

Inventor： Amir Shoham ,  Yoav Berlatzky ,  Haim Feldman

IPC: G01N21/956

CPC classification number: G01N21/95607 ,  G01N21/95623

Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.

公开(公告)号：US09354212B2

公开(公告)日：2016-05-31

申请号：US14149645

申请日：2014-01-07

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Yoav Berlatzky ,  Amir Shoham ,  Ido Dolev

IPC: G06K9/00 ,  G01N33/00 ,  G01N21/88

CPC classification number: G01N33/00 ,  G01N21/8806 ,  G01N2021/8822 ,  G01N2033/0095

Abstract: A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals.

Abstract translation: 一种方法和装置，其可以包括被布置成用辐射照射样品表面并收集来自样品表面的反射辐射的光学器件; 其中所述光学器件包括具有对应于收集或照明的不同角度区域的多个光瞳段的光瞳; 以及检测模块，布置成接收反射的辐射并且为每个瞳孔段产生瞳孔段检测信号。

公开(公告)号：US20150198648A1

公开(公告)日：2015-07-16

申请号：US14153982

申请日：2014-01-13

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Amir Shoham ,  Alon Litman

IPC: G01R31/02 ,  G01R31/305

CPC classification number: G01R31/305 ,  G01R31/2812 ,  G01R31/2853

Abstract: A system and a method for evaluating a conductor, the method may include: illuminating a first area of a conductor by a first electron beam thereby charging the first area; illuminating by a second electron beam a second area of the conductor; and wherein an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting, by a detector, detected emitted electrons that were emitted substantially from the second area and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor.

Abstract translation: 一种用于评估导体的系统和方法，所述方法可以包括：通过第一电子束照射导体的第一区域，从而对第一区域充电; 通过第二电子束照射导体的第二区域; 并且其中所述第一和第二区域的聚集体尺寸是所述导体的总体尺寸的一部分; 通过检测器检测基本上从第二区域发射的检测到的发射电子并产生指示检测到的发射电子的检测信号; 以及由处理器处理检测信号以提供关于导体的导电性的信息。