Abstract:
Disclosed herein is an object detection system including, a light radiation section, a light sweeping block, a light reflection body, a reflected-light detection section, and a reflected-light analysis section.
Abstract:
An emission intensity measuring device includes a light receiving unit that is disposed opposed to a biochip having a plurality of compartments in which a sample is housed, and includes a plurality of light receiving elements that are arranged, and a determining section that determines a weighting rate of each of the light receiving elements based on a noise characteristic of the light receiving element, acquired in advance. The emission intensity measuring device further includes a multiplying section that multiplies the output of each of the light receiving elements by the weighting rate to calculate a weighted output of each of the light receiving elements, and an adding section that adds the weighted outputs of the light receiving elements opposed to a respective one of the compartments.
Abstract:
Disclosed herein is an object detection system including, a light radiation section, a light sweeping block, a light reflection body, a reflected-light detection section, and a reflected-light analysis section.
Abstract:
A diffraction grating light modulator composed of a plurality of diffraction grating light modulating elements formed on a substrate, each consisting of a lower electrode, belt-like fixed electrodes and movable electrodes supported above the lower electrode, and exposed connecting terminals (for electrical connection to external circuits) electrically connected to the movable electrodes, the fixed electrodes and the movable electrodes constituting a diffraction grating upon application of a voltage to the lower electrode, the diffraction grating light modulator having a protective electrode surrounding the connecting terminals, so that the diffraction grating light modulating element is certainly protected from damage by static electricity.
Abstract:
The imaging magnification of an imaging optical system 6 is set such that the image resolution of an ultraviolet CCD camera 5 is within a range from 10 nm to 30 nm, on a resist pattern 102 to be inspected. In addition, every time when the ultraviolet CCD camera 5 picks up an image, the resist pattern 102 to be inspected is irradiated at an irradiation light amount within a range from 0.5 mJ/cm2 to an irradiation threshold value at which the resist pattern 102 is not caused to contract or an irradiation threshold value at which an absorption rate of an anti-reflection film provided near the resist pattern is not caused to change.
Abstract translation:成像光学系统6的成像倍率被设定为使得紫外线CCD照相机5的图像分辨率在10nm至30nm的范围内,在待检查的抗蚀剂图案102上。 此外,每当紫外线CCD照相机5拾取图像时,将以0.5mJ / cm 2的范围内的照射光量照射到要被检查的抗蚀剂图案102到抗蚀剂图案102的照射阈值 不会导致收缩,也不会使设置在抗蚀剂图案附近的防反射膜的吸收率不发生变化的照射阈值。
Abstract:
An optical device having a periodic inverted domain construction is used for second harmonic generating devices or the like. The optical device comprises a ferroelectric crystal substrate which is provided in this surface with a periodic inverted domain structure consisting of a plurality of parallel inverted domain regions arranged at intervals. The thickness t and width w of the inverted domain regions and the thickness T of the ferroelectric crystal substrate meet the criteria expressed by: t/w.gtoreq.1 and 0.1