Small-Angle X-Ray Scatterometry
    11.
    发明申请

    公开(公告)号:US20240377342A1

    公开(公告)日:2024-11-14

    申请号:US18783482

    申请日:2024-07-25

    Abstract: An x-ray apparatus includes a mount that is configured to hold a sample and an x-ray source that is configured to direct an x-ray beam toward a first side of the sample. A small angle x-ray scattering (SAXS) detector is positioned downstream to a second side of the sample, and configured to detect at least a part of a SAXS pattern formed by x-rays that have been transmitted through the sample and exited through the second side. An x-ray fluorescence (XRF) detector is configured to detect fluorescent x-rays emitted from the sample, wherein the XRF detector comprises an aperture.

    Analysis of X-ray Scatterometry Data using Deep Learning

    公开(公告)号:US20240027374A1

    公开(公告)日:2024-01-25

    申请号:US18333555

    申请日:2023-06-13

    CPC classification number: G01N23/207 G06N3/08 G01N2223/6116

    Abstract: A method for training a neural network (NN), the method includes: receiving a training dataset including: (a) multiple pairs of: (i) a diffraction image indicative of X-ray photons diffracted from structures formed in a sample responsively to directing an incident X-ray beam at an angle relative to the sample, and (ii) a label, including: a first parameter indicative of at least a first property of the structures, and a second parameter indicative of at least a second property of the incident X-ray beam, and (b) multiple predefined outputs for the multiple pairs, respectively. The NN is trained to obtain the predefined outputs by: (i) applying the NN to at least a given pair of the pairs, and (ii) responsively to receiving from the NN an estimated output of the given pair, providing the NN with a given predefined output of the predefined outputs that corresponds to the given pair.

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