公开(公告)号：US20240027374A1

公开(公告)日：2024-01-25

申请号：US18333555

申请日：2023-06-13

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Andrei Baranovskiy ,  Inbar Grinberg ,  Michael G. Greene ,  Matthew Wormington

IPC: G01N23/207 ,  G06N3/08

CPC classification number: G01N23/207 ,  G06N3/08 ,  G01N2223/6116

Abstract: A method for training a neural network (NN), the method includes: receiving a training dataset including: (a) multiple pairs of: (i) a diffraction image indicative of X-ray photons diffracted from structures formed in a sample responsively to directing an incident X-ray beam at an angle relative to the sample, and (ii) a label, including: a first parameter indicative of at least a first property of the structures, and a second parameter indicative of at least a second property of the incident X-ray beam, and (b) multiple predefined outputs for the multiple pairs, respectively. The NN is trained to obtain the predefined outputs by: (i) applying the NN to at least a given pair of the pairs, and (ii) responsively to receiving from the NN an estimated output of the given pair, providing the NN with a given predefined output of the predefined outputs that corresponds to the given pair.