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公开(公告)号：US07098537B2
公开(公告)日：2006-08-29
申请号：US10707117
申请日：2003-11-21
CPC分类号： H01L21/76843 , H01L23/53238 , H01L2924/0002 , H01L2924/00
摘要： In an interconnect structure of an integrated circuit, a diffusion barrier film in a damascene structure is formed of a film having the composition TaNx, where x is greater than 1.2 and with a thickness of 0.5 to 5 nm.
摘要翻译： 在集成电路的互连结构中，镶嵌结构中的扩散阻挡膜由具有组成TaN x x的膜形成，其中x大于1.2，厚度为0.5至5nm 。
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12.发明申请公开(公告)号：US20120273362A1
公开(公告)日：2012-11-01
申请号：US13534855
申请日：2012-06-27
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
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13.发明申请公开(公告)号：US20110094884A1
公开(公告)日：2011-04-28
申请号：US12607258
申请日：2009-10-28
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
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14.发明授权公开(公告)号：US08448790B2
公开(公告)日：2013-05-28
申请号：US13534855
申请日：2012-06-27
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
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公开(公告)号：US20120267249A1
公开(公告)日：2012-10-25
申请号：US13534890
申请日：2012-06-27
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
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16.发明授权公开(公告)号：US08307994B2
公开(公告)日：2012-11-13
申请号：US12607258
申请日：2009-10-28
CPC分类号： B01D67/0065 , B01D71/022 , B01D2323/283 , B01D2325/021 , Y10T428/249953
摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.
摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。
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公开(公告)号：US09422154B2
公开(公告)日：2016-08-23
申请号：US13021544
申请日：2011-02-04
IPC分类号： B81C1/00
CPC分类号： C25D11/022 , B81C1/00071 , B81C2201/0114 , C25D7/04 , C25D11/26 , C25D11/34
摘要： Nanofluidic passages such as nanochannels and nanopores are closed or opened in a controlled manner through the use of a feedback system. An oxide layer is grown or removed within a passage in the presence of an electrolyte until the passage reaches selected dimensions or is closed. The change in dimensions of the nanofluidic passage is measured during fabrication. The ionic current level through the passage can be used to determine passage dimensions. Fluid flow through an array of fluidic elements can be controlled by selective oxidation of fluidic passages between elements.
摘要翻译： 纳米流体通道如纳米通道和纳米孔通过使用反馈系统以受控的方式封闭或打开。 在存在电解液的情况下，在通道内生长或除去氧化物层，直到通道达到所选尺寸或闭合。 在制造过程中测量纳米流体通道的尺寸变化。 通过通道的离子电流水平可用于确定通道尺寸。 通过流体元件阵列的流体流动可以通过元件之间的流体通道的选择性氧化来控制。
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18.发明申请CHARGED ENTITIES AS LOCOMOTIVE TO CONTROL MOTION OF POLYMERS THROUGH A NANOCHANNEL 有权充电实体通过纳米通道控制聚合物的运动公开(公告)号：US20130068618A1
公开(公告)日：2013-03-21
申请号：US13611662
申请日：2012-09-12
申请人： Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stanislav Polonsky , Stephen M. Rossnagel , Ajay K. Royyuru , Gustavo A. Stolovitzky , George F. Walker
发明人： Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stanislav Polonsky , Stephen M. Rossnagel , Ajay K. Royyuru , Gustavo A. Stolovitzky , George F. Walker
CPC分类号： B82Y15/00 , C12Q1/6869 , C12Q2565/631
摘要： A technique for controlling the motion of one or more charged entities linked to a polymer through a nanochannel is provided. A first reservoir and a second reservoir are connected by the nanochannel. An array of electrodes is positioned along the nanochannel, where fluid fills the first reservoir, the second reservoir, and the nanochannel. A first electrode is in the first reservoir and a second electrode is in the second reservoir. The first and second electrodes are configured to direct the one or more charged entities linked to the polymer into the nanochannel. An array of electrodes is configured to trap the one or more charged entities in the nanochannel responsive to being controlled for trapping. The array of electrodes is configured to move the one or more charged entities along the nanochannel responsive to being controlled for moving.
摘要翻译： 提供了一种用于控制通过纳米通道连接到聚合物的一个或多个带电实体的运动的技术。 第一储存器和第二储存器通过纳米通道连接。 电极阵列沿纳米通道定位，其中流体填充第一储存器，第二储存器和纳米通道。 第一电极在第一储存器中，第二电极位于第二储存器中。 第一和第二电极被配置为将连接到聚合物的一个或多个带电实体引导到纳米通道中。 电极阵列被配置为捕捉纳米通道中的一个或多个带电实体，以响应于被捕获而被控制。 电极阵列被配置为响应于被控制移动而沿着纳米通道移动一个或多个带电实体。
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19.发明申请公开(公告)号：US20120293915A1
公开(公告)日：2012-11-22
申请号：US13559095
申请日：2012-07-26
摘要： A capacitor includes a plurality of nanochannels formed in a dielectric material. A conductive film is formed over interior surfaces of the nanochannels, and a charge barrier is formed over the conductive film. An electrolytic solution is disposed in the nanochannels. An electrode is coupled to the electrolytic solution in the nanochannels to form the capacitor.
摘要翻译： 电容器包括形成在电介质材料中的多个纳米通道。 在纳米通道的内表面上形成导电膜，并且在导电膜上形成电荷势垒。 在纳米通道中设置电解液。 电极与纳米通道中的电解液结合形成电容器。
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公开(公告)号：US20110207286A1
公开(公告)日：2011-08-25
申请号：US13100456
申请日：2011-05-04
申请人： Geoffrey W. Burr , Chandrasekharan Kothandaraman , Chung Hon Lam , Xiao Hu Liu , Stephen M. Rossnagel , Christy S. Tyberg , Robert L. Wisnieff
发明人： Geoffrey W. Burr , Chandrasekharan Kothandaraman , Chung Hon Lam , Xiao Hu Liu , Stephen M. Rossnagel , Christy S. Tyberg , Robert L. Wisnieff
IPC分类号： H01L21/768
CPC分类号： H01L23/5256 , H01L23/5252 , H01L45/06 , H01L45/1206 , H01L45/1226 , H01L45/1286 , H01L45/1293 , H01L45/144 , H01L45/148 , H01L45/1683 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
摘要： A reversible fuse structure in an integrated circuit is obtained through the implementation of a fuse cell having a short thin line of phase change materials in contact with via and line structures capable of passing current through the line of phase change material (fuse cell). The current is passed through the fuse cell in order to change the material from a less resistive material to a more resistive material through heating the phase change material in the crystalline state to the melting point then quickly quenching the material into the amorphous state. The reversible programming is achieved by passing a lower current through the fuse cell to convert the high resistivity amorphous material to a lower resistivity crystalline material. Appropriate sense-circuitry is integrated to read the information stored in the fuses, wherein said sense circuitry is used to enable or disable circuitry.
摘要翻译： 集成电路中的可逆熔丝结构通过实现具有短路相变材料的熔断电池获得，所述相变材料与能够使电流通过相变材料线（熔丝电池）的通孔和线结构相接触。 电流通过熔丝电池，以便通过将结晶状态的相变材料加热至熔点，从而将材料从较小电阻的材料转变为更电阻的材料，然后快速将材料淬火成非晶状态。 可逆编程通过使较低电流通过熔丝电池来实现，以将高电阻率无定形材料转换成较低电阻率的晶体材料。 集成适当的感测电路以读取存储在熔丝中的信息，其中所述感测电路用于启用或禁用电路。
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