公开(公告)号：US09517962B2

公开(公告)日：2016-12-13

申请号：US14660146

申请日：2015-03-17

申请人： DISCO CORPORATION

发明人： Noboru Takeda ,  Hiroshi Morikazu ,  Xiaoming Qiu ,  Fumiteru Tashino ,  Ken Togashi

IPC分类号： C03B33/02 ,  B23K26/00 ,  B23K20/10 ,  B23K26/03 ,  B23K26/08 ,  C03B33/033 ,  C03B33/04

CPC分类号： C03B33/0222 ,  B23K20/10 ,  B23K26/0006 ,  B23K26/03 ,  B23K26/0624 ,  B23K26/0853 ,  B23K26/364 ,  B23K26/384 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/52 ,  B65G2249/04 ,  C03B33/033 ,  C03B33/04

摘要： A plate-shaped object processing method forms a through hole of a desired shape in a plate-shaped object. The method includes a through hole contour forming step of performing laser processing within the plate-shaped object along a contour of the through hole to be formed, by positioning, within the plate-shaped object, a focal point of a pulsed laser beam of a wavelength capable of passing through the plate-shaped object. The beam is applied along the contour of the through hole to be formed by a pulsed laser beam irradiation unit including a condenser applying the laser beams. A through hole is formed by breaking the laser-processed contour of the through hole and forming the through hole by positioning an ultrasonic transducer of an ultrasonic wave applying unit in correspondence with the contour of the through hole to be formed, and applying an ultrasonic wave.

摘要翻译： 板形物体处理方法在板状物体中形成所需形状的通孔。 该方法包括通孔轮廓形成步骤，通过在板状物体内定位一个脉冲激光束的焦点，沿着待形成的通孔的轮廓在该板状物体内进行激光加工 能够穿过板状物体的波长。 沿着通孔的轮廓施加光束，该通孔由包括施加激光束的聚光器的脉冲激光束照射单元形成。 通过使通孔的激光加工轮廓断裂并形成通孔，通过将超声波施加单元的超声波换能器与要形成的通孔的轮廓相对应地形成通孔，并且施加超声波 。