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公开(公告)号：US11204038B2
公开(公告)日：2021-12-21
申请号：US16612911
申请日：2018-04-20
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi , Toom Miwata , Yoshiyuki Sakaguchi
Abstract: Bobbins of an annular electromagnet each have a bobbin body that has a coil wire wound around an outer periphery thereof and is attached to a respective tooth of an annular stator core by having the corresponding tooth inserted therethrough. A first flange portion in a rectangular hallow shape is provided on an end surface of the bobbin body near the center of the annular stator core and a second flange portion in a rectangular hallow shape is provided on the other end surface of the bobbin body. A coil winding amount increasing means is formed at least on the first flange portion or the second flange portion and increases the amount of winding of the coil wire wound around the bobbin body.
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公开(公告)号：US20200158117A1
公开(公告)日：2020-05-21
申请号：US16604820
申请日：2018-04-11
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi , Tooru Miwata , Yoshiyuki Sakaguchi
Abstract: In a vacuum pump, the lower Ra sensor target, the fourth spacer, and the Ra electromagnetic target are configured in this order, from the inlet port side toward the outlet port side, at the lower side of the shaft of the 5-axis control magnetic bearing Likewise, at the lower side of the stator, the lower Ra sensor and the lower Ra electromagnet are configured in this order, from the inlet port toward the outlet port. In other words, the lower Ra sensor is disposed above the lower Ra electromagnet. According to this configuration, the third spacer fixed above the lower Ra sensor target is shortened. As a result, the height of the 5-axis control magnetic bearing and the length of the stator column enclosing electrical components constituting the 5-axis control magnetic bearing is reduced, thereby reducing the overall height of the vacuum pump.
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