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公开(公告)号：US09530607B2
公开(公告)日：2016-12-27
申请号：US14457385
申请日：2014-08-12
Applicant: EXCILLUM AB
Inventor： Oscar Hemberg , Tomi Tuohimaa , Mikael Otendal
CPC classification number: H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008
Abstract: Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. Also, a corresponding circulation system and an X-ray source provided with such circulation system.
Abstract translation: 提出了用于将液体金属提供到电子束将冲击液态金属以产生X射线的相互作用区域的闭环循环。 在一种方法中，使用高压泵将液态金属的压力提高至至少10巴。 然后将加压液体金属传导到喷嘴并以空间连续射流的形式喷射到真空室中。 在通过真空室之后，将液态金属收集在收集容器中，并且将液态金属的压力升高到入口压力，例如， 使用底漆泵，适用于高压泵的入口。 另外，具有这样的循环系统的相应的循环系统和X射线源。
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公开(公告)号：US11651927B2
公开(公告)日：2023-05-16
申请号：US17297126
申请日：2019-12-17
Applicant: Excillum AB
Inventor： Tomi Tuohimaa , Ulf Lundström , Björn Hansson
CPC classification number: H01J35/147 , H05G1/52 , H01J2235/082
Abstract: An X-ray source including a liquid target source configured to provide a liquid target in an interaction region of the X-ray source, an electron source adapted to provide an electron beam directed towards the interaction region, such that the electron beam interacts with the liquid target to generate X-ray radiation, and an electron collector arranged at a distance downstream of the interaction region, as seen along a travel direction of the electron beam. The electron collector includes an impact portion configured to absorb electrons of the electron beam impinging thereon, and the impact portion is arranged so as to be oblique with respect to the travel direction of the electron beam at the impact portion.
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公开(公告)号：US20190131103A1
公开(公告)日：2019-05-02
申请号：US16309754
申请日：2017-06-18
Applicant: Excillum AB
Inventor： Tomi Tuohimaa
Abstract: An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a chamber comprising an interaction region, and a first electron source operable to emit a first electron beam, including electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target to generate X-ray radiation. The X-ray source further includes a second electron source adapted to be independently operated to emit a second electron beam including electrons of a second energy for ionising particles in the chamber, and an ion collection tool that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field. By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.
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公开(公告)号：US09947502B2
公开(公告)日：2018-04-17
申请号：US15147394
申请日：2016-05-05
Applicant: Excillum AB
Inventor： Oscar Hemberg , Tomi Tuohimaa , Björn Sundman
CPC classification number: H01J35/14 , H01J35/08 , H01J2235/082 , H05G1/52
Abstract: A technique for indirectly measuring the degree of alignment of a beam in an electron-optical system including aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practiced in connection with an X-ray source which is operable to produce an X-ray target, further, a technique for determining and controlling a width of an electron-beam at its intersection point with the target.
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