-
公开(公告)号：US11408429B2
公开(公告)日：2022-08-09
申请号：US16477745
申请日：2018-01-12
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Yanbin Sun , Kengo Saegusa , Hideki Omori
Abstract: Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.
-
公开(公告)号：US20220228594A1
公开(公告)日：2022-07-21
申请号：US17611362
申请日：2020-05-22
Applicant: Edwards Japan Limited
Inventor： Kengo Saegusa , Nahoko Yoshihara , Yoshinobu Ohtachi
IPC: F04D19/04
Abstract: A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided.
The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.-
Patent Agency Ranking
公开(公告)号：US20220170470A1
公开(公告)日：2022-06-02
申请号：US17441555
申请日：2020-03-13
Applicant: Edwards Japan Limited
Inventor： Kengo Saegusa
Abstract: A vacuum pump in which a pump main body and a control apparatus that controls the pump main body are integrated with each other. The control apparatus includes a cylindrical portion which protrudes from a chassis of the control apparatus and inside which a cable that connects the pump main body and the control apparatus to each other is passed. A height of the cylindrical portion exceeds a height of a gap formed between a bottom portion of the pump main body and the chassis of the control apparatus.
-
公开(公告)号：US11081845B2
公开(公告)日：2021-08-03
申请号：US16469794
申请日：2017-12-08
Applicant: Edwards Japan Limited
Inventor： Yanbin Sun , Kengo Saegusa , Yoshiyuki Sakaguchi , Hideki Omori
Abstract: A vacuum pump has a hermetic connector disposed on a base of a body of the vacuum pump. The hermetic connector has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body. The connector is longer in a lateral direction than in an axial direction so that the connector is horizontally long in a circumferential direction of the pump body.
-
公开(公告)号：US20190309760A1
公开(公告)日：2019-10-10
申请号：US16467416
申请日：2017-12-08
Applicant: Edwards Japan Limited
Inventor： Hideki Omori , Yanbin Sun , Kengo Saegusa , Yoshiyuki Sakaguchi
Abstract: To realize a vacuum pump capable of improving the heat dissipation capability of a regenerative resistor with a simple configuration, and a control apparatus associated with the vacuum pump. The regenerative resistor is removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and then disposed in a base of the vacuum pump via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump having a large heat capacity, a temperature increase of the control apparatus is reduced.
-
公开(公告)号：US20190242387A1
公开(公告)日：2019-08-08
申请号：US16341495
申请日：2017-09-29
Applicant: Edwards Japan Limited
Inventor： Kengo Saegusa , Yanbin Sun
Abstract: A vacuum pump, and a waterproof structure and a control apparatus applied to the vacuum pump which improve efficiency of on-site maintenance work and prevent water from penetrating into a connector connecting portion when a cover is removed during circuit separation or the like. When performing maintenance work, after a chassis of a control apparatus is lowered by around several tens of millimeters, the chassis of the control apparatus is pulled out in a radial direction of a pump. Accordingly, a pump main body and the control apparatus can be readily attached and detached even when sufficient empty space is not available in an axial direction of the vacuum pump. A wall portion is circumferentially protrusively provided in side portions of the base portion and the control apparatus. Furthermore, a sealing member and a lid are inserted into a gap. Therefore, water droplets cannot easily penetrate into the gap.
-
公开(公告)号：US20190032669A1
公开(公告)日：2019-01-31
申请号：US16071781
申请日：2016-02-12
Applicant: Edwards Japan Limited
Inventor： Shinji Kawanishi , Yoshiyuki Sakaguchi , Kengo Saegusa
Abstract: The present invention provides a vacuum pump that prevents invasion of foreign matter, such as rust and particles caused by a process gas, during the process of manufacturing a semiconductor wafer, and a flexible cover and a rotor that are used in the vacuum pump. A vacuum pump has a casing that has a gas inlet port and a gas outlet port, a rotor that has a recessed portion opened toward the gas inlet port and is fastened to a rotor shaft by a bolt disposed in the recessed portion. The recessed portion is provided with a flexible cover that has an outer peripheral portion supported on an end surface of the rotor that opposes the gas inlet port, and a central portion caved in the recessed portion of the rotor, the flexible cover covering the recessed portion by elastically deforming into a convex shape toward the recessed portion.
-
-
-
-
-
-
Search Results
17
records
(took 0.017 seconds)
