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11.发明申请Contactor Devices With Carbon Nanotube Probes Embedded In A Flexible Film And Processes Of Making Such 审中-公开具有嵌入在柔性膜中的碳纳米管探针的接触器器件及其制造方法公开(公告)号：US20140139250A1
公开(公告)日：2014-05-22
申请号：US13681967
申请日：2012-11-20
Applicant: FORMFACTOR, INC.
Inventor： Onnik Yaglioglu , Benjamin N. Eldridge , Alexander Slocum
IPC: G01R1/073
CPC classification number: B82Y30/00 , G01R1/06744 , G01R1/07314
Abstract: Electrically conductive columns of intertwined carbon nanotubes embedded in a mass of material flexible, resilient electrically insulating material can be used as electrically conductive contact probes. The columns can extend between opposing sides of the mass of material. Terminals of a wiring substrate can extend into the columns and be electrically connected to an electrical interface to a tester that controls testing of a device under test. A pair of physically interlocked structures can coupling the mass of material to the wiring substrate. The pair can include a receptacle and a protrusion.
Abstract translation: 嵌入质量柔软，有弹性的电绝缘材料的缠绕在一起的碳纳米管的导电柱可用作导电接触探针。 柱可以在材料块的相对侧之间延伸。 布线基板的端子可以延伸到列中并且电连接到电连接到测试器的电接口，该测试器控制被测器件的测试。 一对物理互锁的结构可以将材料质量耦合到布线基板。 该对可以包括容器和突起。
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公开(公告)号：US10578649B2
公开(公告)日：2020-03-03
申请号：US16116317
申请日：2018-08-29
Applicant: FormFactor, Inc.
Inventor： Benjamin N. Eldridge , Masanori Watanabe , Scott Kuhnert , Jeffrey Coussens
IPC: G01R1/073
Abstract: Vertical probe heads having a space transformer laterally tiled into several sections are provided. This change relative to conventional approaches improves manufacturing yield. These probe heads can include metal ground planes, and in embodiments where the ground planes are provided as separate metal plates parallel to the guide plates, the metal plates can also be laterally tiled into several sections. Such tiling of metal plates improves manufacturing yield and alleviates thermal mismatch issues. Probes are not mechanically connected to the space transformer, which facilitates replacement of individual probes of an array.
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公开(公告)号：US20190120876A1
公开(公告)日：2019-04-25
申请号：US16164326
申请日：2018-10-18
Applicant: FormFactor, Inc.
Inventor： Jason William Cosman , Benjamin N. Eldridge , Eric Hill , John Ebner , Edin Sijercic
Abstract: Improved electrically conductive guide plates for vertical probe arrays are provided by patterning a thin metal layer disposed on an insulating substrate. Holes passing through the guide plate for guiding probes can be electrically connected or isolated from each other in any pattern according to the deposition of the metal. Such structures can include several distinct ground and/or voltage planes. Furthermore, passive electrical components can be included in the guide plate, by patterning of the deposited metal and/or by integration of passive electrical components with the deposited metal traces.
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公开(公告)号：US20190064220A1
公开(公告)日：2019-02-28
申请号：US16116317
申请日：2018-08-29
Applicant: FormFactor, Inc.
Inventor： Benjamin N. Eldridge , Masanori Watanabe , Scott Kuhnert , Jeffrey Coussens
IPC: G01R1/073
Abstract: Vertical probe heads having a space transformer laterally tiled into several sections are provided. This change relative to conventional approaches improves manufacturing yield. These probe heads can include metal ground planes, and in embodiments where the ground planes are provided as separate metal plates parallel to the guide plates, the metal plates can also be laterally tiled into several sections. Such tiling of metal plates improves manufacturing yield and alleviates thermal mismatch issues. Probes are not mechanically connected to the space transformer, which facilitates replacement of individual probes of an array.
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