公开(公告)号：US09233782B2

公开(公告)日：2016-01-12

申请号：US13715897

申请日：2012-12-14

Applicant: GIGAPHOTON INC

Inventor： Takanobu Ishihara ,  Toshihiro Nishisaka ,  Hiroshi Someya ,  Osamu Wakabayashi

IPC: B67D5/54 ,  B67D5/40 ,  B65D47/06 ,  H05G2/00

CPC classification number: B65D47/06 ,  H05G2/005 ,  H05G2/006

Abstract: A target supply device may include a tank formed cylindrically with a first material, a cylindrical portion for covering the tank, the cylindrical portion being formed of a second material having higher tensile strength than the first material, a first lid formed of the second material and having a through-hole, the first lid being provided at one end in an axial direction of the cylindrical portion, a second lid formed of the second material and provided at another end opposite the one end in the axial direction of the cylindrical portion, and a nozzle provided to be in fluid communication with the interior of the tank and to pass through the through-hole, the nozzle being formed of the first material.

Abstract translation: 目标供给装置可以包括：具有第一材料的圆柱形的罐，用于覆盖罐的圆柱形部分，圆柱形部分由具有比第一材料更高的拉伸强度的第二材料形成，第一盖由第二材料形成， 具有通孔，所述第一盖设置在所述圆筒部的轴向的一端，所述第二盖由所述第二材料形成，并且设置在所述圆筒部的轴向的一端的相反侧的另一端，以及 喷嘴，其设置成与所述罐的内部流体连通并且穿过所述通孔，所述喷嘴由所述第一材料形成。

公开(公告)号：US08804902B2

公开(公告)日：2014-08-12

申请号：US13846894

申请日：2013-03-18

Applicant: Gigaphoton, Inc.

Inventor： Hiroshi Someya ,  Tamotsu Abe ,  Takashi Suganuma ,  Hideo Hoshino ,  Akira Sumitani

IPC: G21K1/06 ,  G03F1/00 ,  G02B15/14 ,  G21K1/10 ,  G03F7/20 ,  B82Y10/00 ,  G03F1/22 ,  G02B13/14 ,  G02B15/173

CPC classification number: G21K1/06 ,  B82Y10/00 ,  G02B7/18 ,  G02B7/183 ,  G02B13/14 ,  G02B15/14 ,  G02B15/173 ,  G03F1/146 ,  G03F1/22 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70975 ,  G21K1/10 ,  G21K2201/067 ,  H05G2/001 ,  Y10T29/49895 ,  Y10T29/53087 ,  Y10T29/53539

Abstract: A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.

Abstract translation: 一种集电镜交换装置，能够安全且容易地交换用于收集从极紫外光源装置的室内产生的等离子体发出的极紫外光的集光镜。 集电镜更换装置包括：支撑集电镜或收集镜结构的支撑基座; 以及导轨，其设置在所述支撑基座上并且调节所述集光镜或所述集光镜结构的移动方向; 其特征在于，通过使所述集光镜或所述集光镜结构沿着所述支撑基座上的导轨移动，至少将所述集光镜从所述室取出。