公开(公告)号：US11644696B2

公开(公告)日：2023-05-09

申请号：US17223449

申请日：2021-04-06

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Kevin K. Dezfulian

IPC: G02F1/025

CPC classification number: G02F1/025 ,  G02F2203/50

Abstract: Structures including an electro-optical phase shifter and methods of fabricating a structure including an electro-optical phase shifter. The structure includes a waveguide core on a semiconductor substrate, and an interconnect structure over the waveguide core and the semiconductor substrate. The waveguide core includes a phase shifter, and the interconnect structure includes a slotted shield and a transmission line coupled to the phase shifter. The slotted shield includes segments that are separated by slots. The slotted shield is positioned between the transmission line and the substrate.

公开(公告)号：US11531164B2

公开(公告)日：2022-12-20

申请号：US17169971

申请日：2021-02-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Kevin K. Dezfulian ,  Yusheng Bian ,  Kenneth J. Giewont ,  Karen Nummy

IPC: G02B6/30 ,  G02B6/124 ,  G02B6/122 ,  G02B6/14 ,  G02B6/136 ,  G02B6/125

Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The structure includes a dielectric layer including an edge, a waveguide core region on the dielectric layer, and multiple segments on the dielectric layer. The waveguide core region has an end surface, and the waveguide core region is lengthwise tapered toward the end surface. The segments are positioned between the waveguide core region and the edge of the dielectric layer. A waveguide core has a section positioned over the waveguide core region in an overlapping arrangement. The waveguide core has an end surface, and the section of the waveguide core is lengthwise tapered toward the end surface.

公开(公告)号：US11215756B2

公开(公告)日：2022-01-04

申请号：US16859347

申请日：2020-04-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Roderick A. Augur ,  Michal Rakowski ,  Kenneth J. Giewont ,  Karen Nummy ,  Kevin K. Dezfulian ,  Bo Peng

IPC: G02B6/122 ,  G02B6/13

Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.

公开(公告)号：US20210333474A1

公开(公告)日：2021-10-28

申请号：US16859347

申请日：2020-04-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Roderick A. Augur ,  Michal Rakowski ,  Kenneth J. Giewont ,  Karen Nummy ,  Kevin K. Dezfulian ,  Bo Peng

IPC: G02B6/122 ,  G02B6/13

Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.